JPS6030041A - X-ray generator - Google Patents

Abstract

PURPOSE:To produce various primary X-rays having different wavelengths by installing plural different target element on a circular area of an anticathode installed in a sealed tubular bulb and using a driving mechanism for rotating the anticathode. CONSTITUTION:In the sealed tubular bulb 1 of an X-ray generator, a disk-like anticathode 21 having plural different target elements 21a-21h arranged in a circular form on its surface is installed facing a cathode 2 which discharges an electron beam 7. The periphery of the anticathode 21 is provided with a toothed wheel 22 so that the anticathode 21 can be moved by a motor 23. The electron beam 7 is caused to strike against one of the target elements 21a-21h to produce primary X-rays 8 which are then irradiated upon sample 9 before being detected with an X-ray detector 11. At the same time as the above detection, X-rays of another target element and produced by rotating the anticathode 21. As a result, various kinds of primary X-rays can be stably produced without any necessity of replacing the tubular bulb 1.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an X-ray generator, and more particularly to an X-ray generator using an enclosed tube as an X-ray tube.

In general, there are two types of X-ray tubes that generate X-rays: a prefabricated tube whose cathode and anticathode can be replaced and an enclosed tube whose cathode and anticathode cannot be replaced. Is the gas inside the tube always evacuated? Since the air must be evacuated under water, sealed tubes that can maintain a high vacuum inside the tube have been widely used. FIG. 1 is a diagram showing an example of an X-ray generator using a conventional sealed tube, and reference numeral 1 in the figure is the tube body. Inside the bulb body 1, a cathode 2 connected to the negative side of the high voltage power source 4 and an anticathode 3 connected to the positive side of the high voltage power source 4 are disposed facing each other, as shown in FIG. The inside of the tube is maintained at a high vacuum of 7 mmHg.The tube body 1 is also formed with a window 5 for extracting X-rays. , Lz mica, etc., with a thickness that can withstand high vacuum is lowered. In the figure, reference numeral 6 is a cooling passage to prevent overheating of the anticathode 3, and cooling water is circulated through it. ing.

When a high voltage is applied between the cathode 2 and the anticathode 3, the tube body 1 emits an electron beam 7 from the cathode 2 toward the anticathode 3.
is emitted. When this electron beam 7 collides with the terrestrial and terrestrial elements (such as CO) of the anticathode 3, the C-order X-rays 8
is generated and is irradiated onto the sample 9 through the window 5 of the tube body 1.

The primary X-rays 8 irradiated onto the sample 9 are diffracted into secondary X-rays 10, which then enter an X-ray detector 11 located in front of the secondary X-rays 10. The diffraction intensity of the secondary X-rays 10 incident on the X-ray detector 1 is measured and recorded by the recorder 12. As described above, an X-ray generator using a sealed tube can generate more stable X-rays than one using an assembly type tube because the inside of the tube is maintained at a high vacuum.

However, in conventional sealed tubes, the cathode and anticathode cannot be replaced, so they are of a cassette type, and when generating primary X-rays with different wavelengths from the same sample, the anticathode 3 has a different target element ”-” It is necessary to replace it with an immigration bulb. For this reason, in the past, replacing the bulb body 1 required a great deal of effort and time to connect the high-voltage electric m4 and form the cooling passages 6.

The present invention has been made in view of the above circumstances, and its purpose is to stably generate primary X-rays of various wavelengths without having to replace the tube body depending on the purpose of use.
The object of the present invention is to provide a line generator.

In order to achieve the above object, the present invention is characterized in that a plurality of different target elements are disposed on the same circumference of an anticathode, and a rotation mechanism is provided on the anticathode. .

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIGS. 2 and 3 are diagrams showing the first embodiment of the present invention,
FIG. 2 is a schematic configuration diagram of the X-ray generator, and FIG. 3 is a plan view of the anticathode. Note that the same parts in the figure as in FIG. 1 are designated by the same reference numerals.

