JPS60259936A - Plasma torch part of inductively connected plasma emission analyzer - Google Patents
Plasma torch part of inductively connected plasma emission analyzerInfo
- Publication number
- JPS60259936A JPS60259936A JP11530284A JP11530284A JPS60259936A JP S60259936 A JPS60259936 A JP S60259936A JP 11530284 A JP11530284 A JP 11530284A JP 11530284 A JP11530284 A JP 11530284A JP S60259936 A JPS60259936 A JP S60259936A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- plasma
- plasma torch
- torch part
- argon gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
Abstract
Description
【発明の詳細な説明】
（発明の技術分野）
本発明は、プラズマ発生用ガスを封管内に循環させ、排
出消費を行わない誘導結合プラズマ発光（以下、ＩＣＰ
と称す）分析装置のプラズマトーチ部に関する。Detailed Description of the Invention (Technical Field of the Invention) The present invention relates to inductively coupled plasma emission (hereinafter referred to as ICP), which circulates plasma generation gas in a sealed tube and does not consume or emit gas.
related to the plasma torch section of the analyzer.
（発明の背景）
ＩＣＰ分析装置は、水溶液中の微量な金層、亜金屑元素
分析に有力であると知られ、広く応用されてから、６〜
７年経っている。この分析装置は、原子吸光分析装置等
に比べ感度、粘度が良く、また、操作性、迅速性にも優
れている。しかし、プラズマを発生、保持するアルゴン
ガスが毎分１８１消費される。従って、稼動経費が高価
となシ、この問題の解決が要求されていた。(Background of the Invention) ICP analyzers are known to be effective in analyzing minute amounts of gold layers and sub-gold elements in aqueous solutions, and have been widely applied since 6~
It's been 7 years. This analyzer has better sensitivity and viscosity than atomic absorption spectrometers, etc., and is also excellent in operability and speed. However, 181 argon gases, which generate and maintain the plasma, are consumed per minute. Therefore, since operating costs are high, a solution to this problem has been required.
（従来技術と問題点）
従来のＩＣＰ分析装箇のプラズマトーチ部の概略を＠１
図に示す。従来のプラズマトーチ部は、石英製のクーラ
ントガス管（１）、プラズマガス管（２）。(Prior art and problems) An outline of the plasma torch part of the conventional ICP analysis equipment @1
As shown in the figure. The conventional plasma torch part includes a coolant gas tube (1) and a plasma gas tube (2) made of quartz.
サンフルガス管（３）から成る同軸３１管構造であシ、
各管（１） 、−（２） 、 （３）の下部に、それぞ
れアルゴンガス導入部（４）、 （５１、（６１があり
、クーラントガス管（１）の上部には、誘導コイル（力
が巻いである。クーラントガス憤（１）のガス導入部（
４）にクーラントアルゴンガスが約１８−＃／ｍｉ ｎ
、プラズマガス管（２）のガス導入部（５）にプラズ
マ発生用ガスカ約０．２−６７ｍ１ｎ 。It has a coaxial 31 tube structure consisting of Sunflu gas tube (3),
At the bottom of each pipe (1), -(2), and (3), there are argon gas introduction parts (4), (51, and (61), respectively. At the top of the coolant gas pipe (1), there is an induction coil (power is the winding.The gas inlet part of the coolant gas tube (1) (
4) coolant argon gas at approximately 18-#/min
, approximately 0.2-67 m1n of gas for plasma generation is placed in the gas introduction part (5) of the plasma gas pipe (2).
