JPS6027828A - Ｍｏｓ ｆｅｔストレインゲ−ジ - Google Patents
Ｍｏｓ ｆｅｔストレインゲ−ジInfo
- Publication number
- JPS6027828A JPS6027828A JP13524183A JP13524183A JPS6027828A JP S6027828 A JPS6027828 A JP S6027828A JP 13524183 A JP13524183 A JP 13524183A JP 13524183 A JP13524183 A JP 13524183A JP S6027828 A JPS6027828 A JP S6027828A
- Authority
- JP
- Japan
- Prior art keywords
- strain gauge
- mos
- stress
- pressure
- fet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009826 distribution Methods 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 230000003321 amplification Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000002496 gastric effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13524183A JPS6027828A (ja) | 1983-07-26 | 1983-07-26 | Ｍｏｓ ｆｅｔストレインゲ−ジ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13524183A JPS6027828A (ja) | 1983-07-26 | 1983-07-26 | Ｍｏｓ ｆｅｔストレインゲ−ジ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6027828A true JPS6027828A (ja) | 1985-02-12 |
| JPH0450524B2 JPH0450524B2 (enExample) | 1992-08-14 |
Family
ID=15147108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13524183A Granted JPS6027828A (ja) | 1983-07-26 | 1983-07-26 | Ｍｏｓ ｆｅｔストレインゲ−ジ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6027828A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010008167A (ja) * | 2008-06-25 | 2010-01-14 | Toyota Motor Corp | 歪み検出装置及び歪み検出方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4834473A (enExample) * | 1971-09-07 | 1973-05-18 | ||
| JPS5726364U (enExample) * | 1980-07-23 | 1982-02-10 |
-
1983
- 1983-07-26 JP JP13524183A patent/JPS6027828A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4834473A (enExample) * | 1971-09-07 | 1973-05-18 | ||
| JPS5726364U (enExample) * | 1980-07-23 | 1982-02-10 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010008167A (ja) * | 2008-06-25 | 2010-01-14 | Toyota Motor Corp | 歪み検出装置及び歪み検出方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0450524B2 (enExample) | 1992-08-14 |
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