JPS60247818A - Production of magnetoresistance effect type magnetic head - Google Patents

Production of magnetoresistance effect type magnetic head

Info

Publication number
JPS60247818A
JPS60247818A JP10513984A JP10513984A JPS60247818A JP S60247818 A JPS60247818 A JP S60247818A JP 10513984 A JP10513984 A JP 10513984A JP 10513984 A JP10513984 A JP 10513984A JP S60247818 A JPS60247818 A JP S60247818A
Authority
JP
Japan
Prior art keywords
magnetic
substrate
magnetic head
thin film
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10513984A
Other languages
Japanese (ja)
Other versions
JPH0786969B2 (en
Inventor
Tatsuo Ozeki
尾関　龍夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59105139A priority Critical patent/JPH0786969B2/en
Publication of JPS60247818A publication Critical patent/JPS60247818A/en
Publication of JPH0786969B2 publication Critical patent/JPH0786969B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
    • G11B5/3922—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
    • G11B5/3925—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To prevent the deterioration of a magnetoresistance effect in the process for producing a magnetic head and to improve the resistance to wear by forming a substrate contg. a magnetic flux lead-in core part by glass bonding, cutting, polishing, etc. and forming a thin metallic film having the magnetoresistance effect on the substrate. CONSTITUTION:The non-magnetic substrates 1a, 1b are disposed in such a manner that the thin magnetic metallic films 2a, 2b of ''Sendust(R)'', etc. formed thereon face each other. The disposed substrates are joined by joining means such as glass bonding. The joined substrates 1a, 1b are then cut in the position shown by an alternate long and short line. The thin magnetic film of ''Permalloy(R)'', etc. having the MR effect is formed by vapor deposition, etc. on the rear of the substrate 8 contg. the magnetic flux lead-in core part and lead wires 6a, 6b are bonded to the film 3, by which the magnetic head is produced.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は磁気抵抗効果型磁気ヘッドの製造方法、特に
耐摩耗性が高く且つ製造工程中における磁気抵抗効果の
劣化を防止することができる磁気ヘッドの製造方法に関
するものである。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a method for manufacturing a magnetoresistive magnetic head, and particularly a magnetic head that has high wear resistance and can prevent deterioration of the magnetoresistive effect during the manufacturing process. The present invention relates to a manufacturing method.

〔従来技術〕[Prior art]

第１図は従来の磁気抵抗効果型磁気ヘッドを示す縦断面
図であり、図において、（１）はサファイア、Ａ／２０
．−　ＴｉＣ等でなる基板、（２）はパーマロイ、セン
ダスト等の金属磁性薄膜、（３）はパーマロイ等の磁気
抵抗効果（以下簡単のためＭＲ効果と称す）を有するＭ
Ｒ効果磁性薄膜、（４）はエポキシ樹脂等の樹脂接着層
、（５）は前記基板（１）と同材料の保護板である。な
お、第１図において符号（Ａ）で示しだ部分が磁気テー
プ等の磁気媒体と摺接する摺接面である。FIG. 1 is a longitudinal cross-sectional view showing a conventional magnetoresistive magnetic head. In the figure, (1) is sapphire, A/20
．． - A substrate made of TiC or the like, (2) is a metal magnetic thin film such as permalloy or sendust, and (3) is an M having a magnetoresistive effect (hereinafter referred to as MR effect for simplicity) such as permalloy.
R-effect magnetic thin film, (4) is a resin adhesive layer such as epoxy resin, and (5) is a protective plate made of the same material as the substrate (1). Note that in FIG. 1, the portion indicated by the symbol (A) is a sliding surface that comes into sliding contact with a magnetic medium such as a magnetic tape.

以上の構成を有する所謂磁束引込型のＭＲ効果型磁気ヘ
ッドにおいては、摺接面（Ａ）に摺接する磁気媒体から
の磁束が金属磁性薄膜（２）内に導入され、その一部が
ＭＲ効果磁性薄膜（３）を横切ることになる。この磁束
によって、ＭＲ効果磁性薄膜（３）の電気抵抗が変化し
、その抵抗変化を検出することにより、磁気媒体に磁気
記録された情報を再生することができる。In the so-called magnetic flux drawing type MR effect magnetic head having the above configuration, the magnetic flux from the magnetic medium slidingly in contact with the sliding contact surface (A) is introduced into the metal magnetic thin film (2), and a part of it is caused by the MR effect. It will cross the magnetic thin film (3). This magnetic flux changes the electrical resistance of the MR effect magnetic thin film (3), and by detecting the resistance change, information magnetically recorded on the magnetic medium can be reproduced.

