JPS60229283A - Processing of magnetic head slider groove - Google Patents

Abstract

PURPOSE:To work uniformly a groove depth by disposing a prescribed mask on the surface to be processed of a head slider material, projecting a laser beam so that a scanning speed of a mask opening can be constant, and working a groove. CONSTITUTION:A magnetic head slider material 52 is put into an etching solution 53, while a stainless steel mask 55 having anti-corrosion against the etching solution 53 is placed on a surface to be processed. An overshot extent l of a beam scanning distance is set larger than a distance corresponding to a speed- reducing process of the scanning speed. When laser beams are scanned in this condition, the scanning speed of an opening of the mask 55 is kept constant, and the density of beam energy can be also made constant accordingly. As a result, a quadrangular groove end at the left side is not deeply worked, and the groove depth can be uniformly worked, thereby a slider excellent in floating characteristic is obtained.

Description

[Detailed description of the invention]

(Industrial Application Field) The present invention relates to grooving of hard materials, and more specifically to grooving of magnetic helide sliders. (Problems with the prior art) In a magnetic disk drive, due to the magnetic field floating above the magnetic disk surface, the levitation type of Toss 2 Ida has a magnetic disk slider that comes into contact with the magnetic disk surface when the magnetic disk starts and stops rotating. A contact-start-stop method is adopted in which the product slides. For this reason, a highly hard and layer-resistant material such as Atumlna-Tic ceramic is used as the magnetic slider material. Atum
lna-Tic ceramic has a Vickers hardness of 2
Atutnina-Tic ceramic is a very hard material, and it is difficult to machine minute square grooves in Atutnina-Tic ceramic using ordinary mechanical processing methods. Atamin
a-Tic ceramic, rinsing, tinging solution (KOH solution)
Atumina-T
It was reported by Gutfeld et al. that it is possible to process grooves by promoting IC machining and ching (Appt, Phys, Lett, 40).
(4) P2S5-354). FIG. 1 is a diagram showing an example of a tosslider ILK type magnet. In FIG. 1, 11 and 12 are slider surfaces, and 13 is a rectangular machined groove. Atumlna, a magnetic helad slider material
- Tic ceramic is machined and immersed in a quenching solution (KOH solution), and the laser beam scanning trajectory 23 shown by the dotted line in Fig. 2
A square groove was machined on the tosslider while scanning the laser beam as shown in Figure 3.As shown in the cross-sectional view of the machined groove, the groove end 8 (@U) was deeper (2~3 mm) than the other end. It turned out that it was processed. This deep-groove type unrestricted magnetism impairs the floating characteristics of the toss slider, and is not fully satisfactory as a machined groove for a head slider. (Objective of the Invention) An object of the present invention is to eliminate such conventional drawbacks and provide a processing method that can uniformly process the depth of the rectangular groove of a magnetic toss slider. (Structure of the Invention) According to the present invention, there is provided a method of magnetically processing a tosslider material by dipping it in an etching solution and irradiating it with an energy beam, which includes an opening in the shape of a desired processing groove, and which is etched in the etching solution. In contrast, a corrosion-resistant mask is placed on the surface to be machined of the head slider material, and the slider groove is machined by irradiating the energy beam in a scanning manner so that the scanning speed at the opening of the mask is constant. A method for machining a magnetic rad slider groove with a t-% characteristic is obtained. (Operation and principle of the present invention) Output W (Watt), Spot diameter d

