JPS603643U - 電子顕微鏡等の汚染防止装置 - Google Patents

電子顕微鏡等の汚染防止装置

Info

Publication number
JPS603643U
JPS603643U JP9596383U JP9596383U JPS603643U JP S603643 U JPS603643 U JP S603643U JP 9596383 U JP9596383 U JP 9596383U JP 9596383 U JP9596383 U JP 9596383U JP S603643 U JPS603643 U JP S603643U
Authority
JP
Japan
Prior art keywords
contamination prevention
trap
heater
electron microscope
prevention device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9596383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0125477Y2 (enrdf_load_stackoverflow
Inventor
北島　汪行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP9596383U priority Critical patent/JPS603643U/ja
Publication of JPS603643U publication Critical patent/JPS603643U/ja
Application granted granted Critical
Publication of JPH0125477Y2 publication Critical patent/JPH0125477Y2/ja
Granted legal-status Critical Current

Links

JP9596383U 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置 Granted JPS603643U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9596383U JPS603643U (ja) 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9596383U JPS603643U (ja) 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置

Publications (2)

Publication Number Publication Date
JPS603643U true JPS603643U (ja) 1985-01-11
JPH0125477Y2 JPH0125477Y2 (enrdf_load_stackoverflow) 1989-07-31

Family

ID=30228918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9596383U Granted JPS603643U (ja) 1983-06-22 1983-06-22 電子顕微鏡等の汚染防止装置

Country Status (1)

Country Link
JP (1) JPS603643U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504656U (enrdf_load_stackoverflow) * 1973-05-16 1975-01-18
JPS5132351U (enrdf_load_stackoverflow) * 1974-08-30 1976-03-09
JPS5216760U (enrdf_load_stackoverflow) * 1975-07-24 1977-02-05

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504656U (enrdf_load_stackoverflow) * 1973-05-16 1975-01-18
JPS5132351U (enrdf_load_stackoverflow) * 1974-08-30 1976-03-09
JPS5216760U (enrdf_load_stackoverflow) * 1975-07-24 1977-02-05

Also Published As

Publication number Publication date
JPH0125477Y2 (enrdf_load_stackoverflow) 1989-07-31

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