また、サンフルガス管（３）のガス導入部（６）にザン
ブルアルゴンガスが０．４−６／ｍｉｎ 、それぞれ供
給される。誘導コイル（７）に２７ＭＨｚ、１．６ＫＷ
Ｏ高周波をかけることによシ、アルゴンガスのンラズマ
炎が誘明コイル（７）の内側に発生、保持される。試料
は、ネブライザーにより＝の状態で、前記ガス導入部（
６）からプラズマ中に導入される。プラズマ中に尋人さ
れた試料中にある分析目的元素は、励起され固有周波数
の光を放出する。この光を分光器にかけて検出し、分析
する。プラズマ中を通過した試料とアルゴンガスは、プ
ラズマトーチ部の上部の開放部（８）から大気中に放出
される。従って、この方式では、アルゴンガスが約１８
−６７ｍ１ｎ 、排出、消費され稼動経費が高価とガる
問題がある。In addition, Zamburu argon gas is supplied to the gas introduction portion (6) of the Sanflu gas pipe (3) at a rate of 0.4-6/min, respectively. 27MHz, 1.6KW for induction coil (7)
By applying high frequency, a lasma flame of argon gas is generated and maintained inside the induction coil (7). The sample was placed in the gas introduction section (
6) into the plasma. Elements of interest in the sample placed in the plasma are excited and emit light at a unique frequency. This light is detected and analyzed using a spectrometer. The sample and argon gas that have passed through the plasma are discharged into the atmosphere from an opening (8) at the top of the plasma torch section. Therefore, in this method, argon gas is about 18
There is a problem that -67m1n is discharged and consumed, and the operating cost is high.
（発明の目的）
本発明は、前記従来の問題点を解消するため、プラズマ
発生ガスを排出、消費せず、循環させて使用することに
より、稼動経費の安いプラズマトーチ部を開発すること
にある。(Object of the Invention) In order to solve the above-mentioned conventional problems, the present invention is to develop a plasma torch section that has low operating costs by circulating and using the plasma generating gas without emitting or consuming it. .
（発明の構成）
本発明は、プラズマトーチ部の開放部側からコールドト
ラップ器、コンプレッサー、ガスホルダー、及び前記プ
ラズマトーチ部のガス導入部を順次接続し７、前記開放
部から放出したアルコンガスを前記プラズマトーチ部に
循環させたことを特徴とするＩＣＰ分析装置のプラズマ
トーチ部を提供するものである。(Structure of the Invention) The present invention sequentially connects a cold trap device, a compressor, a gas holder, and a gas introduction part of the plasma torch part from the open part side of the plasma torch part 7, and discharges the arcon gas released from the open part. The present invention provides a plasma torch section of an ICP analyzer, characterized in that plasma is circulated through the plasma torch section.
（発明の実施例）
本発明の１実施例を第２図に示す。その大まかｆｔｍ造
は、第１図に示した従来のプラズマトーチ部の開放部に
アルコンガスを循環させる経路を取り付けたものであり
、その経路の途中には、アルゴンガスを洗浄するための
第１．第２のコールドトラ、ブ器（１０１、□□□）、
コンプレッサー（１９＋ 、ガスホルダー＋２０） 、
および、流量調節器ＣＤ、（林、（２３ｉが備えである
。なお、各流量調節器（２υ、 ＋２２１ 、 （２３
１の出口ＣＩ！（イ）。(Embodiment of the Invention) An embodiment of the present invention is shown in FIG. The rough ftm structure is that a path for circulating argon gas is attached to the open part of the conventional plasma torch shown in Figure 1, and a first argon gas cleaning path is installed along the path. ．． 2nd cold tiger, buki (101, □□□),
Compressor (19+, gas holder +20),
And, the flow rate regulator CD, (Hayashi, (23i) is equipped.In addition, each flow rate regulator (2υ, +221, (23
Exit CI of 1! (stomach).
