JPS60251104A - Silent discharge ozone generator - Google Patents

Silent discharge ozone generator

Info

Publication number
JPS60251104A
JPS60251104A JP10758084A JP10758084A JPS60251104A JP S60251104 A JPS60251104 A JP S60251104A JP 10758084 A JP10758084 A JP 10758084A JP 10758084 A JP10758084 A JP 10758084A JP S60251104 A JPS60251104 A JP S60251104A
Authority
JP
Japan
Prior art keywords
electrode
dielectric
discharge
stainless steel
ozone generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10758084A
Other languages
Japanese (ja)
Inventor
Satoru Hayashi
悟 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10758084A priority Critical patent/JPS60251104A/en
Publication of JPS60251104A publication Critical patent/JPS60251104A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE:To provide the titled ozone generator capable of preventing dielectric electrodes from rust generation by constructing metallic tubes of the dielectric electrodes of ferritic stainless steel or martensitic stainless steel having a Cr content regulated to above a specified value. CONSTITUTION:The silent discharge ozone generator is constituted with a high voltage side electrode 2, an earthed side electrode 3, and a discharge space 5 provided between both electrodes. At least one of the electrode 3 and 4 is covered by a dielectric electrode 4a constituting ferritic stainless steel or martensitic stainless steel having >=12% Cr content and 120X10<-7>mm./mm. deg.C coefft. of linear expansion. Specific examples for said material are SUS430, SUS403, etc. Since the metallic material of the dielectric electrode is scarcely rusted and the coefft. of linear expansion is close to the coefft. of linear expansion of dielectric glass, rust generation due to cooling water and corrosion of the electrode tube are prevented, and the life of ion exchange resin is prolonged. The maintenance is facilitated.

Description

【発明の詳細な説明】 〔発明の技術分野)・ 本発明は、錆の発生を防止する無−放電形オシン発生装
置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a non-discharge type ossin generator that prevents the occurrence of rust.

〔従来技術〕[Prior art]

無−放電を利用したオゾナイザにおいては、一般に第1
図に示すように誘電体を介して高電圧及び接地電接間に
空隙を設置し、無角放電を発生させることによシ供給し
た原料気体の酸素の一部をオゾン化するものである。す
なわち第1図において、(1)は交汗電源、(21は高
電圧1IIl′に極、(3)は接地側電極、(4)は誘
電体電極、(5)は放電空間、(6)は高圧及び接地電
線路を示すもので、この種オゾン発生装置においては、
投入する放雷電力の電気特性は次の0式で示されること
がよく知られている。
In ozonizers that utilize non-discharge, the first
As shown in the figure, a gap is provided between the high voltage and the ground connection via a dielectric, and a part of the oxygen in the supplied raw material gas is converted into ozone by generating an angular discharge. That is, in Fig. 1, (1) is the exchange power source, (21 is the high voltage 1IIl' pole, (3) is the ground side electrode, (4) is the dielectric electrode, (5) is the discharge space, (6) indicates the high-voltage and grounding wires, and in this type of ozone generator,
It is well known that the electrical characteristics of the lightning power applied are expressed by the following equation:

■式において、Wは放電電力、f#−を印加を源の周波
数、Cgは誘電体電極の靜電容童、Caは放電空間部の
靜電容童、Sは放電電極の面積、v8゜Veはそれぞれ
火花電圧と滅火電圧、Emは印加電圧のピーク値を示し
ている。■式によシ放電亀力Wの所定値を得るためには
L Cg+ sI Vlll Yet CatEmを適
宜に選ばなければならない。一方、放電電力Wとオゾン
発生装置での生成オゾン量との関連は、放電空間(5)
内の気体の柚類、圧力、温度、水分含有量、放電空間長
等によシ決まる。実用的な範囲のオゾン発生装置におい
ては、第2図に示すように放電電力Wとオゾン生成量と
け比例関係にある。
(2) In the equation, W is the discharge power, f#- is the frequency of the applied source, Cg is the electric current of the dielectric electrode, Ca is the electric current of the discharge space, S is the area of the discharge electrode, and v8°Ve is The spark voltage and extinguishing voltage are respectively shown, and Em indicates the peak value of the applied voltage. In order to obtain a predetermined value of the discharge force W according to the formula (2), L Cg+ sI Vllll Yet CatEm must be appropriately selected. On the other hand, the relationship between the discharge power W and the amount of ozone generated in the ozone generator is shown in the discharge space (5).
It depends on the gas content, pressure, temperature, moisture content, discharge space length, etc. In a practical ozone generator, there is a proportional relationship between the discharge power W and the amount of ozone generated, as shown in FIG.