ところで、前記従来の磁気ヘッドを製造するには、基板
（１）上に磁気ヘッドを構成する薄膜材料を順次スパッ
タ、メッキ等で積層することによって製造するようにし
ているので、發終的に保護板（５）をエポキシ樹脂等の
接着剤で接合する際に温度を上げると、ＭＲ効果磁性薄
膜（３）の特性が劣化する問題点があり、このため、低
温度で硬化するエポキシ樹脂等の接着剤のみしか使用で
きず、磁気媒体と摺接する摺接面（Ａ）の耐摩耗性を向
上させることができない欠点があった。また、同様の理
由でガラスを溶融させて融着するというガラスボンディ
ングプロセスも採用することができないものであった。By the way, in order to manufacture the conventional magnetic head, the thin film material constituting the magnetic head is sequentially laminated on the substrate (1) by sputtering, plating, etc. If the temperature is raised when bonding the plates (5) with an adhesive such as epoxy resin, the characteristics of the MR effect magnetic thin film (3) will deteriorate. There is a drawback that only adhesive can be used, and the wear resistance of the sliding surface (A) that comes into sliding contact with the magnetic medium cannot be improved. Further, for the same reason, a glass bonding process in which glass is melted and fused cannot be employed.

〔発明の概要〕[Summary of the invention]

この発明は係る欠点を改善するためになされたもので、
予め磁気媒体と摺接してその磁束引込部となる磁性体を
基板上に形成し、これをガラスボンディング、切断、研
摩等を行うことによって磁束引込コア部を内蔵する基板
を作成し、当該基板上に磁気抵抗効果を有する金属薄膜
を成膜することにより、磁気ヘッド製造工程中における
磁気抵抗効果の劣化を防止すると共に１耐摩耗性の優れ
た磁気ヘッドを得ることができる磁気抵抗効果型磁気ヘ
ッドの製造方法を提案するものである。This invention was made to improve such drawbacks,
A magnetic material that comes into sliding contact with a magnetic medium and becomes a magnetic flux drawing part is formed on a substrate in advance, and this is subjected to glass bonding, cutting, polishing, etc. to create a substrate with a built-in magnetic flux drawing core part. A magnetoresistive magnetic head that prevents deterioration of the magnetoresistive effect during the manufacturing process of the magnetic head and provides a magnetic head with excellent wear resistance by forming a metal thin film having a magnetoresistive effect on the magnetic head. This paper proposes a method for manufacturing.

〔発明の実施例〕[Embodiments of the invention]

第２図（イ）及び（ロ）は夫々この発明により製造した
磁気ヘッドの１実施例を示すものであり、（１ａ）、（
１ｂ）はサファイア、Ａｌ２Ｏ２−ＴｉＣ等でなる一対
の非磁性基板、（２ａ）、（２ｂ）は非磁性基板（１ａ
）、（ｌｂ）の対向面に形成された磁束引込部となる金
属磁性薄膜、（３）は磁性薄膜（２−）。FIGS. 2(a) and 2(b) respectively show one embodiment of the magnetic head manufactured according to the present invention, and FIGS.
1b) is a pair of non-magnetic substrates made of sapphire, Al2O2-TiC, etc., (2a) and (2b) are non-magnetic substrates (1a
), (lb) are metal magnetic thin films forming magnetic flux drawing portions formed on opposing surfaces; (3) is a magnetic thin film (2-);

（２ｂ）の後端に連設されたパーマロイ等の磁気抵抗効
果（ＭＲ効果）を有する磁性薄膜、（４）は非磁性基板
（ｒａ）、（ｔｂ）をその金属磁性薄膜（２−）。(2b) is a magnetic thin film having a magnetoresistive effect (MR effect) such as permalloy that is connected to the rear end, (4) is a non-magnetic substrate (ra), and (tb) is a metal magnetic thin film (2-).

（２ｂ）側で接合すルカラス、（６ａ）、（６ｂ）はア
ルミニウム等の金属導電体による磁性薄膜（３）のリー
ド線である。The glass joined on the (2b) side, (6a) and (6b) are lead wires of the magnetic thin film (3) made of a metal conductor such as aluminum.

次に、以上の構成を有する磁気ヘッドを製造するための
この発明による製造方法を第３図乃至第７図について説
明する。Next, a manufacturing method according to the present invention for manufacturing a magnetic head having the above structure will be explained with reference to FIGS. 3 to 7.

まず、第３図（イ）及び（ロ）に示すように、長方形の
板状非磁性基板（１ａ）の上面にセンダスト等の耐熱性
を有する金属磁性薄膜（２ａ）をスパッタ等で形成し、
次いでスパッタエッチ等の写真製版技術を利用して所定
の磁気媒体のトラック幅に応じた形にパターンニングす
る。First, as shown in FIGS. 3(a) and 3(b), a heat-resistant metal magnetic thin film (2a) such as Sendust is formed on the upper surface of a rectangular plate-shaped nonmagnetic substrate (1a) by sputtering or the like.
Next, using a photolithography technique such as sputter etching, patterning is performed in a shape corresponding to a predetermined track width of the magnetic medium.

