JPS6025749U - Vapor deposition heater - Google Patents

Vapor deposition heater

Info

Publication number
JPS6025749U
JPS6025749U JP11375383U JP11375383U JPS6025749U JP S6025749 U JPS6025749 U JP S6025749U JP 11375383 U JP11375383 U JP 11375383U JP 11375383 U JP11375383 U JP 11375383U JP S6025749 U JPS6025749 U JP S6025749U
Authority
JP
Japan
Prior art keywords
vapor deposition
heater
deposition heater
winding
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11375383U
Other languages
Japanese (ja)
Inventor
重野　和男
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP11375383U priority Critical patent/JPS6025749U/en
Publication of JPS6025749U publication Critical patent/JPS6025749U/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の小型バスケット型蒸着ヒータでの構成図
、第２図は従来の巻線型蒸着ヒータの構成図、第３図は
第２図のヒータでの蒸着ソース溶融後の電流経路を示す
図、第４図は本考案による巻線型蒸着ヒータの一実施例
の三面図、第５図は第４図のヒータでの蒸着ソース溶融
後の電流経路を示す図である。゛ ３１・・・・・・電流経路、３２・・・・・・溶融蒸着
ソース、５１・・・・・・電流経路、５２・・・・・・
溶融蒸着ソース。Figure 1 shows the configuration of a conventional small basket-type evaporation heater, Figure 2 shows the configuration of a conventional wire-wound evaporation heater, and Figure 3 shows the current path after melting the evaporation source in the heater of Figure 2. 4 is a three-sided view of an embodiment of the wire-wound evaporation heater according to the present invention, and FIG. 5 is a diagram showing the current path after the evaporation source is melted in the heater of FIG. 4.゛31...Current path, 32...Fused vapor deposition source, 51...Current path, 52...
Fused deposition source.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ヒータを構成する撚線の一方の端は巻線の中央下部より
極性の電極への導線となり、撚線の他方の端は巻線の端
部より逆極性の電極への導線になっていることを特徴と
する蒸着ヒータ。One end of the stranded wires that make up the heater should be a lead wire from the bottom center of the winding to an electrode of the opposite polarity, and the other end of the stranded wire should be a lead wire from the end of the winding to an electrode of opposite polarity. A vapor deposition heater featuring:
JP11375383U 1983-07-22 1983-07-22 Vapor deposition heater Pending JPS6025749U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11375383U JPS6025749U (en) 1983-07-22 1983-07-22 Vapor deposition heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11375383U JPS6025749U (en) 1983-07-22 1983-07-22 Vapor deposition heater

Publications (1)

Publication Number Publication Date
JPS6025749U true JPS6025749U (en) 1985-02-21

Family

ID=30263204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11375383U Pending JPS6025749U (en) 1983-07-22 1983-07-22 Vapor deposition heater

Country Status (1)

Country Link
JP (1) JPS6025749U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017020099A (en) * 2015-07-15 2017-01-26 アイシン精機株式会社 Vapor deposition apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017020099A (en) * 2015-07-15 2017-01-26 アイシン精機株式会社 Vapor deposition apparatus

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