JPS60262084A - Characteristic measuring apparatus for radiation 1-d array sensor - Google Patents

Abstract

PURPOSE:To achieve a higher location resolution of a sensor and the S/N ratio of a signl by arranging a chopper for shielding radiation intermittently and a shielding plate having a slit between a radiation source and a 1-D array sensor. CONSTITUTION:A chopper 18 for shielding radiation 10 intermittently and a slit 11 for limiting the radiation 10 passing through the chopper 18 are arranged between a radiation source 1 and a 1-D array sensor 13 while a moving means 15 is provided to move the sensor 13 at a fixed pitch at the right angle to the radiation 10. With such an arrangement, a signal can be obtained performing a scanning closely with a equivalently very fine beam to achieve a higher resolution in the measurement of separation characteristic of the sensor. This also permits the irradiation of the sensor 13 with the radiation 10 in an AC mode through the chopper 18 to achieve a higher S/N ratio of a signal.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a performance measuring device for a one-dimensional array sensor used in C@W pump tomography and the like.

<Prior Art> FIG. 3 is a block diagram showing a conventional characteristic measuring device for a radiation-dimensional array sensor (hereinafter referred to as "Senna") using, for example, high-purity n-type silicon.

3, 1 is a radiation source such as X-rays, □ Radiation 2 passes through a bean hole 4 with a diameter of about 1 mm provided in a lead plate 3, forms a beam, and irradiates the sensor 5. 5, an aluminum electrode 6 is provided on the entire surface of a silicon plate having a thickness of about 1, and is spaced from the gold electrode on the surface by about 1. 5
An aluminum electrode 6 provided on the back surface of the device is grounded, and a comparator 8 is connected via a lead wire 9 to each of the gold electrodes 7a to 7c on the front surface. □ In the above configuration, when the radiation from the radiation source 1 passes through the pinhole 4 of the lead plate 3 and becomes a beam and irradiates the gold electrode of the sensor 5, among the electron-hole pairs generated by the radiation irradiation, the depletion layer and The intensity of the radiation carried to the stain pole by the diffusion region and irradiated to this part can be extracted to the outside as a current signal. The current signal from the sensor 5 is converted into a voltage signal by the I/V converter 8 via the lead 119 and detected.

The axis is a linear display of the position of the beam irradiated from the pinhole 4, and the vertical axis is the intensity of the output signal of the sensor 5 at the position of the beam. Note that arrows 7a to 7C in FIG. 4 indicate the widths of the gold electrodes, and 8 indicates the spacing between adjacent gold electrodes. The output from I/V converter 8 is
Since the diameter of the beam ρ is about 1 mm, the beam reaches its maximum output while moving about 1 inch from the end face of the electrode 7a, and after maintaining its peak for about 1 inch, the output starts to decrease and the beam It reaches zero level when it is completely separated from the electrode. In this case, the E portion surrounded by the dashed line between each gold electrode becomes a four-stoke state. The highest amount of curry in Figure 4
The output difference H/h between the bell and the crosstalk level is approximately four times as large.

In order to measure the characteristics of the sensor, it is desirable to make the output difference between the maximum output level and the cross-reflection as large as possible. It cannot be made too small (as the irradiation area becomes smaller, the output becomes smaller).■ Signal readout is in DC mode.■ Therefore, due to S/N ratio problems, the beam cannot be made smaller, and the The drawbacks were poor resolution, signal dynamics, and narrow range.

Therefore, it is an object of the present invention to provide a measuring device that improves the location resolution of the sensor and the 87N ratio of the signal.

<Configuration of the Invention> The configuration of the present invention to achieve this object is that in an apparatus for irradiating a sensor with radiation from a radiation source and measuring the performance of the sensor, the Intermittent radiation shielding Te) Cao, Par, and the aforementioned Te
, a structural feature is that a moving means is provided to move the radiation that has passed through the lens at a constant rate of 5 points in the aperture angle direction.

Figure 1 is part 1 of the present invention! ! FIG. 2 is a configuration diagram showing an example.

In FIG. 1, 1 is the radiation source of X@轡.

The radiation 2 from the radiation set 1 is intermittently cut off rapidly by, for example, a beam rotating in the direction F, which is provided behind the beam 18 and the shield plate 12.

For example, 110-1, length 15 mm.
For example, a gold electrode 20 is formed on the entire surface of the surface that receives the radiation, and a width of 1 is formed on the surface that receives the radiation.
mm + aluminum electrode 14a ~ 14 with a length of about 15 mm
c are provided at intervals of 3 mm. When the strip beam irradiates the aluminum electrodes 14a to 14c, a current is generated in the senna based on the same principle as in the conventional example.

Reference numeral 15 denotes a moving means on which the sensor 13 is placed and moved, and is moved, for example, by one step in response to a command from the controller 17.

0.05 mm at a constant pitch of 11 degrees, and
Direction of arrow G perpendicular to the direction of radiation irradiation to Senna. 17. The computer 17 performs calculations based on the position of the sensor 13 irradiated with the beam, the output signal of the spectrum analyzer 16, and displays the relationship between the position and the output signal in a graph or the like.

According to the above configuration, since the passage hole of the shielding plate 12 is slotted, the width can be narrowed without increasing the overall length and reducing the irradiation area. Since I set it to move with , Te, I had to obtain the signal while scanning precisely with an isometrically thin beam.
It is possible to increase the resolution of the separation characteristic measurement of
Furthermore, since the radiation is irradiated to the sensor 13 intermittently by the radiation filter 18, that is, in the AC mode, the signal can be detected over a wide range. be able to.

Figure 2 shows the dependence of the senna sensitivity of the output signal at the electrodes 14a and 14b detected by the device configured as described above on the irradiated area, where the horizontal axis represents the position of the beam from the slit and the vertical axis represents the position of the beam. The intensity of the output signal of the sensor at the position is expressed in decibels (dB). In FIG. 2, arrow 14a.

The range 14b indicates the width of the aluminum electrodes (1 inch), and 8 indicates the spacing between the electrodes (0.3 mm). According to this figure, the output signal suddenly rises when the beam is located near 0.25 fIIm in front of the electrode, and falls sharply just before it passes the electrode. In this example, the electrode 14a
The level of the output signal h1 near the point where there is a μ stalk between electrode 1 and 14b is about 15 decibels.
The maximum output level Ml near the center of 4a and 14b is 50
It is about a decibel. Therefore, the output difference is 35 dB, which is approximately 56 times the output difference when converted to linear output.

<Effects of the Invention> - As described above in detail along with the embodiments, according to the present invention, it is possible to realize a measuring device with improved location resolution and signal S/N ratio.

[Brief explanation of the drawing]

Fig. 1 is a configuration diagram of a measuring device showing an embodiment of the present invention, Fig. 2 is an explanatory diagram showing the results of measuring the characteristics of senna using the measuring device of the present invention, and Fig. 5 is a diagram showing a conventional measuring device. FIG. 4 is a diagram showing the results of measuring the characteristics of the sensor using a conventional measuring device. 1...Radiation source, 10...Radiation, 11...S'
jy), 12...shielding plate, 13...-dimensional array sensor, 15... moving means.

Claims (1)

[Claims] A one-dimensional array sensor is irradiated with radiation from a radiation source,
In the device for measuring the performance of the -dimensional array sensor, a radiation sensor that intermittently shields the radiation is placed between the radiation source and the -dimensional array sensor at a right angle to the radiation. A radiation-dimensional array sensor characteristic measuring device characterized by being provided with a moving means for moving at a constant pitch in a direction.