JPS60245480A - Belt for conveying electric charge - Google Patents

Abstract

PURPOSE:To improve the conductivity and durability by disposing fiber cord as reinforcing material on a sheet having the prescribed specific resistance value in the prescribed density in a belt longitudinal direction. CONSTITUTION:Fiber cord 3 having 0.3mm. or larger in diameter are disposed as reinforcing material in a density of 20-100 per 5cm of belt width in a belt longitudinal direction of cord diameter/cord interval ratio of 20/80-80/20 on a sheet of flexible organic polymer material mixed with conductive particles of 10<6>OMEGA-cm or lower or volumetric specific resistance value. Thus, the conductivity and the durability of the belt 1 for conveying charge can be improved.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a charge transport belt, and more particularly, it receives charges from a low voltage side by electrostatic induction and transports the charges by a conductor on a rotating disk to a high voltage side. Highly placed.

The present invention relates to a charge transporting belt with excellent conductivity and durability used in a rotating disc type high voltage generator that generates pressure.

[Prior art]

In the manufacturing process of large-scale integrated circuit (LSI) substrates,
An ion implanter is used to ionize and implant a small amount of impurity atoms into a semiconductor under high voltage.
is used, but as a power source for this type of device, there are Guar7 de Graaf type electrostatic generator, Berendt chain type electrostatic generator, Kotscroft-Walton type electrostatic generator,
An electrostatic generator such as a rotating disk type high voltage generator is used. Among these, a rotary high voltage generator is disclosed in Japanese Patent Application Laid-Open No. 57-40380, and is a small, high-performance electrostatic generator using a conductive charge transport belt. The reason why a conductive rubber belt is used in this high voltage generator is that it is light and has little vibration.The biggest advantage of the MyoS1 is that it is conductive and can carry charges. Therefore, it is possible to carry a large current, and the entire device can be housed in 5F6 (sulfur hexafluoride) gas, making it possible to make it smaller and lighter.

The present invention relates to a charge transport belt used in this rotating disk type high voltage generator.

Conventionally, this type of charge transport belt has been made by blending conductive particles such as carbon black with polyurethane and sorting the mixture. However, this belt is 4
Since it is in constant contact with a disk that rotates at a high speed of 0 m/sec or more, it tends to stretch, and it still has the disadvantage of breaking after about 50 to 100 hours of use.

[Purpose of the invention]

An object of the present invention is to provide a charge transport belt that has excellent conductivity and is extremely durable.

[Structure of the invention]

The structure of the present invention is that a flexible organic polymer material is blended with conductive particles to have a volume resistivity of 10'Ω or less, and a fiber cord with a diameter of 0.3 mvt or more is used as a reinforcing material. Belt width 5C'/rL density of 20 to 100 belts,
The gist of the present invention is a charge conveying belt arranged in the longitudinal direction of the belt with a cord diameter/cord gap ratio of 20/8° to 80/2°.

Hereinafter, the configuration of the present invention will be explained in more detail.

Organic polymer materials used in the belt of the present invention include natural rubber (NR) and styrene-butadiene rubber (SBR).
Rubbers such as , chloroprene rubber (CR), and nitrile butadiene rubber (NBR) can be used alone or in combination. Furthermore, thermoplastic elastomers such as polyester, polyurethane, and polyamide can also be preferably used. All of these polymer materials need to have flexibility.

As the conductive particles, conductive carbon blanks such as conductive furnace black and acetylene black, graphite, or metal particles such as silver, copper, nickel, and aluminum are used.

In the case of the present invention, it is necessary to make the volume (2) resistive value 10<6 >Ω-I or less by blending conductive particles into the polymer material. If the resistance value exceeds 106Ω-I, it becomes difficult for the high-voltage generator to transfer charges, resulting in a decrease in performance. In order to make this volume resistivity value more than 10'Ω, for example, add acetylene black to 100 parts by weight of the polymer material.
It is preferable to mix 5 parts by weight or more.

