JPS60236443A - Electrostatic lens for charged particles - Google Patents
Electrostatic lens for charged particlesInfo
- Publication number
- JPS60236443A JPS60236443A JP59094104A JP9410484A JPS60236443A JP S60236443 A JPS60236443 A JP S60236443A JP 59094104 A JP59094104 A JP 59094104A JP 9410484 A JP9410484 A JP 9410484A JP S60236443 A JPS60236443 A JP S60236443A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- electrostatic lens
- charged particles
- cylindrical body
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 239000011810 insulating material Substances 0.000 claims abstract description 4
- 230000004075 alteration Effects 0.000 abstract description 3
- 238000010884 ion-beam technique Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 10
- 239000007789 gas Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005211 surface analysis Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明はＸ線光電子分光分析（ＢＳＣＡ）、オージェ電
子分光分析（ＡＫＳ）等の表面分析の際に適用される荷
電粒子用静電レンズに関する。Detailed Description of the Invention (a) Industrial Application Field The present invention relates to an electrostatic lens for charged particles that is applied in surface analysis such as X-ray photoelectron spectroscopy (BSCA) and Auger electron spectroscopy (AKS). Regarding.
（ロ）従来技術
一般に、ＥＳＣＡ、ＡＩ！：Ｓ等の表面分析には励起源
となる荷電粒子を試料に照射するため電子銃やイオン銃
が用いられる。このような電子銃やイオン銃には荷電粒
子のビームを収束するために静の静電レンズは、金属な
どでできた円筒電極の複数個を同軸的に配列してなる円
筒電極レンズが広く用いられている。この円筒電極レン
ズは、円筒電極と絶縁物の円筒とを交互に積層したり、
あるいは円筒電極の外周部の２，３か所に取付穴を設は
仁の取付穴にそれぞれ棒を通して各円筒電極を固定支持
するなどして製作されている。ところが、このようにし
て形成された円筒電極レンズでは加工９組立の面から各
円筒電極の中心を正確に位置合せすることが難かしく、
従って、レンズ電圧により焦点が中心軸上からはずれた
り、あるいは収差を大きくするなどの不具合を生じる。(b) Prior art Generally, ESCA, AI! :For surface analysis of S, etc., an electron gun or ion gun is used to irradiate the sample with charged particles that serve as an excitation source. In such electron guns and ion guns, a cylindrical electrode lens consisting of a plurality of cylindrical electrodes made of metal or the like coaxially arranged is widely used as a static electrostatic lens to focus a beam of charged particles. It is being This cylindrical electrode lens is made by laminating cylindrical electrodes and insulating cylinders alternately,
Alternatively, each cylindrical electrode is manufactured by providing mounting holes at two or three locations on the outer periphery of the cylindrical electrode, and inserting rods into the respective mounting holes to fixedly support each cylindrical electrode. However, in the cylindrical electrode lens formed in this way, it is difficult to accurately align the center of each cylindrical electrode from the viewpoint of processing and assembly.
Therefore, problems such as the focal point being deviated from the center axis due to the lens voltage or increased aberrations occur.
（ハ） 目的
本発明は従来のかかる問題点を解決し、レンズ電極の収
差が少なくレンズの軸合せが不要で、しかも取扱いや製
作の容易な荷電粒子用静電レンズを得ることを目的とす
る。(c) Purpose The present invention aims to solve the above-mentioned conventional problems, and to obtain an electrostatic lens for charged particles that has little aberration in the lens electrode, does not require lens alignment, and is easy to handle and manufacture. .
に）構成
本発明は上述の目的を達成するため、レンズ電の荷電粒
子静電レンズは、セラミック等の絶縁物でできた円筒体
を有し、この円筒体の内周面には、円筒体軸方向にわた
って複数のレンズ電極が所定の間隔を存して被覆形成さ
れていることを特徴としている。In order to achieve the above-mentioned object, the present invention has a cylindrical body made of an insulating material such as ceramic, and a cylindrical body is formed on the inner circumferential surface of the cylindrical body. It is characterized in that a plurality of lens electrodes are coated at predetermined intervals in the axial direction.
