JPS602826U - 半導体ウエ−ハ容器 - Google Patents

半導体ウエ−ハ容器

Info

Publication number
JPS602826U
JPS602826U JP9427383U JP9427383U JPS602826U JP S602826 U JPS602826 U JP S602826U JP 9427383 U JP9427383 U JP 9427383U JP 9427383 U JP9427383 U JP 9427383U JP S602826 U JPS602826 U JP S602826U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer container
guide film
container according
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9427383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423327Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
桑原　皓二
清 石川
Original Assignee
小松電子金属株式会社
小松化成株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 小松電子金属株式会社, 小松化成株式会社 filed Critical 小松電子金属株式会社
Priority to JP9427383U priority Critical patent/JPS602826U/ja
Publication of JPS602826U publication Critical patent/JPS602826U/ja
Application granted granted Critical
Publication of JPH0423327Y2 publication Critical patent/JPH0423327Y2/ja
Granted legal-status Critical Current

Links

JP9427383U 1983-06-21 1983-06-21 半導体ウエ−ハ容器 Granted JPS602826U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9427383U JPS602826U (ja) 1983-06-21 1983-06-21 半導体ウエ−ハ容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9427383U JPS602826U (ja) 1983-06-21 1983-06-21 半導体ウエ−ハ容器

Publications (2)

Publication Number Publication Date
JPS602826U true JPS602826U (ja) 1985-01-10
JPH0423327Y2 JPH0423327Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-29

Family

ID=30225740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9427383U Granted JPS602826U (ja) 1983-06-21 1983-06-21 半導体ウエ−ハ容器

Country Status (1)

Country Link
JP (1) JPS602826U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148043U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-05-06 1977-11-09
JPS5465473A (en) * 1977-11-04 1979-05-26 Zenkiyou Kasei Kougiyou Kk Ic wafer container

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148043U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-05-06 1977-11-09
JPS5465473A (en) * 1977-11-04 1979-05-26 Zenkiyou Kasei Kougiyou Kk Ic wafer container

Also Published As

Publication number Publication date
JPH0423327Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-29

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