JPS6025958B2 - ultrasonic ceramic microphone - Google Patents
ultrasonic ceramic microphoneInfo
- Publication number
- JPS6025958B2 JPS6025958B2 JP10218284A JP10218284A JPS6025958B2 JP S6025958 B2 JPS6025958 B2 JP S6025958B2 JP 10218284 A JP10218284 A JP 10218284A JP 10218284 A JP10218284 A JP 10218284A JP S6025958 B2 JPS6025958 B2 JP S6025958B2
- Authority
- JP
- Japan
- Prior art keywords
- metal diaphragm
- bimorph
- vibrator
- vibration
- microphone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 title claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 230000010355 oscillation Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- MOFOBJHOKRNACT-UHFFFAOYSA-N nickel silver Chemical compound [Ni].[Ag] MOFOBJHOKRNACT-UHFFFAOYSA-N 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
本発明は、圧電磁器振動子と金属製振動板とを貼り合わ
せてなるバィモルフ振動子を備えた超音波セラミックマ
イクロホンに関するものであり、特に高感度で、安定し
た共振特性を持つ超音波セラミックマイクロホンを提供
するものである。[Detailed Description of the Invention] The present invention relates to an ultrasonic ceramic microphone equipped with a bimorph vibrator made by laminating a piezoelectric ceramic vibrator and a metal diaphragm, and which has particularly high sensitivity and stable resonance characteristics. The present invention provides an ultrasonic ceramic microphone with
従来のこの種類の超音波セラミックマイクロホンは第１
図で示すように、金属材料として、アルミニウム，洋白
よりなる平板状の金属製振動板１を用い、庄電磁器振動
子２を前記振動板１の下面の中央部に貼り合せてバィモ
ルフ振動子３を構成している。４は円錐状共振子、５は
バィモルフ振動子３を支持する弾性接着剤、６は端子板
、７はケースである。This type of conventional ultrasonic ceramic microphone is the first
As shown in the figure, a flat metal diaphragm 1 made of aluminum or nickel silver is used as a metal material, and a Sho electromagnetic vibrator 2 is bonded to the center of the lower surface of the diaphragm 1 to form a bimorph oscillator. 3. 4 is a conical resonator, 5 is an elastic adhesive that supports the bimorph resonator 3, 6 is a terminal plate, and 7 is a case.
上記構成の従来の超音波セラミックマイクロホンにおい
ては、金属製振動板１は製造の際の打抜き加工時にバリ
が生じるとともに、氏電磁器振動子２との貼り合せ部と
、金属製振動板１のみの部分とに分かれるため、振動発
生時に高次共振が発生しやすく、また氏電磁器振動子２
の蓬方向振動への漏れが大きいため振動減衰が大きかっ
た。本発明は金属製振動板の加工性を考慮し、打ち抜き
製造時のバリの影響をなくし、振動効率を向上させた超
音波セラミックマイクロホンを提供するものである。In the conventional ultrasonic ceramic microphone having the above configuration, the metal diaphragm 1 has burrs during the punching process during manufacturing, and the part where it is bonded to the electromagnetic vibrator 2 and the metal diaphragm 1 alone. Since the electromagnetic vibrator 2 is divided into two parts, high-order resonance is likely to occur when vibration occurs.
The vibration damping was large because there was a large amount of leakage into the vertical direction vibration. The present invention provides an ultrasonic ceramic microphone that takes into consideration the workability of a metal diaphragm, eliminates the influence of burrs during punching manufacturing, and improves vibration efficiency.
以下、本発明の一実施例について第２図をもとにして詳
細に説明する。Hereinafter, one embodiment of the present invention will be described in detail with reference to FIG.
同図において８は外縁部が折り重ねられた金属製振動板
であり、この金属製振動板８の下面にこの金属製振動板
８と中心を一致させた圧電磁器振動子９を貼り合せてバ
ィモルフ振動子１０を形成している。１０ａ，１０ｂは
リード線であり、これらはそれぞれ金属製振動板８を貼
り合せていない圧電磁器振動子９の裏側の電極面８ａお
よび金属製振動板８における折り曲げられた縁部に接続
される。In the figure, 8 is a metal diaphragm whose outer edge is folded over, and a piezoelectric ceramic oscillator 9 whose center coincides with the metal diaphragm 8 is bonded to the bottom surface of the metal diaphragm 8 to form a bimorph. A vibrator 10 is formed. 10a and 10b are lead wires, which are connected to the electrode surface 8a on the back side of the piezoelectric ceramic vibrator 9 to which the metal diaphragm 8 is not bonded, and to the bent edges of the metal diaphragm 8, respectively.
