JPS60241055A - Device for opening and closing shutter - Google Patents

Abstract

PURPOSE:To prevent uneven printing by moving two light intercepting plates each fixed with two cylinders, respectively, always in the same direction, one later than the other by predetermined time duration, to open and close the upper part of the opening of the shutter, and controlling the shutter opening time to render the final time length of the exposure of a work to a luminous exposure flux constant. CONSTITUTION:The upper part of each of light intercepting plates 36, 37 is fixed with screws to one end of each of piston rods 34, 35 fitted into each of cylinders 21, 22, respectively, and each of the plates 36, 37 are arranged in parallel to the opening part 20 of the shutter. The plate 36 covering the part 20 is moved in the direction of the side 20b to fully open it, and passes the luminous flux through it to print the work. The other plate 37 staying on the side 20a is moved with an arithmetic unit to cover the part 20, and next, the plate 36 is moved on the right side, then the plate 37 is moved on the right side to return them to the initial state, thus opening and closing the opening part 20. Since the shutter is opened and closed in the same direction and the exposure time length is kept constantly, uneven printing can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a shutter for an exposure apparatus that prints a pattern on a mask onto a workpiece, and more particularly to a shutter opening/closing device for controlling the opening/closing time of the shutter.

Generally, in such a shutter opening/closing device, a single shielding plate moves back and forth over the opening of the shutter.
The pattern on the mask was printed onto the workpiece using a fixed exposure time.

However, in such a shutter opening/closing device, as shown in FIG. 1, the shielding plate 3 reciprocates over the opening 2 of the shutter 1 so as to completely shield and completely open, so there is no difference between opening and shielding. The operation is the opposite for opening 2. Therefore, the opening starting side 2a and the shielding starting side 2b of the opening 2
There is a problem in that the exposure time for the workpiece differs between the two methods, resulting in uneven printing.

The present invention has been made in view of the above problems, and includes:
The shielding plates attached to each cylinder are controlled to open and close over the shutter opening from the same direction over time, and the final exposure time to the workpiece by the exposure light beam is kept constant to prevent uneven printing. The present invention provides a shutter opening/closing device that does not require a conventional shutter.

Hereinafter, the present invention will be explained based on the drawings.

2 to 5 are diagrams illustrating the principle and first embodiment of the present invention.

As shown in the principle diagram of FIG. 2, 11 is an air pump, and a prime mover 12 is mechanically connected to this air pump 11. Also connected to this air pump 11 are solenoid-operated valves 18.19, which are switched by two solenoids 14.15 and 16.17, respectively, via lines 13. This solenoid operated valve 18.19 has cylinder 2.
1 and 22 are connected to each other via a conduit 13.

Further, the solenoids 14, 15, 16, and 17 are electrically connected to a central processing unit 23 (hereinafter referred to as CPU).

As shown in FIGS. 3 to 5, 10 is a shutter;
This shutter 10 is provided with an opening 20 for exposure. Further, the shank 10 is provided with an upper plate 10a and a side plate 10b so as to surround the opening 20.

One side 31a of a retaining plate 31 having a rectangular cross-section is fixed to the lower surface of the upper plate 10a on the enclosure side with bolts or the like along the longitudinal direction of the upper plate 10a, and the other side 31 of the retaining plate 31
b is suspended from the lower surface of the upper plate 10a. On both sides of the other side 31b of the former holding plate 31, a pair of guide members 32 having a U-shaped cross section are provided at symmetrical positions with respect to the longitudinal direction of the other side.
are provided with their backs touching each other. The guide member 32 has both ends 32a curved outward, and grips a support member to be described later.