（ホ）実施例
以下、本発明を図面に示す一実施例に基づいて詳細に説
明する。(E) Example Hereinafter, the present invention will be explained in detail based on an example shown in the drawings.
第１図は本発明の荷電粒子用静電レンズを熱陰極形イオ
ン銃に適用した場合の一部切欠正面図である。同図にお
いて、符号１は熱陰極形イオン銃を示し、２はイオン化
室、４はイオン化、室２を形成するケース、６はイオン
化室２にアルゴンガス等のガスを導入するガス導入管、
８は熱電子を放出させるだめのフィラメント１０はフィ
ラメント８からの熱電子を加速してガスと衝突させてイ
オン化するだめのグリッド、１２は本発明の荷電粒子用
静電レンズ、１４はイオン化室２からのイオンを荷電粒
子用静電レンズ１２に導くためのイオン通過孔、１６は
フィラメント８．グリッド１０および荷電粒子用静電レ
ンズ１２にそれぞれ電圧、を印加するための入力端子、
１８は上記入力端子１６やガス導入管６を固定するため
の支持枠である。FIG. 1 is a partially cutaway front view of the electrostatic lens for charged particles of the present invention applied to a hot cathode type ion gun. In the figure, numeral 1 indicates a hot cathode type ion gun, 2 is an ionization chamber, 4 is a case forming the ionization chamber 2, 6 is a gas introduction pipe for introducing gas such as argon gas into the ionization chamber 2,
Reference numeral 8 denotes a filament 10 for emitting thermoelectrons, a grid for accelerating the thermoelectrons from the filament 8 and colliding with gas to ionize them, 12 an electrostatic lens for charged particles of the present invention, and 14 an ionization chamber 2. An ion passage hole 16 is for guiding ions from the filament 8 to the electrostatic lens 12 for charged particles. an input terminal for applying a voltage to the grid 10 and the charged particle electrostatic lens 12, respectively;
18 is a support frame for fixing the input terminal 16 and the gas introduction pipe 6.
上記荷電粒子用静電レンズ１２は、第２図に示すように
、セラミ□ツク等の絶縁物でできた円筒体２０を有し、
この円筒体２０の上部外周にねじ部２２が設けられ、ま
た円筒体２０の内周面には円筒体軸方向にわたって複数
（本例では３つ）のビンズ電極２４８５〜２４Ｃが所定
の間隔を存して被覆形成されている。これらの各レンズ
電極２４ａ〜２４Ｃはたとえば導電性物質を塗布あるい
は蒸着することにより形成される。さらに、円筒体２０
には各レンズ電極２４ａ〜２４Ｇに対応して、円筒体２
０の内外を貫通するねじ穴２′６が設けられ、このねじ
穴２６にも導電性物質が塗布あるいは蒸着されている。As shown in FIG. 2, the electrostatic lens 12 for charged particles has a cylindrical body 20 made of an insulating material such as ceramic,
A threaded portion 22 is provided on the upper outer periphery of the cylindrical body 20, and a plurality of (three in this example) pin electrodes 2485 to 24C are provided at predetermined intervals on the inner circumferential surface of the cylindrical body 20 in the axial direction of the cylindrical body. A coating is formed. Each of these lens electrodes 24a to 24C is formed, for example, by coating or vapor depositing a conductive material. Furthermore, the cylindrical body 20
The cylindrical body 2 corresponds to each lens electrode 24a to 24G.
A screw hole 2'6 passing through the inside and outside of the screw hole 26 is provided, and a conductive material is also coated or vapor deposited on this screw hole 26.
また、各レンズ電極２４ａ〜２４０の間隙２８には電荷
が蓄積しないようにカーボン等の高抵抗物質が塗布され
ている。Further, a high-resistance material such as carbon is applied to the gaps 28 between each of the lens electrodes 24a to 240 to prevent charge from accumulating.