Organic fibers, metal fibers, and glass fibers can be used as reinforcing materials, but polyester,
Cords made of low-elongation, high-strength organic fibers such as aliphatic polyamides and aromatic polyamides are preferred from the viewpoint of fatigue resistance and adhesion to rubber.Among them, aromatic polyamides (for example, Kevlar, trade name) are preferred because they have low elongation and high strength. Therefore, it is particularly preferable.

The diameter of the fiber cord must be Q, 3 mm or more;
If it is less than 3 mm, the strength is insufficient and it cannot be used.

Q: If it is 3mm or more, there will be no problem in terms of strength, but if it is too thick, the cord spacing will be too narrow, so it is necessary to determine the cord diameter in relation to the cord spacing. Usually 1500D/2 (0.7mm) for polyester fibers, 840D/2 (0.55mm) for aliphatic polyamide fibers, 1
260 D/2 (0,67am), 1890])/
/2 (0,831 nm), 1890 D//3 (0
, 95 mm) (D: 7-toca is preferably used.

The fiber cord is embedded in a polymeric material by spirally winding a single cord loosely at regular intervals, or by making an endless process by butting the ends of a large number of cords together.

The embedding interval, that is, the density of the fiber cords, needs to be 20 to 100 fiber cords per 51 belt widths. If it is less than 20, the strength is insufficient, and if it exceeds 100, it becomes too dense and insulating, making it difficult to transfer charges. and preferably 3
0 to 50 lines, 15 cTL.

The ratio of the diameter of a cord to the distance between adjacent cords (cord diameter/cord gap ratio) must be 20/8° to 80/2°. If it is less than 207 B O, the strength in the longitudinal direction of the belt will be insufficient, and if it exceeds 80/2 O, the cord gap will become narrow and the conductivity will be insufficient.

In addition, the belt of the present invention may contain a plasticizer, a filler, a vulcanizing agent, a myelinating aid, and the like, if necessary.

Hereinafter, the effects of the present invention will be specifically explained with reference to Examples.

EXAMPLE Belt materials were manufactured using the blending ratios shown in Table 1. The volume resistivity of this blended material was 1.2 x 10<3> ohm-me.

Table 1 This belt material was wound onto a mandrel to a constant thickness, a predetermined number of fiber cords were wound thereon, and a second ply belt material sheet was laminated onto the cord. The fiber cord is “Kevlar” (product name) 1500D
/2, a cord diameter/cord gap ratio of 46154, a belt width of 5 cIn, and a density of 32 cords were arranged at equal intervals.

Next, after removing this sheet from the winding machine, it was vulcanized in a vulcanization mold and removed from the mandrel to obtain the charge transport belt shown in FIGS. 1 to 3.

FIG. 1 is a side view of the belt, and the belt 1 is stretched around a pulley 2. Figure 2 is a plan view of the belt;
The figure is a sectional view of the belt.

A reinforcing fiber cord 6 is embedded in the cross section of the belt 1.

This belt was attached to a rotating disc type high voltage generator and operated. The rotational speed of the disk was 40 m/sec or more, and a tension of about 50 m/c/c was applied to the belt, but the belt had a tensile strength of 150 m/c/c, which caused no problems. The Joule heat caused by the current flowing through the twisted belt is less than IW, and the heat generation is extremely small.
i It was able to withstand continuous operation for over 1000 hours.

[Brief explanation of drawings]

FIG. 1 is a side view of the charge transporting belt, FIG. 2 is a plan view of the belt, and FIG. 3 is a cross-sectional view taken along arrows 2--2 in FIG. 1...Belt, 2...Pulley, 6...Fiber cord. Agent: Patent Attorney Shin Ogawa − Patent Attorney Ken Noguchi Teru Patent Attorney Kazuhiko Saishita Figure 1 Figure 3

Claims (1)

[Claims] A sheet made by blending conductive particles into a flexible organic polymer material to have a volume resistivity of 108 Ω or less, and a fiber cord with a diameter Q of 3 mm or more as a reinforcing material is used as a belt width 5 cII.
A charge transport belt characterized in that the cords are arranged in the longitudinal direction at a density of 20 to 100 cords per L and at a cord diameter/cord gap ratio of 20/8o to 80/2o.