（２５＋ 、 （２６１は、プラズマトーチ部のアルゴ
ンガス導入部（４１、（５） 、 （６）に接続しであ
る。次に、アルゴンガスの流れにそって各部の説明を行
う。プラズマを発生、保持するプラズマトーチ部は、前
記従来例と同一構成であシ、誘導コイル（７）の内側に
プラズマが保持され、そこを通過した試料とアルゴンガ
スが開放部（８）から放出される。この放出アルゴンガ
ス（は、プラズマトーチ部のクーラントガス管（１）の
開放部（８１（１１１１に取シ伺けたパイレックスガラ
ス製ガス捕集管（９）を通過し、該ガス捕集管（９）の
端部に接続した第１のコールドトラ、ブ器００フに折入
される。この放出アルゴンガス中には、試料がアルコン
ガスマ中の反応でできた、種々の金属、亜金属化合物の
他、多回”の水分等の不純物を含んでおり、この不純物
１除去のためコールドトラップが心太でイ）る。第１の
コールドトラ、ブ器（１０）は、大球形部（［１）と２
個の小半球形部（１２＋ 、 （１３１とから力υ、大
球形部（１１）の内部には、両手半球形部（１２ｉ 、
（１３１間を傾斜させて枦、絡した４本の十着円憤０
４）が辿っている。(25+, (261 is connected to the argon gas introduction part (41, (5), (6)) of the plasma torch part.Next, each part will be explained along the flow of argon gas.Plasma generation The holding plasma torch part has the same structure as the conventional example, and plasma is held inside the induction coil (7), and the sample and argon gas that have passed through it are released from the open part (8). This released argon gas (passes through the Pyrex glass gas collection pipe (9) which can be accessed at the open part (81 (1111) of the coolant gas pipe (1) of the plasma torch section, ) is inserted into the first cold tube connected to the end of the argon gas chamber.In this emitted argon gas, the sample contains various metals, submetallic compounds, and other compounds formed by reactions in the argon gas. The first cold trap (10) contains a large spherical part (1) and a large spherical part (1). 2
Small hemispherical parts (12+,
(131 yen sloped, 4 intertwined 100 yen anger 0
4) is being followed.
そして、一方の小半球形部Ｑ２）の挿入口０５）から冷
却水を流出させると、冷却水は、４本の楕円管０勺を３
７Ｑ Ｉ）、仙の小半球形部（１３Ｊの排出口０６）か
ら流出する第１Ｉ′１造となっている。従って、第１の
コールドトラップ’ｄ’ｒ？ （ｌ Ｉｌｉの大球形部
（１υに導入した放出アルゴンガスＩｔｉ 、ｔｉｌｔ
円管圓により冷却され、不純物が除去される。除去され
た液状不純物は、傾斜した円筒状不純物だめ（１７）か
らとり出す。第１のコールドトラップ器（１０１を通過
したアルゴンガスは、さらに、ドライアイス−アセトン
系（−７８°Ｃ）の冷却剤で冷却した第２のコールドト
ラップ器０８）を辿り、不純物除去を完全にする。その
後、アルゴンガスは、コンフレ、サー（１９１てＩ Ｋ
２／ｄから５Ｋｙ／ｄに加圧され、１０沼容量のガスホ
ルダー（２０）にだくわえられる。ガスホルダー（２０
）の流量調節器（２１１、（２２） 、 （２３＋で調
節したアルゴンガスは、出口（２４）からクーラントア
ルゴンガス、出口（２５）からプラズマアルゴンガス、
また、出口（２６）からサンプルアルゴンガストラて導
入する。When the cooling water flows out from the insertion port 05) of one of the small hemispherical portions Q2), the cooling water flows through the four elliptical tubes 05).
7Q I), it is the 1st I'1 structure that flows out from the small hemispherical part (13J outlet 06) of the sacrum. Therefore, the first cold trap 'd'r? (l Large spherical part of Ili (1υ) released argon gas Iti, tilt
It is cooled by a circular tube and impurities are removed. The removed liquid impurities are taken out from an inclined cylindrical impurity reservoir (17). The argon gas that has passed through the first cold trap (101) is further routed to the second cold trap (08) cooled with a dry ice-acetone (-78°C) coolant to completely remove impurities. do. Afterwards, the argon gas was
It is pressurized from 2/d to 5Ky/d and held in a gas holder (20) with a capacity of 10 liters. Gas holder (20
The argon gas adjusted by the flow rate regulators (211, (22), (23+) of ) is coolant argon gas from the outlet (24), plasma argon gas from the outlet (25),
In addition, a sample argon gas straw is introduced from the outlet (26).