One side 33a of a holding member 33 having a rectangular cross-section is fixed to the inner surface of the side plate 10b of the former shutter 10 along the longitudinal direction of the side plate 10b with a bolt or the like, and the other side 33b
is vertically provided to the side plate 10b. On the other side 3.1(b) of this holding member 33, one ends of cylinders 21.22, which stand approximately perpendicular to the side plate 10b and are spaced apart from each other by a certain distance, are fixed. 2
2 are located symmetrically and spaced apart from each other in parallel along the longitudinal direction of the other end 31b of the holding plate 31. Piston ronds 34.35 are installed inside each cylinder 21.22, and one end of each piston rond 34.35 is connected to the cylinder 21.2 by pneumatic energy press-fitted from a pipe.
2 protrudes reciprocably from the other end. The upper part of a shielding plate 36.37 is screwed to one end of the piston rond 34.35 so as to face the other side 31b of the retaining plate 31, and the lower part of the shielding plate 36.37 They are bent upward at approximately 45 degrees with respect to the upper portion so as to be parallel to the openings 20, respectively. A rectangular support member 38:39 is provided on the upper part of the shielding plate 36, 37 to support the other side 31b of the holding plate 31.
The support member 38. is attached symmetrically to the supporting member 38.
Projections 38a and 39a are provided on the upper and lower surfaces of 39.

Further, the supporting members 38, 39 and the protruding portion 38a.

39a are each slidably gripped within the guide member 32 so as to engage with the curved tip 32a of the guide member 32.

As described above, since the present invention is configured, when a switch (not shown) is pressed, the prime mover 12 is activated as shown in FIG. 2, receiving the mechanical energy of the prime mover 12, and the air pump 11 is converted into fluid energy of air under pressure. The pneumatic energy generated by this air pump is transmitted via line 13 to a solenoid-operated valve 18.19 which is switched by energizing solenoids 14.15 and 16.17. The switching of the solenoid operating valve 18.19 by the excitation of the solenoids 14.15 and 16.17 is performed by the CPU 23, which calculates a predetermined appropriate exposure time T as shown in the time chart of FIG. Output pulse signals t, ~t4 that excite each solenoid according to the exposure time T,
Controls the solenoid. That is, when the switch is pressed, the CPU 23 sends a pulse signal 1. to the solenoid 14. is output, and the solenoid 14 is energized. This energization of the solenoid 14 causes the solenoid operating valve 18 to open toward the solenoid 14, and the air pressure energy moves the piston rod 34 of the cylinder 21 in the direction A in FIG. 2 through the conduit 13. As a result of this operation, the shielding plate 36 that was covering the opening 20 of the shutter 10 moves to the shielding starting side 20b and fully opens the opening 20 to allow the exposure light beam to pass through. The pattern is burned onto the workpiece.

Next, the CPtJ23 outputs a pulse signal t2 to the solenoid 16 after the appropriate exposure time T has elapsed, and the solenoid 1
6 is excited. By energizing the solenoid 16, the solenoid operating valve 19 opens toward the solenoid 16, and the air pressure energy moves the piston rod 35 of the cylinder 22 in the direction of B in FIG. 2 through the conduit 13. By this operation, the shielding plate 37, which had been stopped at the opening end side 20a of the opening 20, moves above the opening 20, completely covers the opening 20, and stops. Therefore, the exposure light beam is blocked by the shielding plate 37, that is, the A direction and the B direction are the same direction.

Further, at this point, the CPU 23 is on standby until the switch is pressed, and patterns and workpieces can be exchanged during this time.

Next, when the switch is pressed, the CPU 23 outputs a pulse signal t3 to the solenoid 17 to excite the solenoid 17. By energizing the solenoid 17, the solenoid operating valve 19 opens toward the solenoid 17, and the pneumatic energy is transferred to the cylinder 2 through the pipe t3t-11.
The second piston rod 35 is moved in the direction C in FIG. This operation causes the shielding plate 3 that was covering the opening 20 to
7 moves to the aperture starting side 20b to fully open the aperture 20 and allows the exposure light flux to pass therethrough, so that the pattern on the mask is printed onto the workpiece by the exposure light flux. Next, CP
U23 outputs a pulse signal t4 to the solenoid 15 after the proper exposure time T has elapsed, and excites the solenoid 15. By energizing the solenoid 15, the solenoid operating valve 18 opens toward the solenoid 15, and the pneumatic energy is transferred to the piston rod 3 of the cylinder 21 through the conduit 13.
4 in the direction of FIG. 2. Through this operation, the shielding plate 36, which had been stopped on the shielding starting side 20b, moves above the opening 20 and stops completely covering the opening 20, that is, the C direction and the D direction are in the same direction. It is. Therefore, the exposure light beam is blocked again by the shielding plate 36. Also, at this point, the CPU 23 is on standby until the switch is pressed.

