JPS6036132U - Ｘｙ平面移動機構 - Google Patents

Ｘｙ平面移動機構

Info

Publication number
JPS6036132U
JPS6036132U JP12740183U JP12740183U JPS6036132U JP S6036132 U JPS6036132 U JP S6036132U JP 12740183 U JP12740183 U JP 12740183U JP 12740183 U JP12740183 U JP 12740183U JP S6036132 U JPS6036132 U JP S6036132U
Authority
JP
Japan
Prior art keywords
movement mechanism
plane movement
substrate
xyy
bent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12740183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140438Y2 (enrdf_load_stackoverflow
Inventor
秋谷　文明
浅川　和雄
文夫 田畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12740183U priority Critical patent/JPS6036132U/ja
Publication of JPS6036132U publication Critical patent/JPS6036132U/ja
Application granted granted Critical
Publication of JPS6140438Y2 publication Critical patent/JPS6140438Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP12740183U 1983-08-18 1983-08-18 Ｘｙ平面移動機構 Granted JPS6036132U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12740183U JPS6036132U (ja) 1983-08-18 1983-08-18 Ｘｙ平面移動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12740183U JPS6036132U (ja) 1983-08-18 1983-08-18 Ｘｙ平面移動機構

Publications (2)

Publication Number Publication Date
JPS6036132U true JPS6036132U (ja) 1985-03-12
JPS6140438Y2 JPS6140438Y2 (enrdf_load_stackoverflow) 1986-11-18

Family

ID=30289365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12740183U Granted JPS6036132U (ja) 1983-08-18 1983-08-18 Ｘｙ平面移動機構

Country Status (1)

Country Link
JP (1) JPS6036132U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6140438Y2 (enrdf_load_stackoverflow) 1986-11-18

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