従って、荷電粒子用静電レンズ１２の取付けに際しては
そのねじ部２２をケース４の下部にねじ込み、次いで入
力端子１６に接続されたリード線３０の一端を円筒体２
０の外周部にねじ穴２６にねじ３２を螺合することによ
り固定する。これにより入力端子１６．リード線３０．
ねじ３２を介して各レンズ電極２４ａ〜２４Ｃに所定の
電圧を加えることができるのでイオン化室２から放出さ
れたイオンビームは各レンズ電極２４ａ〜２４Ｃによっ
て収束される。Therefore, when installing the electrostatic lens 12 for charged particles, screw the threaded part 22 into the lower part of the case 4, and then connect one end of the lead wire 30 connected to the input terminal 16 to the cylindrical body 2.
0 by screwing the screw 32 into the screw hole 26. This allows input terminal 16. Lead wire 30.
Since a predetermined voltage can be applied to each lens electrode 24a-24C via the screw 32, the ion beam emitted from the ionization chamber 2 is focused by each lens electrode 24a-24C.
なお、第３図および第４図に示すように、第２図の荷電
粒子用静電レンズ１２の円筒体２０下端部を延設して、
その延設部内面に偏向電極３４゜３６を設ければ、ビー
ム走査用のデフレクタをも一体化した電子銃やイオン銃
を形成することが可能となる。また、上記実施例では熱
陰極形イオン銃に適用した場合について説明したが、こ
れに限定されるものではないのは勿論である。As shown in FIGS. 3 and 4, the lower end of the cylindrical body 20 of the electrostatic lens 12 for charged particles shown in FIG. 2 is extended,
By providing deflection electrodes 34 and 36 on the inner surface of the extended portion, it becomes possible to form an electron gun or ion gun that also integrates a deflector for beam scanning. Further, in the above embodiment, the case where the present invention is applied to a hot cathode type ion gun has been described, but it is needless to say that the present invention is not limited to this.
（へ）効果
以上のように本発明によれば、レンズ電極を−Ｉ−ｊ４
＋−□□＋−ノ□□倉＋Ｉ−１，−□」−嚢合せも不要
な高精度のレンズが得られる。しかも、構造簡単で、製
作も容易であり、電子銃やイオン銃へ取付やすく、全体
をコンパクト化できるなどの優れた効果が得られる。(f) Effect As described above, according to the present invention, the lens electrode is -I-j4
+-□□+-ノ□□kura+I-1,-□" - A high-precision lens that does not require capsular alignment can be obtained. Moreover, it has a simple structure, is easy to manufacture, is easy to attach to an electron gun or an ion gun, and has excellent effects such as being able to make the whole compact.
図面は本発明の一実施例を示し、第１図は熱陰極形イオ
ン銃を一部切欠いて示す正面図、第２図は荷電粒子用静
電レンズを一部切欠いて示す正面図、第３図は本発明の
応用例を示す一部切欠正面図、第４図は第３図のＩＶ−
ＩＶ線に沿う断面図である。
１２・・荷電粒子用静電レンズ、２０・・円筒体、２４
ａ〜２゛４Ｃ・・レンズ電極。
出 願 人 株式会社島津製作所
代 理 人 弁理士岡田和秀
第１図
１
第２図
２
第３図 第４図The drawings show an embodiment of the present invention; FIG. 1 is a partially cut-away front view of a hot cathode ion gun, FIG. 2 is a partially cut-away front view of an electrostatic lens for charged particles, and FIG. The figure is a partially cutaway front view showing an application example of the present invention, and Figure 4 is IV-- of Figure 3.