Therefore, the shutter opening/closing device can return to the initial state and repeat the above operations sequentially.In addition to the first embodiment, the present invention also provides a second embodiment of the shutter opening/closing device as shown in FIGS. 7 and 8. It can also be a device.

Reference numeral 40 denotes a shutter, and this shutter 40 is formed into a disk shape, and a plurality of openings 50 of the same shape are opened at a constant distance from the plate surface. The opening 50 is made by cutting two concentric circles at a predetermined radius, and the plate surface between the openings 50 forms a shielding portion 60.

A rotating shaft 41 is attached to the center of the shutter 40,
This rotating shaft 41 is connected to a pulse motor 4 via a reduction gear device 42.
Mechanically connected to 3. Further, the shutter 40
A detector 44 for detecting the rotation angle of the shutter 40 is provided near the shutter 40 . The pulse motor 43 and the detector 44 are electrically connected to the CPU 45, respectively.

Since the second embodiment of the present invention is configured as described above, when a switch (not shown) is pressed, the CPU 45 determines the predetermined appropriate exposure time, the separation angle between the openings 50, and the rotation of the shutter 40 detected by the detector. Based on the angle, a pulse signal is output to the pulse motor 43 to control the rotation speed of the pulse motor 43. The rotation of the pulse motor 43 causes the shutter 40 to rotate via the speed reduction device 42,
The opening 50 is centered at the exposure position of a workpiece (not shown). Next, after the proper exposure time has elapsed, the CPU 45 rotates the shutter in the same direction as the rotation of the shutter, completely covers the exposure position with the shielding part 60, and stops.

In addition, the CPU 45 waits until the next exposure starts.
is on standby. When the switch is pressed, the shutter opening/closing device can repeat the above operation.

Therefore, according to the present invention, in the first embodiment, since the two shielding plates attached to the two cylinders always open and close the openings from the same direction, the exposure irradiation time for the entire workpiece with the exposure light beam can be reduced. is always constant. Furthermore, in the second embodiment, the shutter is formed into a disk shape, and openings and shielding portions formed at the same distance from the center of the disk are provided alternately, and the shutter is rotated in the same direction. The exposure time of the entire workpiece by the light beam is always constant. Therefore, the first aspect of the present invention. The second embodiment is a shutter opening/closing device that can perform good exposure irradiation without causing uneven printing on a workpiece.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram of the operation of a conventional shutter opening/closing device;
The figure is a principle diagram of the first embodiment of the present invention, FIG. 3 is a front view of the main part of the first embodiment, FIG. 4 is a plan view of the main part, FIG. 5 is a side view of the main part, and FIG. is a time chart, FIG. 7 is a principle diagram of the second embodiment, and FIG. 8 is an explanatory diagram of the main parts. 10... Shutter 20... Opening 21.22.
...Cylinder 23...Central processing unit (CPU) 3
6.37...Shielding plate T...Appropriate exposure time Patent applicant Oak Manufacturing Co., Ltd. 1 Fang 5 Fig. Fang 6 Fig. Fang 7 Fig. Fang 8

Claims (1)

[Claims] In a shutter having an opening of an exposure device, two cylinders are provided in the main body of the shutter, a shielding plate is attached to each cylinder and moves back and forth over the opening, and an appropriate exposure time for the workpiece is calculated. and a central processing unit that sequentially controls opening and closing of the opening of the shutter from the same direction of the shielding plate based on the exposure time.