１ １は金属製または樹脂よりなる円錐状共振子で、バ
ィモルフ振動子１０の上面の中央部に固定される。1 1 is a conical resonator made of metal or resin, and is fixed to the center of the upper surface of the bimorph resonator 10 .
１２は端子板で、弾性接着剤１３を介してバィモルフ振
動子１０が接着されている。Reference numeral 12 denotes a terminal plate, to which the bimorph vibrator 10 is adhered via an elastic adhesive 13.
１４はケースであり、このケース１４はバィモルフ振動
子１０，円錐状共振子１１および端子板１２を収納して
いる。14 is a case, and this case 14 houses the bimorph resonator 10, the conical resonator 11, and the terminal plate 12.
１４ａ，１４ｂはリード線１０ａ，１０ｂと接続され電
気信号の入出力を行なう端子である。14a and 14b are terminals connected to lead wires 10a and 10b for inputting and outputting electrical signals.
上記実施例の特徴は金属製振動板の外周を内方に折り曲
げて２重にし金属製振動板の外周厚みを厚くとることに
より、外周部質量を増加させ、振動振幅を大きくしてい
ることである。The feature of the above embodiment is that the outer circumference of the metal diaphragm is folded inward to double it and the outer circumference of the metal diaphragm is made thicker, thereby increasing the mass of the outer circumference and increasing the vibration amplitude. be.
第３図ａ，ｂはそれぞれ従来および本実施例におけるバ
ィモルフ振動子の振動モードであり、本実施例では外周
部の質量が大きいため振幅が大きく効果的な振動をして
いることを示す。FIGS. 3a and 3b show the vibration modes of the bimorph vibrator in the conventional and the present embodiment, respectively, and show that in the present embodiment, since the mass of the outer peripheral portion is large, the vibration is large in amplitude and effective.
また、第４図ａ，ｂはそれぞれ従釆および本実施例のバ
ィモルフ振動子を備えた超音波セラミックマイクロホン
における周波数とアドミツタンスの関係を示している。Further, FIGS. 4a and 4b show the relationship between frequency and admittance in an ultrasonic ceramic microphone equipped with a follower and a bimorph vibrator of this embodiment, respectively.
この図より本発明のバィモルフ振動子１０‘こおいては
たわみ振動の基本波１５ａのみが残り、たわみの振動の
高調波成分１５ｂ，１５ｃは従来の場合に比べてきわめ
て小さくなっていることがわかる。これは、金属製振動
板８の外縁部を折り曲げることにより、バリによって生
じていたたわみ振動の高調波成分が除去されたことによ
る。また、本発明においては蓬方向振動共振１６も従来
の場合に比較して大幅に小さくなっている。このように
、本発明の超音波セラミックマイクロホンは、振動効率
を向上させることができ、また圧電磁器振動子の厚み、
外径を変えることなく、前記金属製振動板の外径と折り
曲げ寸法を調整することにより、バィモルフ振動子の周
波数を制御することが可能である。From this figure, it can be seen that in the bimorph vibrator 10' of the present invention, only the fundamental wave 15a of the deflection vibration remains, and the harmonic components 15b and 15c of the deflection vibration are extremely small compared to the conventional case. . This is because by bending the outer edge of the metal diaphragm 8, harmonic components of flexural vibrations caused by burrs are removed. Furthermore, in the present invention, the vertical direction vibration resonance 16 is also significantly smaller than in the conventional case. As described above, the ultrasonic ceramic microphone of the present invention can improve the vibration efficiency, and the thickness of the piezoelectric ceramic vibrator can be reduced.
It is possible to control the frequency of the bimorph resonator by adjusting the outer diameter and bending dimension of the metal diaphragm without changing the outer diameter.