ところで従来のオゾン発生装置においては、放電電極を
形成する誘電体電極(4)の材料に硼珪酸ガラス、鉛含
有ガラスあるいはマイカ等が一般に使用されていた。こ
の場合、s’*、体電極(4)の誘電率は^々5〜8程
度である。なお放電面積Sは、放電電力密度号 として
放電電力とオゾン生成量との関係に重大なる影響を与え
るため、適宜に設計される。また放電空間長は、放電の
状態と放電部の温度に影11(17与えるため、電極製
造技術を考慮して一般に1〜2■程度に選ばれる。従っ
て気体圧力、温度等が決められると、火花電圧Vs及び
滅火電圧Veが決まる。よって放電電力wB=般に電源
周波数fまたは放電電圧のピーク値Emがh」変値とし
てオゾン発生装置の制御に利用される。表1及び表2に
従来から実用されているオゾン発生装置の一般的特性を
示す。
By the way, in conventional ozone generators, borosilicate glass, lead-containing glass, mica, or the like is generally used as the material for the dielectric electrode (4) forming the discharge electrode. In this case, s'*, the dielectric constant of the body electrode (4) is about 5 to 8. Note that the discharge area S has a significant influence on the relationship between the discharge power and the amount of ozone produced as a discharge power density number, and is therefore appropriately designed. In addition, the discharge space length is generally selected to be about 1 to 2 cm, taking into account the electrode manufacturing technology, since it affects the discharge state and the temperature of the discharge part. Therefore, once the gas pressure, temperature, etc. are determined, The spark voltage Vs and the extinguishing voltage Ve are determined. Therefore, the discharge power wB = Generally, the power supply frequency f or the peak value Em of the discharge voltage is used as a variable value for controlling the ozone generator. Tables 1 and 2 show the conventional The general characteristics of ozone generators that have been put into practical use are shown below.

表1 従来タイプ商用周波数オゾナイザ電気特性諸元表
2 従来タイプ高周波数オゾナイザ電気特性諸元ところ
で、従来の誘電体電極(4)は、鋳鉄管あるいけ鋼管に
対していわゆるほうろうに適用されている常法でガラス
粉末を塗布し、焼成することによって形成されていた。
Table 1 Electrical characteristic specifications for conventional type commercial frequency ozonizer Table 2 Electrical characteristic specifications for conventional type high frequency ozonizer It was formed by applying glass powder using a method and firing it.

しかし実機稼動時には、放電管を冷却するためにイオン
交換水kINすため誘電体電極(4)に錆が発生し、こ
のためイオン交換樹脂の特性低下が早くな郵、この特性
が著しく低下すればn1M体*極(4)を交換しなけれ
ばならない等の欠点があった。
However, during actual operation, rust occurs on the dielectric electrode (4) due to ion-exchanged water being used to cool the discharge tube.As a result, the properties of the ion-exchange resin deteriorate quickly, and if these properties deteriorate significantly. There were drawbacks such as the need to replace the n1M body*pole (4).

〔発明の概髪〕[Overview of the invention]

本発明は、上記のような欠点全解決するためになされた
もので、錆の発生を防止した無声放電形オゾン発生装置
を得るため、誘電体電極の金属管材料にクロムCCr)
含有量が12%以上であるフェライト系ステンレス材及
びマルテンサイト系ステンレス材を適用した無声放電形
オゾン発生装置を提供するものである。
The present invention has been made to solve all of the above-mentioned drawbacks, and in order to obtain a silent discharge type ozone generator that prevents rust, chromium (CCr) is added to the metal tube material of the dielectric electrode.
The present invention provides a silent discharge type ozone generator to which a ferritic stainless steel material and a martensitic stainless steel material with a content of 12% or more are applied.