また、他方の非磁性基板（１ｂ）の上面に、第４図（イ
）及び（ロ）に示す如く所定間隔でＶ字状溝（７）を形
成し、これにセンダスト等の耐熱性を有する金属磁性薄
膜（２ｂ）をスパッタ等で形成し、次いでスパッタエッ
チ等の写真製版技術を利用して所定の形にパターンニン
グスル。Further, V-shaped grooves (7) are formed at predetermined intervals on the upper surface of the other non-magnetic substrate (1b) as shown in FIGS. A metal magnetic thin film (2b) is formed by sputtering or the like, and then patterned into a predetermined shape using photolithography techniques such as sputter etching.

その後、両非磁性基板（１」）、ａｂ）を、それらに形
成した金属磁性薄膜（２ａ）、（２ｂ）を対向させて配
置し、ガラスボンディング等の接合手段で第５図に示す
ように接合する。Thereafter, the metal magnetic thin films (2a), (2b) formed on the non-magnetic substrates (1'', ab) are placed facing each other, and bonded by glass bonding or other bonding means as shown in FIG. Join.

次いで、接合した基板（１！Ｌ）、（１ｂ）を、第５図
で１点鎖線で示す位置で切断し、その端面を研摩して第
６図に示す磁束引込コア部内蔵基板（８）を得る。Next, the bonded substrates (1!L) and (1b) are cut at the positions indicated by the dashed-dotted lines in FIG. 5, and the end faces are polished to form the magnetic flux drawing core built-in substrate (8) shown in FIG. get.

次いで、磁束引込コア部内蔵基板（８）の裏面に、パー
マロイ等のＭＲ効果を有する磁性薄膜（３）を蒸着等に
より形成し、次いで磁性薄膜（３）にリード線（６ａ）
、（６ｂ）をボンディングして第７図に示すように目的
とする磁気ヘッドを製造する。Next, a magnetic thin film (3) having an MR effect such as permalloy is formed on the back surface of the magnetic flux drawing core built-in substrate (8) by vapor deposition or the like, and then a lead wire (6a) is attached to the magnetic thin film (3).
, (6b) to manufacture the desired magnetic head as shown in FIG.

なお、上記実施例においては、２チヤンネルの磁気ヘッ
ドを製造する場合について説明しだが、これに限定され
るものではなく、第３図及び第４図における金属磁性薄
膜（ｚａ）、（ｚｂ）の幅及び数を任意に選定すること
により、１チヤンネル以上任意数チャンネルの磁気ヘッ
ドを製造することができる。In the above embodiment, the case where a two-channel magnetic head is manufactured is explained, but the invention is not limited to this, and the metal magnetic thin films (za) and (zb) in FIGS. By arbitrarily selecting the width and number, it is possible to manufacture a magnetic head with one or more channels or any number of channels.

〔発明の効果〕 この発明は以上説明したとおり、予め磁束引込コア部内
蔵基板を作成し、この磁束引込コア部内蔵基板上にパー
マロイ等の耐熱性の低い磁気抵抗効果を有する磁性薄膜
を成膜するようにしだので、磁気媒体と摺接する磁束引
込コア部内蔵基板をガラスボンディング等の加熱を必要
とする接合によって形成することが可能となシ、磁気媒
体との摺接部の耐摩耗性を確保することができ、しかも
磁気抵抗効果を有する磁性薄膜の熱による劣化を確実釦
防止して高精度で耐摩耗性の高い磁気ヘッドを製造する
ととができるという効果がある。[Effects of the Invention] As explained above, the present invention involves preparing a substrate with a built-in magnetic flux drawing core in advance, and depositing a magnetic thin film such as permalloy having a magnetoresistance effect with low heat resistance on this substrate with a built-in magnetic flux drawing core. Therefore, it is possible to form the substrate with a built-in magnetic flux drawing core that makes sliding contact with the magnetic medium by bonding that requires heating, such as glass bonding, and improves the wear resistance of the sliding part that makes contact with the magnetic medium. Moreover, it is possible to reliably prevent deterioration of the magnetic thin film having a magnetoresistive effect due to heat, thereby producing a magnetic head with high precision and high wear resistance.