金属製振動板の加工時に発生する、バリ、およびひずみ
についても、折り曲げ部を設けることにより、その影響
を抑え、インピーダンス特性の高次共振を小さくするこ
とが出来る。また、前述のように振動効率を向上した結
果、蚤方向振動の共振を小さくし、圧電磁器振動子を２
枚既り合せたバィモルフ振動子の共振特性に近似させる
ことが出来、高感度で、安定した共振特性を示す超音波
セラミックマイクロホンをうろことができた。また本発
明によれば、発振回路に組み込んだ場合に生じる電流の
発振ひずみが著しく減衰するため、安定した発振装置の
要求に十分対応できるものとなった。以上説明したよう
に本発明は、簡単な構成にして実用的価値の大なるもの
である。By providing a bent portion, the effects of burrs and distortion that occur during processing of the metal diaphragm can be suppressed, and higher-order resonance of the impedance characteristic can be reduced. In addition, as a result of improving the vibration efficiency as mentioned above, the resonance of the vibration in the flea direction is reduced, and the piezoelectric ceramic vibrator is
We were able to approximate the resonance characteristics of a bimorph vibrator made of two pre-assembled pieces, and were able to create an ultrasonic ceramic microphone that exhibits high sensitivity and stable resonance characteristics. Further, according to the present invention, the oscillation distortion of the current that occurs when the device is incorporated into an oscillation circuit is significantly attenuated, so that the need for a stable oscillation device can be satisfactorily met. As explained above, the present invention has a simple configuration and has great practical value.
第１図は従来の超音波セラミックマイクロホンの正面断
面図、第２図は本発明の一実施例における超音波セラミ
ックマイクロホンの正面断面図、第３図ａ，ｂは従来お
よび本発明実施例におけるバィモルフ振動子の振動モー
ドの説明図、第４図ａ，ｂは従釆および本発明の実施例
におけるインピーダンス特性図である。
８・・・金属製振動板、９・・・圧電磁器振動子、１０
…バィモルフ振動子、１１・・・円錐状共振子、１２・
・・端子板、１３…弾性接着剤、１４・・・ケース。
第１図第２図
第３図
第４図FIG. 1 is a front sectional view of a conventional ultrasonic ceramic microphone, FIG. 2 is a front sectional view of an ultrasonic ceramic microphone according to an embodiment of the present invention, and FIGS. An explanatory diagram of the vibration mode of the vibrator, and FIGS. 4a and 4b are impedance characteristic diagrams of the slave and the embodiment of the present invention. 8... Metal diaphragm, 9... Piezoelectric ceramic vibrator, 10
... Bimorph resonator, 11... Conical resonator, 12.
...Terminal board, 13...Elastic adhesive, 14...Case. Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
大きい金属製振動板を貼り合せ、前記金属製振動板の外
縁部を重ねてバイモルフ振動子を形成し、このバイモル
フ振動子の上面に円錐状共振子を設けるとともに下面に
弾性接着剤を介して端子板を固定し、前記バイモルフ振
動子，円錐状共振子および端子板をケースに収納してな
る超音波セラミツクマイクロホン。1. A metal diaphragm having a larger outer diameter than the piezoelectric ceramic oscillator is laminated onto the piezoelectric ceramic oscillator, and the outer edges of the metal diaphragm are overlapped to form a bimorph oscillator. An ultrasonic ceramic microphone comprising a conical resonator, a terminal plate fixed to the lower surface via an elastic adhesive, and the bimorph vibrator, conical resonator and terminal plate housed in a case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10218284A JPS6025958B2 (en) | 1984-05-21 | 1984-05-21 | ultrasonic ceramic microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10218284A JPS6025958B2 (en) | 1984-05-21 | 1984-05-21 | ultrasonic ceramic microphone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59230000A JPS59230000A (en) | 1984-12-24 |
| JPS6025958B2 true JPS6025958B2 (en) | 1985-06-21 |
Family
ID=14320527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10218284A Expired JPS6025958B2 (en) | 1984-05-21 | 1984-05-21 | ultrasonic ceramic microphone |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6025958B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63199060U (en) * | 1987-06-10 | 1988-12-21 | ||
| US20190252662A1 (en) * | 2018-02-09 | 2019-08-15 | Sumitomo Chemical Company, Limited | Nonaqueous electrolyte secondary battery |
-
1984
- 1984-05-21 JP JP10218284A patent/JPS6025958B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63199060U (en) * | 1987-06-10 | 1988-12-21 | ||
| US20190252662A1 (en) * | 2018-02-09 | 2019-08-15 | Sumitomo Chemical Company, Limited | Nonaqueous electrolyte secondary battery |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59230000A (en) | 1984-12-24 |
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