〔発明の実施例〕[Embodiments of the invention]

第3図(a)、 (b)は本発明の実施例の原理的斜視
図である。(21tj:高電圧側電極、(3)は接地1
Ill !極、(5)は高電圧側電極(2)と接地1l
li ′ItV (31との間に設けられた放電空間で
ある。(11は高電圧電極(2)と接地側電極(3)と
の間に高電圧を印加して放電空間(5)に放電を起こす
ための交流電源である。放電空間(5)には原料気体を
供給して放電より原料気体中の酸素をオゾン化する供給
要素(図示せず)が備えられている。(4a)は誘電体
電極で、?#b1!圧電極(2)または、接地側電極(
3)の少なくとも一方は誘電体電極(4a)により被接
されている。第6図(&)は誘電体電極(4a)が接地
側電極【3)を薔薇している場合を示し、第6図(b)
は、vj誘電体電極4a)が高電圧側電極(2)を被接
している場合を示している。
FIGS. 3(a) and 3(b) are perspective views of the principle of an embodiment of the present invention. (21tj: High voltage side electrode, (3) is ground 1
Ill! pole, (5) is the high voltage side electrode (2) and ground 1l
li ′ItV (31 is a discharge space provided between The discharge space (5) is equipped with a supply element (not shown) that supplies the raw material gas and converts the oxygen in the raw material gas into ozone through discharge. (4a) Dielectric electrode, ?#b1! Piezo electrode (2) or ground side electrode (
At least one of 3) is in contact with a dielectric electrode (4a). Figure 6 (&) shows the case where the dielectric electrode (4a) connects the ground side electrode [3], and Figure 6 (b)
shows the case where the vj dielectric electrode 4a) is in contact with the high voltage side electrode (2).

本発明における誘電体電極(4a)の金属管材料は、ク
ロム含有量が12チ以上、線膨張係数が120×1叶7
シ、、4:(0℃〜100℃)であるフェライト系ステ
ンレス材及びマルテンサイト系ステンレス材で構成され
ている。このような金属管材料としては、たとえば5U
S430材、5US405材、及び5US403材があ
けられる。
The metal tube material of the dielectric electrode (4a) in the present invention has a chromium content of 12 or more and a linear expansion coefficient of 120 x 1.
4: It is composed of a ferritic stainless steel material and a martensitic stainless steel material (0°C to 100°C). As such metal pipe material, for example, 5U
S430 material, 5US405 material, and 5US403 material can be drilled.

従来オゾン発生装置に使用されている誘電体電極(4a
)の材料としては、酸化バリウム、酸化ホウ素、酸化ケ
イ木酸ジルコニウム、酸化アルミ、酸化チタン、酸化コ
バルト材などがあり、実測した線膨張率け91 X 1
0−’−/m・℃であった。従って誘電体電極(4h〕
の材料の線膨張率は、本発明に係るたとえば5US43
0ステンレス鋼管の線膨張率104X10−’C・℃と
比べてやや小さい。
Dielectric electrode (4a) conventionally used in ozone generators
) materials include barium oxide, boron oxide, zirconium silicate oxide, aluminum oxide, titanium oxide, cobalt oxide materials, etc., and the actually measured linear expansion coefficient is 91 x 1
It was 0-'-/m·℃. Therefore, dielectric electrode (4h)
The coefficient of linear expansion of the material is, for example, 5US43 according to the present invention.
The coefficient of linear expansion is slightly smaller than that of stainless steel tube, which is 104×10-'C.℃.

麿■ しかし、オーステナイト系ステンレス鋼であるSUS 
304鋼管の線膨張率180 x 10−’−,−・℃
と比べると大きな差がある。
Maro■ However, SUS, which is an austenitic stainless steel,
Linear expansion coefficient of 304 steel pipe 180 x 10-'-,-・℃
There is a big difference compared to

第1図に示す誘電体電極(4)を製作する場合に、誘電
体電極(4)の金属管材料にSUS 304材料を用い
たものは誘電体電極(4)の端部においてクラックが発
生し、良好な放電管を形成することができない。しかし
ながら本発明に係るSUS 430材料を第6図に示す
誘電体電極(4a〕の金属管材料に用いたものはクラッ
クも発生せず良好であった。一般に本発明に係るマルテ
ンサイト系ステンレス材、フェライト系ステンレス材は
オーステナイト系ステンレスよシも線膨張係数が小さく
、従来より用いられている誘電体ガラスを塗布焼成した
場合に線膨張率の差による内部応力の発生か小さくなる
When manufacturing the dielectric electrode (4) shown in Figure 1, if SUS 304 material is used for the metal tube material of the dielectric electrode (4), cracks may occur at the ends of the dielectric electrode (4). , it is not possible to form a good discharge tube. However, when the SUS 430 material according to the present invention was used as the metal tube material of the dielectric electrode (4a) shown in Fig. 6, no cracks occurred and the result was good.In general, the martensitic stainless steel material according to the present invention, Ferritic stainless steel materials have a smaller linear expansion coefficient than austenitic stainless steel materials, and when conventionally used dielectric glass is coated and fired, the internal stress generated due to the difference in linear expansion coefficients is reduced.

