JPS6024350U - 照射装置 - Google Patents

照射装置

Info

Publication number
JPS6024350U
JPS6024350U JP11466783U JP11466783U JPS6024350U JP S6024350 U JPS6024350 U JP S6024350U JP 11466783 U JP11466783 U JP 11466783U JP 11466783 U JP11466783 U JP 11466783U JP S6024350 U JPS6024350 U JP S6024350U
Authority
JP
Japan
Prior art keywords
irradiation device
irradiation
irradiated
motor
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11466783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638426Y2 (enExample
Inventor
村上　静雄
稲垣　始
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Priority to JP11466783U priority Critical patent/JPS6024350U/ja
Publication of JPS6024350U publication Critical patent/JPS6024350U/ja
Application granted granted Critical
Publication of JPS638426Y2 publication Critical patent/JPS638426Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP11466783U 1983-07-23 1983-07-23 照射装置 Granted JPS6024350U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11466783U JPS6024350U (ja) 1983-07-23 1983-07-23 照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11466783U JPS6024350U (ja) 1983-07-23 1983-07-23 照射装置

Publications (2)

Publication Number Publication Date
JPS6024350U true JPS6024350U (ja) 1985-02-19
JPS638426Y2 JPS638426Y2 (enExample) 1988-03-14

Family

ID=30264979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11466783U Granted JPS6024350U (ja) 1983-07-23 1983-07-23 照射装置

Country Status (1)

Country Link
JP (1) JPS6024350U (enExample)

Also Published As

Publication number Publication date
JPS638426Y2 (enExample) 1988-03-14

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