The energy beam of [0] is the total speed v of the workpiece surface of the magnetic Rad slider material
The energy density E on the beam spot scanning center line on the surface to be processed during scanning at Ctm/-== is expressed by equation (1). FIG. 4 is a graph showing the scanning speed of the energy beam in the vicinity of the square groove end B (FIG. 3) when the energy beam is scanned as shown in FIG. 2. Since the energy beam is performing a turning motion at the end of the square groove, it repeatedly decelerates, stops, and accelerates. That is, as shown in FIG. 4, the energy beam scanning speed Ma decreases at the end of the square groove B, and the beam energy density E shown in equation (1) increases in inverse proportion to the scanning speed Ma. For this reason, a large amount of energy is irradiated to the ends of the square grooves, which promotes machining and chiming to a greater extent than other parts, resulting in deeper machining. Next, the method according to the present invention, that is, immersing the magnetic slider material in an etching solution for the slider material, and applying a mask having openings in the desired groove shape and corrosion resistant to the etching solution. fart. A method of machining a slider groove by placing the slider material on the surface to be processed and irradiating the area including the opening of the mask with an energy beam while scanning the entire area will be described. In this case, the overshoot amount t of the energy beam scanning distance at the end of the square groove is reduced to a distance U (
(Fig. 4) By setting K to a larger value, the beam scanning speed at the ends of the square groove becomes the same constant speed as at other parts, and therefore the beam energy density also becomes the same. By using a mask that is resistant to corrosion by the etching solution, the mask can block the energy beam irradiated outside the mask opening without being processed. It becomes possible to perform processing. This solves the conventional drawback that the square groove ends of the magnetic herad slider are machined deeply. (Embodiments) Hereinafter, embodiments of the present invention will be described in detail with reference to all the drawings. FIG. 5 is a cross-sectional view showing one embodiment of the present invention, in which a slider material (for example, Atumina-Tic ceramic) 52 is applied to the magnetic field placed on a sample stage 51, and a tinde liquid (for example, KOH aqueous solution; 20mot/1 ) 53 is placed in a container 54 containing a toslider material (Atu
A stainless steel mask (thickness: 0.05 mm) 55 having a rectangular opening (length: 37 mm, width: 2.01 nm) corresponding to the surface to be processed of the mlna-Tic ceramic material (R) 52 was placed, and argon gas was applied to the mask. The laser beam (output 1.Owatt) 56 is scanned (scanning speed 5/5ee) to the stainless steel mask 55 and the magnetic field. An argon laser beam is irradiated onto the surface of the toss 2 material 52 to be processed. FIG. 6 shows a laser beam scanning locus 61 in this embodiment. In addition, in FIG. 6, 62 is a stainless steel mask, 63.
64 indicates a magnetic multi-slider material. (Effects of the invention) In this embodiment, by setting the laser beam scanning distance overshoot amount tt=1m (t>U-0,5m: U is the distance at which the scanning speed is decelerated), the stainless steel mask The laser beam scanning speed at the aperture 62 is kept constant (
It can be set as Mar5ho/see). The stainless steel mask 52 exhibits corrosion resistance to KOH water bath liquid and cuts off the argon laser beam tm irradiated outside the range of the mask opening.
C) A required rectangular groove can be machined on the machined surface of 63. The horizontal feed pitch of laser beam scanning is 5μ.
As a result of machining under the conditions described above, it was possible to machine a rectangular, uniform-depth groove (depth: 4 μm) of 57't. The levitation characteristics of the magnetic herad slider processed with grooves according to this example were excellent, and it was possible to stably levitate it over the magnetic disk surface up to a minute gap of 0.15 μm. As explained above, a magnetic rad slider material is immersed in an etching solution for the head slider material, and a mask having openings in the desired groove shape and corrosion resistant to the etching solution is applied to the head slider material. The head slider grooves are machined while scanningly irradiating the energy beam so that the energy beam scanning speed at the mask opening becomes constant. It has the advantage of being able to process to a uniform depth. In one embodiment of the present invention, an argon laser was used as the energy beam, but carbon dioxide laser, YA
G laser, infrared rays, etc. may also be used.

[Brief explanation of drawings]

Figure 1 shows an overview of an example of a magnetic herad slider.
Fig. 2 is a plan view showing the laser beam scanning locus in the conventional processing method, Fig. 3 is a sectional view showing the groove shape of the magnetic Radoslider when processed by the conventional processing method,
FIG. 4 is a graph showing the scanning speed of the laser beam near the end of the square groove, and FIG. 5 is a graph showing the scanning speed of the laser beam near the end of the square groove. FIG. 6 is a cross-sectional view showing a groove processing method for a magnetic herad slider according to an embodiment, and FIG. 6 is a plan view showing a laser beam scanning locus according to an embodiment of the present invention. In the drawings, 11, 12, 21, 22,
63° and 64 are magnetic, toslider surface, 13.57 is a processing groove, 23.61 is a laser beam scanning trajectory, 51 is a sample stage, 52 is a magnetic helad slider material, 53 is an etching liquid,
54 is a container, 55 and 62 are stainless steel masks, 56 is an argon laser beam, and 57 is a processing groove. 72Figure 1 Figure 3

Claims (1)

[Claims] In a method of magnetically processing a toslider material by immersing it in a tinda liquid and irradiating it with an energy beam, the toslider material has an opening in the desired groove shape on the workpiece surface,
A mask that is resistant to corrosion by the etching solution is placed on the surface of the workpiece of the RAD slider material, and the energy beam is irradiated in a scanning manner so that the energy beam scanning speed at the opening of the mask is constant. A method of machining a head slider groove in a magnetic head, characterized by machining a head slider groove.