FIG. 3 is a cross-sectional view taken along line IV. 12... Electrostatic lens for charged particles, 20... Cylindrical body, 24
a~2゛4C...Lens electrode. Applicant Shimadzu Corporation Agent Kazuhide Okada Patent Attorney Figure 1 Figure 2 2 Figure 3 Figure 4
Claims (1)
この円筒体の内周面には円筒体軸方向にわたって複数の
レンズ電極が所定の間隔を存して被覆形成されているこ
とを特徴とする荷電粒子用静電レンズ。fil It has a cylindrical body made of an insulating material such as ceramic,
An electrostatic lens for charged particles, characterized in that the inner circumferential surface of the cylindrical body is coated with a plurality of lens electrodes at predetermined intervals in the axial direction of the cylindrical body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59094104A JPS60236443A (en) | 1984-05-10 | 1984-05-10 | Electrostatic lens for charged particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59094104A JPS60236443A (en) | 1984-05-10 | 1984-05-10 | Electrostatic lens for charged particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60236443A true JPS60236443A (en) | 1985-11-25 |
Family
ID=14101130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59094104A Pending JPS60236443A (en) | 1984-05-10 | 1984-05-10 | Electrostatic lens for charged particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60236443A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6481151A (en) * | 1987-09-22 | 1989-03-27 | Meitec Corp | Electrostatic type charged particle beam deflecting converging device |
| JPH02230647A (en) * | 1989-01-24 | 1990-09-13 | Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh | Multi-position device and its manufacture |
| FR2660485A1 (en) * | 1990-03-30 | 1991-10-04 | Orsay Physics | DEVICE FOR FOCUSING A BEAM OF CHARGED PARTICLES. |
| US5444256A (en) * | 1992-12-17 | 1995-08-22 | Kabushiki Kaisha Toshiba | Electrostatic lens and method for producing the same |
| JP2003028999A (en) * | 2001-07-11 | 2003-01-29 | Ebara Corp | Charged particle beam controller, charged particle beam optical device using the same, charge particle beam defect inspection device and control method for charged particle beam |
| WO2003107383A1 (en) * | 2002-06-13 | 2003-12-24 | Okumura Katsuya | Electronic optical lens barrel and production method therefor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364459A (en) * | 1976-11-22 | 1978-06-08 | Matsushita Electric Ind Co Ltd | Manufacture of focus lens |
| JPS57113543A (en) * | 1981-01-07 | 1982-07-15 | Hitachi Ltd | Image pickup tube |
-
1984
- 1984-05-10 JP JP59094104A patent/JPS60236443A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364459A (en) * | 1976-11-22 | 1978-06-08 | Matsushita Electric Ind Co Ltd | Manufacture of focus lens |
| JPS57113543A (en) * | 1981-01-07 | 1982-07-15 | Hitachi Ltd | Image pickup tube |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6481151A (en) * | 1987-09-22 | 1989-03-27 | Meitec Corp | Electrostatic type charged particle beam deflecting converging device |
| JPH02230647A (en) * | 1989-01-24 | 1990-09-13 | Ict Integrated Circuit Testing G Fur Halbleiterprueftechnik Mbh | Multi-position device and its manufacture |
| FR2660485A1 (en) * | 1990-03-30 | 1991-10-04 | Orsay Physics | DEVICE FOR FOCUSING A BEAM OF CHARGED PARTICLES. |
| US5444256A (en) * | 1992-12-17 | 1995-08-22 | Kabushiki Kaisha Toshiba | Electrostatic lens and method for producing the same |
| JP2003028999A (en) * | 2001-07-11 | 2003-01-29 | Ebara Corp | Charged particle beam controller, charged particle beam optical device using the same, charge particle beam defect inspection device and control method for charged particle beam |
| WO2003107383A1 (en) * | 2002-06-13 | 2003-12-24 | Okumura Katsuya | Electronic optical lens barrel and production method therefor |
| US7193221B2 (en) | 2002-06-13 | 2007-03-20 | Toudai Tlo, Ltd. | Electronic optical lens barrel and production method therefor |
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