なお、アルゴンガスが循環する各器部は、ローリングＣ
゛０、才だ、すり合せ（２８）等で接続しており、それ
ぞれ分解することができる。In addition, each part where argon gas circulates is equipped with a rolling C
They are connected by ゛0, sashida, and sashimi (28), and each can be disassembled.
（発明の効果）
本発明は、プラズマトーチ部の開放部側からコールドト
ラ、プ器、コンプレ、サー、ガスホルダー、及びプラズ
マトーチ部のガス導入部を順次接続し、プラズマ発生ガ
スを循環させたので、従来、毎分約１８形排出、消費し
ていたプラズマ発生ガスを、一度充填した後は、全く消
費しないでＩＣＰ分析装置による分析ができる。従−・
て、■ＣＰ分析装置の稼動を安価に行える。(Effects of the Invention) The present invention connects the cold trap, pump, compressor, gas holder, and gas inlet of the plasma torch in sequence from the open side of the plasma torch to circulate the plasma generation gas. Therefore, the plasma generating gas, which conventionally was discharged and consumed at about 18 g/min, can be analyzed by the ICP analyzer without being consumed at all once it is filled. Follow-・
(1) The CP analyzer can be operated at low cost.
第１図は、従来のプラズマトーチ部の概略説明図、第２
図は、本発明のプラズマトーチ部の概略説明図である。
（４１、ｔ５１ 、 （６） プラズマトーチ部のガス
導入部（８）プラズマトーチ部の開放部
（１０１、（１〜 第１．第２のコールドトラ、プ器０
１ コンプレッサー
（２０）ガスホルダー
（２２１、（２３＋ 、 （２４） 流量調節器第 １
図Fig. 1 is a schematic explanatory diagram of a conventional plasma torch section;
The figure is a schematic explanatory diagram of a plasma torch section of the present invention. (41, t51, (6) Gas introduction part of plasma torch part (8) Opening part of plasma torch part (101, (1~ 1st. 2nd cold trap, puller 0
1 Compressor (20) Gas holder (221, (23+, (24) Flow regulator No. 1
figure
Claims (1)
コンプレ、サー、ガスホルダー、及び前記プラズマトー
チ部のガス導入部を順次接続し、前記開放部から放出し
たプラズマ発生用ガスを前記プラズマトーチ部に循環さ
せたことを特徴とする誘導結合プラズマ発光分析装置の
プラズマガス〜 チ部。Cold trap device from the open side of the plasma torch,
Inductively coupled plasma emission spectrometry, characterized in that a compressor, a gas holder, and a gas introduction section of the plasma torch section are connected in sequence, and the plasma generation gas discharged from the open section is circulated to the plasma torch section. Plasma gas section of the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11530284A JPS60259936A (en) | 1984-06-05 | 1984-06-05 | Plasma torch part of inductively connected plasma emission analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11530284A JPS60259936A (en) | 1984-06-05 | 1984-06-05 | Plasma torch part of inductively connected plasma emission analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60259936A true JPS60259936A (en) | 1985-12-23 |
Family
ID=14659265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11530284A Pending JPS60259936A (en) | 1984-06-05 | 1984-06-05 | Plasma torch part of inductively connected plasma emission analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60259936A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016166844A (en) * | 2015-03-10 | 2016-09-15 | 株式会社日立ハイテクサイエンス | Inductive coupling plasma generator and inductive coupling plasma analyzer |
-
1984
- 1984-06-05 JP JP11530284A patent/JPS60259936A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016166844A (en) * | 2015-03-10 | 2016-09-15 | 株式会社日立ハイテクサイエンス | Inductive coupling plasma generator and inductive coupling plasma analyzer |
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