さらに実機使用時に発生する冷却水による誘電体電極(
4a)の金属管内の錆は、従来の鋼管製誘電体電極(4
)の場合には、2〜6週間の使用後に発生し冷却水の着
色が観測された。しかしながら本発明に係るSUS 4
30製誘電体電極(4a)の場合には、1年以上の経過
後も冷却水の着色は観測されず、錆も発生せず極めて良
好であった。
Furthermore, the dielectric electrode (
Rust inside the metal tube in 4a) can be removed by using the conventional steel pipe dielectric electrode (4a).
), coloring of the cooling water was observed after 2 to 6 weeks of use. However, SUS 4 according to the present invention
In the case of the dielectric electrode (4a) made of No. 30, no coloring of the cooling water was observed even after one year or more, and no rust was generated, which was extremely good.

なお第4図は本発明の実施例を示す正面図で、高電圧側
電極(2)、誘電体電極(4b)、接地側電極(3)は
中空円筒状に構成されている。
Note that FIG. 4 is a front view showing an embodiment of the present invention, in which the high voltage side electrode (2), the dielectric electrode (4b), and the ground side electrode (3) are configured in a hollow cylindrical shape.

上記の説明では、5US430材を用いた誘電体電極に
ついて説明したが、水弁FJAはこれに限定するもので
はなく他のマルテンサイト系ステンレス材、フェライト
系ステンレス材であってもよい。
In the above description, a dielectric electrode using 5US430 material has been described, but the water valve FJA is not limited to this, and may be made of other martensitic stainless steel materials or ferritic stainless steel materials.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように、本発明によれば、誘電
体電極の金属材料にさびに<<、かつ誘電体ガラスの線
膨張率に近い材料を用いたので冷却水による金属管の錆
を防止でき、またイオン交換樹脂の長寿命化及び電極管
腐蝕を防止することによって、メインテナンスが容易な
うえ安価で信頼性が高くなる等顕著な効果がある。
As is clear from the above description, according to the present invention, a material that is resistant to rust and has a coefficient of linear expansion close to that of dielectric glass is used as the metal material of the dielectric electrode, so that rust on the metal tube caused by cooling water is prevented. Furthermore, by prolonging the life of the ion exchange resin and preventing corrosion of the electrode tube, there are remarkable effects such as easy maintenance, low cost, and high reliability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の無声放電形オゾン発生装置の一例を示す
模式図、第2図は、放電電力とオゾン生成蓋との関係を
示す線図、第3図(a)) (h)、は本発明の実施例
を示す模式図、第4図は本発明実施例の斜視図である。 ill・・・交流電源、(2)・・・高電圧(ti11
電極、(3)・・・接地側電極、(4a ) −(4b
 )・・・誘電体電極、(5)・・・放電空間(6)・
・・高圧及び接地電線路 なお各囚中同−符号は同一または相当部分を示すものと
する。 代理人 弁理士 木 村 三 朗 第1図 第2図 第3図 第4図 手続補正書(自発) 昭和59年12月25日 特許庁長官殿 、1.事件の表示 特願昭 59−107580号2、
発明の名称 無声放電形オゾン発生装置 3、補正をする者 4、代理人 二≠ 諸、補正の対象 小 6、補正の内容 (1)明細書の「特許請求の範囲」を別紙のとおり補正
する。 (2)明細書第5頁の表の下から第8行の[誘電体電極
(4)を]を「イオン交換樹脂を交換しなければならな
いし、誘電体電極(4)の錆が著しくなれば」と補正す
る。 (3)明細書第7頁第2行〜第3行の[線膨張係数が1
20X 10−”I1m/工°℃(θ℃〜100℃)1
を削除する。 (4)明細書第7頁第10行のU酸化ケイ木酸ジルコニ
ウム」を[酸化ゲイ素、酸ジルコニウム」と補正する。 (5)明細書第7頁第11行の「酸化コバルト材」を「
酸化コバルト原料よりなるガラス」と補正する。 以 上 別 紙 特許請求の範囲 (補正) [(1)接地側電極と高電圧側電極、該接地側電極と高
電圧側電極間に高電圧を印加して該電極間の放電空間に
放電を起こす電源、前記放電空間に原料気体を供給して
放電により原料気体中の酸素をオゾン化する供給要素、
及び前記接地側電極と高電圧側電極の少なくとも一方を
被覆した誘電体電極よりなり、前記誘電体電極を構成す
る金属管材料をクロム含有量が12 p フェライト系
ステンレス材及びマルテンサイト系ステンレス材でぜ構
成しlこことを特徴と゛する無声放電形オゾン発生装置
。 (2)誘電体電極の金属管材料が5US430材で構成
されていることを特徴とする特許請求の範囲11亙り藍
