JPS60243811A - Manufacture of thin film magnetic head - Google Patents

Abstract

PURPOSE:To easily and surely fit a protective plate on a thin film magnetic head element in a short time, by forming the protective plate on a glass layer formed on the thin film magnetic head element. CONSTITUTION:A protective film 9' and fused protective film 9 are formed on a thin film magnetic head element 1 prepared by successively forming a magnetic thin film 3, conductive thin film 4, and insulating thin film 5 on a substrate 2. Then a glass layer 11'' is formed on the fused protective film 9 by heating and melting a glass bar 11' put on the film 9. Thereafter, the glass layer 11'' is made flat by lapping and a flat glass layer 11 having a desired thickness is formed. Finally, a protective plate 8 is pushed against the flat glass layer 11 and the glass layer 11 is melted by heating. Since such works as packing the protective plate 8 with glass, etc. are not required in this manufacturing process, the process can be simplified and the manufacturing time can be shortened. At the same time, since the formation of the fused glass layer, flattening of the glass layer, and fitting of the protective plate are made in different processes, sufficient allowances can be obtained in the working accuracy and the manufacturing process becomes easier.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a thin film magnetic head, and more particularly to the attachment of a retaining plate to a thin film magnetic head element.

BACKGROUND TECHNOLOGY AND PROBLEMS Conventionally, thin Km air heads have a substrate (2) as shown in Figure 4.
A thin film magnetic head consisting of a magnetic thin film (3), a conductive thin film (4) and an insulating thin film (5) on top - 810 on the element (1) side.
After forming a second grade insulating film (6) thickly and flattening its surface side, attach the protective plate (8) with an adhesive (7), or use the method shown in Fig. 5 or 6. As shown in the figure, the glass a is
The protective plate can be made by packing I or placing a protective plate (8) with a glass rod (10') inserted therein, and heating it in this state to melt the back glass glass G or the glass rod (10'). (8), but in the former case shown in Figure 4, the film forming equipment is expensive, and if there are few steps on the head element side, a high step of 10 μm or more may be required. In the case where the adhesive is held, there are drawbacks such as the need for a long time to form the film, and furthermore, there is a problem in terms of reliability since the abrasive plate is bonded with an adhesive.

On the other hand, in the latter case shown in Figures 5 and 6, when bonding the protective plate, the fused glass is flowed into the narrow space between the substrate and the protective plate, so the gas in that space cannot be drained or )
Since there are considerable steps in the RAD element, there are areas where the glass does not flow, creating glass bubble holes, which will be used a considerable number of times after polishing with tape P5.
This glass hole has drawbacks such as casting a shadow on the head and damaging the tape due to foreign matter entering it, and also poses a problem in terms of reliability in bonding the backing plate.

OBJECTS OF THE INVENTION In view of the above, the present invention provides a method for manufacturing a thin-film magnetic head that can easily and reliably attach a protective plate to a thin-film magnetic head element in a short period of time, thereby obtaining a highly reliable thin-film magnetic head. It is something to do.

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention forms a thin film magnetic head element made of a magnetic thin film, a conductive thin film, and an insulating thin film on a substrate, and forms a fusion protective layer on the thin film magnetic head element. A highly reliable thin-film magnetic head can be obtained by melting a glass layer through the glass layer to form a flat surface and then attaching a protective plate thereon.

Embodiments Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 3.

First, FIG. 1 shows a cross-sectional view of an example of a thin film magnetic head manufactured by the manufacturing method of the present invention.
), a thin film magnetic head element (1) formed of a magnetic thin film (3), a conductive thin film (4) and an insulating thin film (5) is coated with a glass layer Ql) via a protective film (9). The protective plate (8) is formed by bonding the protective plate (8) by melting the glass layer aυ.

Next, an example of the manufacturing process of the present invention will be explained with reference to FIGS. 2 and 3. First, a thin film magnetic head element (1) is formed as described above, and then an 8i02 film with a thickness of 0.2μ is formed as a protective film (9').
Formed over the entire surface with a thickness of m. Then, Ta2 was applied as a fusion bond i1j M (9) to the part where the protective plate (8) was to be joined.
0sjlK is formed to a thickness of 1βm by mask sputtering.