In FIG. 2, reference numeral 2 indicates an anticathode formed in a disk shape. As shown in FIG. 3, this anticathode 21 has a plurality of target elements 21&~21h (for example, t'co Fe1Cr, Ni
, Cu, MO, Ag1WIPt@), and is rotatably attached at a position facing the cathode 2. Further, a gear 22 for rotating the anticathode 21 is formed on the outer periphery of the anticathode 2. This gear 22 meshes with a gear 24 connected to the Ii4 driving shaft of the motor 23. Note that the target elements 21a to 21h arranged on the same circumference of the anticathode 21 are connected to the positive side of the high voltage power supply 4 when they come to predetermined positions.

Next, the effect will be explained. As described above, when a high pressure 1b is applied between the cathode 2 and the anticathode 21, the tube body 1 emits an electron beam 7 from the cathode 2 toward the anticathode 21. When this electron beam 7 collides with one of the target elements 21a to 21h of the anticathode 2), primary X-rays 8 are generated and are irradiated onto the sample 9 through the window 5 of the tube body 1. Here, if the electron beam 7 collides with the target element 21a of C0, for example, the sample 9 has 1.78B
The sample 9 is irradiated with primary X-rays 8 of 9^, and the state of distribution of corrosion products in the sample 9 is detected by an X-ray detector 11 or the like. next,
For example, when it is desired to detect the amount of residual austenite in the same sample, the anticathode 21 is rotated by the motor 23 and controlled so that the electron beam 7 emitted from the cathode 2 collides with the target element (for example, 21C) of MO. Then, the sample 9 may be irradiated with the primary X-ray 8 of 070926X.

In this way, in this embodiment, it is possible to generate it h primary X-rays 8 of different wavelengths simply by rotating the anticathode 21 to a predetermined position. There is no need to replace 1.

Note that the present invention is not limited to the above embodiments,
For example, the anticathode 21 may be rotated manually. FIG. 4 is a diagram showing an example, and the reference numeral 25 in the figure is an anticathode 21.
The gear 26 meshing with the gear 22 is a removable airtight fitting provided on the outside of the bulb body 1. Therefore, in this case, by pressing the airtight cover 26 with a finger to rotate the gear 25, the anticathode 2 rotates, and it is possible to generate various primary X-rays 8 having different wavelengths. In addition,
Reference numeral 27 in the figure is a brush with which the target element of the anticathode 21 forms a high voltage circuit with the cathode 2.

Further, in the first and second embodiments, the anticathode 2 and the anticathode are formed in a disk shape, but they may be formed in a ring shape, for example. Fifth
The figure shows an example of this. J
' can be rotated at -I along the inner peripheral surface of the tube body 1, and target elements 21' a, 21' b r ”'
has been set up.

”υAs stated above, according to the present invention, a plurality of different TARDAT elements 1t are disposed on the same circumference of the anticathode2, and a rotation mechanism is provided on the anticathode, so that the purpose of use can be improved. It is possible to provide an X-ray generator that can predetermine and generate primary X-rays of different wavelengths without having to replace the tube body depending on the wavelength.

, L l::< as fi? Explanation Fig. 1 (Schematic configuration diagram of a conventional X-ray generator, 2, +'+ 21y
j and FIG. 3 are diagrams showing the first embodiment of the present invention, and FIG.
The figure is a schematic configuration diagram of the X-ray generator, FIG. 3 is a plan view of the antagonal 4φ2, FIG. 4 is a schematic configuration diagram of the X-ray generator showing the second embodiment of the present invention, and FIG. 5 is the main FIG. 3 is a schematic configuration diagram of an X-ray generator showing a third embodiment of the invention.

1...Tube body, 2...Cathode 1. ? , 21,
21'... Anticathode, 4... High voltage power supply, 5... Window,
6... Cooling passage, 9... Sample, 11... X-ray detector, 12... Recording tear, 21 a to 21 h--Target element, 22,74° 25... Gear, 23...
·motor.

Applicant's agent: Patent attorney Takehiko Suzue Figure 1 Figure 3 Figure 4

Claims (1)

[Scope of Claim] In an X-ray generator that generates X-rays by applying a high voltage between a cathode and an anticathode in an enclosed tube held in a high vacuum, the An X-ray generator characterized in that a plurality of different TARDAT elements are arranged in the anticathode, and a synchronization mechanism is provided in the anticathode.