の無声放電形オゾン発生装置。 (3)誘電体電極の金属管材料が5US405材で構成
されていることを特徴とする特許請求の範囲1工互里蓋
の無声放電形副シン発生装置。
Fig. 1 is a schematic diagram showing an example of a conventional silent discharge type ozone generator, Fig. 2 is a diagram showing the relationship between discharge power and the ozone generation lid, and Fig. 3 (a)) (h), FIG. 4 is a schematic diagram showing an embodiment of the present invention, and FIG. 4 is a perspective view of the embodiment of the present invention. ill...AC power supply, (2)...high voltage (ti11
Electrode, (3)...Ground side electrode, (4a) - (4b
)...Dielectric electrode, (5)...Discharge space (6).
...High-voltage and grounding power lines The same symbols in each prisoner shall indicate the same or equivalent parts. Agent: Patent Attorney Sanro Kimura Figure 1 Figure 2 Figure 3 Figure 4 Procedural amendment (voluntary) December 25, 1980 Mr. Commissioner of the Japan Patent Office, 1. Indication of the incident Patent application No. 59-107580 2,
Name of the invention: Silent discharge ozone generator 3, Person making the amendment 4, Agent 2 Miscellaneous, Subject of amendment 6, Contents of amendment (1) The "Claims" of the specification are amended as shown in the attached sheet. . (2) [Dielectric electrode (4)] in the 8th line from the bottom of the table on page 5 of the specification indicates that ``The ion exchange resin must be replaced, and the dielectric electrode (4) has become extremely rusty.''"Ba," he corrected. (3) Linear expansion coefficient is 1 on page 7, line 2 to line 3 of the specification.
20X 10-”I1m/work°℃(θ℃~100℃)1
Delete. (4) "U zirconium silicate oxide" on page 7, line 10 of the specification is corrected to "gayric oxide, zirconium acid." (5) “Cobalt oxide material” on page 7, line 11 of the specification is “
"Glass made from cobalt oxide raw material". The above appended claims (amendment) [(1) Applying a high voltage between the ground side electrode and the high voltage side electrode, and the ground side electrode and the high voltage side electrode to generate a discharge in the discharge space between the electrodes. a supply element that supplies the raw material gas to the discharge space and ozonates oxygen in the raw material gas by discharge;
and a dielectric electrode covering at least one of the ground side electrode and the high voltage side electrode, and the metal tube material constituting the dielectric electrode is made of a ferritic stainless steel material and a martensitic stainless steel material with a chromium content of 12 p. A silent discharge type ozone generator comprising the following features. (2) An indigo silent discharge type ozone generator according to claim 11, characterized in that the metal tube material of the dielectric electrode is made of 5US430 material. (3) A silent discharge type sub-sink generating device of claim 1, characterized in that the metal tube material of the dielectric electrode is made of 5US405 material.