Next, as shown in FIG. 2, a glass rod (11') with a diameter of about 0.4 ml, for example, is placed on the fusion protection film (9), and this is heated and melted at about 650°C to form the fusion protection film (9). 9) Form glass N (11) 1: on top.

As shown in Fig. 3, the glass layer (X?) is flattened by two-pink, and the flat glass layer with a thickness of Wr is ttuv.
Form.

Then, a protective plate (8) made of ceramic or the like is pressed onto the flat glass layer (Ql) on the diameter of the bundle for approximately 500
By heating at .degree. C. to melt the flat glass layer (III), the protective plate (8) and the substrate (2) are fused together to form the thin film magnetic head shown in FIG.

Next, in the second embodiment, although not shown, a 5i02 film and a Cr film are successively formed by mask sputtering as the protective film (9') and fusion protection M (9) in the first embodiment.

Then, a mixture of glass powder and a solvent is coated onto this fused protective film to a thickness of about 20 μm by screen printing. After that, the glass powder is melted at about 600°C to form a glass layer, and a protective plate is pressed onto the glass layer at a predetermined position and heated at about 480°C to melt the glass layer, thereby forming a protective plate and a substrate. is melted to form a thin film magnetic head similar to the head shown in FIG.

In the above examples, the temperature conditions for heating and melting are as follows: the retaining plate fusion temperature is Ta, the glass layer forming temperature yTb, and the glass softness f.
lA Ill is TcJ--F insect Tc (Ta (Tb) relationship.

In addition, in the formation of the glass layer, Ta205, C
The flow of molten glass can be controlled almost completely by forming a film with good glass flow, such as r, and forming a film with poor glass flow, such as 8i02, in other parts. be able to.

In addition, Ta 205 film, Cr
By forming a film or the like, the molten glass is evenly distributed over the entire surface and fusion can be reliably performed.

As described above, in each of the embodiments, the fused glass layer of the protective plate is formed by melting glass on a flat surface, so it is formed without creating air bubbles, and the protective plate is reliably fused and has a smooth surface. Thin film magnetic heads with tape sliding behavior are preferred.

In addition, in each embodiment, the retaining plate and the glass layer may be bonded using an adhesive.

Effects of the Invention As described above, according to the present invention, a glass layer is formed with a flat surface on the side of a thin film magnetic head element formed on a substrate via a fused protective layer, and then a protective plate is attached thereon. Since the thin-film magnetic head is formed using a thin-film magnetic head, the glass layer to which the protective plate is attached is melt-formed in a flat state.This allows the glass layer to be formed and formed without creating air bubbles, and the protective plate can be reliably fused to ensure reliability. In addition, the tape sliding surface has less exposed glass layer and no air bubbles, which is advantageous in terms of MS wear, and it can be formed smoothly and has good head contact, so there is no risk of damaging the tape. A thin film magnetic head is obtained. Furthermore, in the manufacturing process, there is no need to perform processing such as packing the glass into the protective plate, which simplifies the process and shortens the time, as well as forming a fused glass layer and flattening the surface of the glass layer. Since adhering to the i* plate is a separate process, there is a margin for machining accuracy (which in turn has the effect of making manufacturing easier).

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of an example of a four-film magnetic head manufactured by the method of the present invention, FIGS. 2 and 3 are cross-sectional views showing steps of an example of the manufacturing method of the present invention, and FIG. 4 is a conventional thin-film magnetic head. FIGS. 5 and 6 are cross-sectional views showing a manufacturing state of a conventional thin-film magnetic head. In the figure, (1) is a thin film magnetic head element, (2) is a substrate, (8
) is a protective plate, (9) is a fused protective film, and aυ is a glass layer. Figure 3 Figure 4 Figure 5 θ Figure 6 122.

Claims (1)

[Claims] After forming a thin film magnetic head element consisting of a magnetic thin film, a conductive thin film, and an insulating thin film on a substrate, and forming a glass layer on the thin film magnetic head element side through a fusion protection layer by melting to have a flat surface, A method for manufacturing a thin film magnetic head, which is characterized in that a protective plate is adhered thereon.