また、磁気媒体上の記録情報を再生するトラック幅は、
磁束引込部となる磁性薄膜の幅で規制することができ、
これらは写真製版による高精度な加工を期待できるので
、高精度の磁気ヘッドを製造することができる効果があ
る。In addition, the track width for reproducing recorded information on a magnetic medium is
It can be regulated by the width of the magnetic thin film that serves as the magnetic flux drawing part.
Since these can be expected to be processed with high accuracy by photolithography, they have the effect of making it possible to manufacture highly accurate magnetic heads.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の磁気抵抗効果型磁気ヘッドを示す断面図
、第２図（イ）及び（ロ）は夫々この発明によシ製造し
た磁気抵抗効果型磁気ヘッドを示す断面図及び平面図、
第３図（イ）及び（ロ）はこの発明による製造工程の途
中状態を示す側面図及び平面図、第４図（イ）及び（ロ
）は同様に製造工程の途中状態を示す側面図及び平面図
、第５図、第６図及び第７図も夫々この発明による゛製
造工程を示す側面図、斜視図及び最終段階の斜視図であ
る。 図において、（ｌａ）、（１１））は非磁性基板、（２
ａ）、（２ｂ）は金属磁性薄膜、（３）は磁気抵抗効果
を有する磁性薄膜、（４）は樹脂接着層、（６ａ）。 （６１））Ｆｉリード線、（８）は磁束引込コア部内蔵
基板である。 なお、各図中同一符号は同一または相当部分を示すもの
とする。 代理人　弁理士　大　岩　増　雄 （ほか２名） 第１図 第２図 （イ）　ｃ口） 第３図 ｎ 第４図 第５図 第７図FIG. 1 is a sectional view showing a conventional magnetoresistive magnetic head, and FIGS. 2(a) and 2(b) are a sectional view and a plan view, respectively, showing a magnetoresistive magnetic head manufactured according to the present invention.
3(a) and (b) are a side view and a plan view showing an intermediate state of the manufacturing process according to the present invention, and FIGS. 4(a) and (b) are a side view and a plan view showing an intermediate state of the manufacturing process according to the present invention. The plan view, FIG. 5, FIG. 6, and FIG. 7 are also a side view, a perspective view, and a final stage perspective view, respectively, showing the manufacturing process according to the present invention. In the figure, (la), (11)) are nonmagnetic substrates, (2
a) and (2b) are metal magnetic thin films, (3) are magnetic thin films having a magnetoresistive effect, (4) are resin adhesive layers, and (6a). (61)) Fi lead wire; (8) is a board with a built-in magnetic flux drawing core part. Note that the same reference numerals in each figure indicate the same or corresponding parts. Agent Patent Attorney Masuo Oiwa (and 2 others) Figure 1 Figure 2 (A) Figure 3 n Figure 4 Figure 5 Figure 7

Claims (1)

【特許請求の範囲】[Claims] （１）金属磁性薄膜の磁気抵抗効果を利用した磁気ヘッ
ドの製造方法において、一対の非磁性基板上に夫々耐熱
性を有する磁性薄膜をスパッタ等で成膜し、当該磁性薄
膜を写真製版した後に両者をガラスボンディングを用い
て接合してから切断して磁束引込コア部内蔵基板を作成
し、該磁束引込コア部内蔵基板上に磁気抵抗効果を有す
る金属薄膜を成膜することを特徴とする磁気抵抗効果型
磁気ヘッドの製造方法。(1) In a method for manufacturing a magnetic head that utilizes the magnetoresistive effect of metal magnetic thin films, a heat-resistant magnetic thin film is formed on a pair of non-magnetic substrates by sputtering, etc., and the magnetic thin film is photolithographically processed. A magnetic flux drawing method characterized in that both are bonded using glass bonding and then cut to create a substrate with a built-in magnetic flux drawing core portion, and a metal thin film having a magnetoresistive effect is formed on the substrate with a built-in magnetic flux drawing core portion. A method for manufacturing a resistive magnetic head.
JP59105139A 1984-05-24 1984-05-24 Method of manufacturing magnetoresistive effect magnetic head Expired - Lifetime JPH0786969B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59105139A JPH0786969B2 (en) 1984-05-24 1984-05-24 Method of manufacturing magnetoresistive effect magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59105139A JPH0786969B2 (en) 1984-05-24 1984-05-24 Method of manufacturing magnetoresistive effect magnetic head

Publications (2)

Publication Number Publication Date
JPS60247818A true JPS60247818A (en) 1985-12-07
JPH0786969B2 JPH0786969B2 (en) 1995-09-20

Family

ID=14399416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59105139A Expired - Lifetime JPH0786969B2 (en) 1984-05-24 1984-05-24 Method of manufacturing magnetoresistive effect magnetic head

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133818A (en) * 1974-04-09 1975-10-23
JPS5758222A (en) * 1980-09-25 1982-04-07 Fujitsu Ltd Magnetic head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50133818A (en) * 1974-04-09 1975-10-23
JPS5758222A (en) * 1980-09-25 1982-04-07 Fujitsu Ltd Magnetic head

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Publication number Publication date
JPH0786969B2 (en) 1995-09-20

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