Claims (1)

【特許請求の範囲】 IF+接地側電極と高電圧側電極、#接地1u11電極
と高電圧11m極間に高電圧を印加して該電極間の放電
空間に放電を起こす電源、前記放電空間に原料気体を供
給して放電にょ9原料気体中の酸素をオゾン化する供給
要素、及び前記接地1lIIiII極と高電圧111電
極の少なくとも一方を被接し九誘電体電極よシなり、前
記誘電体電極を構成する金属管材料をクロム含有量が1
2%以上で線膨張係数が120’ x 10−’ −/
 1℃であるフェライト系ステンレス材及びマルテンサ
イト系ステンレス材で構成シたことを特徴とする無声放
電形オゾン発生装置。 (2)誘電体電極の金属管材料が5US430材で構成
されていることを特徴とする特許請求の範囲第111項
に記載の無声放電形オゾン発生装置。 +31 M電体′Il極の金属管材料が5US405材
で構成されていることf特徴とする特許請求の範囲第(
11項に記載の無声放電形オゾン発生装置。 (4)誘電体II極の金属管材料が5US403材で構
成されていることを特徴とする特許請求の範囲第111
項に記載の無声放電形オゾン発生装置。
[Claims] A power supply that applies a high voltage between the IF+ ground side electrode and the high voltage side electrode, the #ground 1u11 electrode and the high voltage 11m electrode to cause a discharge in the discharge space between the electrodes, and a source material in the discharge space. A supply element that supplies gas to ozonize oxygen in the raw material gas for discharge, and a dielectric electrode that is in contact with at least one of the ground 1lIIiII electrode and the high voltage 111 electrode, and constitutes the dielectric electrode. Metal pipe material with a chromium content of 1
At 2% or more, the linear expansion coefficient is 120' x 10-' −/
A silent discharge type ozone generator characterized by being constructed of ferritic stainless steel material and martensitic stainless steel material having a temperature of 1°C. (2) The silent discharge type ozone generator according to claim 111, wherein the metal tube material of the dielectric electrode is made of 5US430 material. Claim No.
The silent discharge ozone generator according to item 11. (4) Claim 111, characterized in that the metal tube material of the dielectric II pole is made of 5US403 material.
Silent discharge type ozone generator described in 2.
JP10758084A 1984-05-29 1984-05-29 Silent discharge ozone generator Pending JPS60251104A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10758084A JPS60251104A (en) 1984-05-29 1984-05-29 Silent discharge ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10758084A JPS60251104A (en) 1984-05-29 1984-05-29 Silent discharge ozone generator

Publications (1)

Publication Number Publication Date
JPS60251104A true JPS60251104A (en) 1985-12-11

Family

ID=14462767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10758084A Pending JPS60251104A (en) 1984-05-29 1984-05-29 Silent discharge ozone generator

Country Status (1)

Country Link
JP (1) JPS60251104A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0818415A1 (en) * 1996-07-10 1998-01-14 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0818415A1 (en) * 1996-07-10 1998-01-14 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
US5942196A (en) * 1996-07-10 1999-08-24 Mitsubishi Denki Kabushiki Kaisha Ozone generating apparatus
CN1117695C (en) * 1996-07-10 2003-08-13 三菱电机株式会社 Ozone generator

Similar Documents

Publication Publication Date Title
US4774062A (en) Corona discharge ozonator
CA1272983A (en) Device for producing ozone
JP4999503B2 (en) Ozone generator
JPS60251104A (en) Silent discharge ozone generator
Porter et al. Contact potentials of stearate films on metal surfaces
JPH0648707A (en) Ozone-generating device
JPS63242903A (en) Ozonizer
JPS62113703A (en) Ozonizer
JPS62278105A (en) Ozone-generator
US8088337B2 (en) Ozone generator and an electrode thereof
KR100851518B1 (en) Ozone generator and an electrode therefor
US3401278A (en) Electrodes for magnetohydrodynamic devices
JP3339114B2 (en) High voltage electrode structure of ozone generator
DE950137C (en) Process for the production of compressed gas-insulated electrical devices or devices for high voltages, in particular measuring transformers
TW467770B (en) Gold plating method for quartz or high alumina tube of high heat resistance and high voltage resistance, and gold-plated quartz and high alumina tube for the application of ozone generator
JP2009091209A (en) Discharge tube for ozone generation
CN205634888U (en) Electrode and ozone generator for ozone generator
AT396022B (en) BURNER HEATED UNIT
JPH0519298Y2 (en)
Adams LXXXV. On electrostriction
JPS6060904A (en) Ozone generator
JPH04325404A (en) Ozonizer
US742341A (en) Ozonator.
JP2893158B2 (en) Discharge reactor
JPH0489304A (en) Ozonizer