JPS6022239U - Ｘｙステ−ジ - Google Patents

Ｘｙステ−ジ

Info

Publication number
JPS6022239U
JPS6022239U JP11595883U JP11595883U JPS6022239U JP S6022239 U JPS6022239 U JP S6022239U JP 11595883 U JP11595883 U JP 11595883U JP 11595883 U JP11595883 U JP 11595883U JP S6022239 U JPS6022239 U JP S6022239U
Authority
JP
Japan
Prior art keywords
stage
static pressure
horizontally movable
pressure air
movable guides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11595883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6342997Y2 (enrdf_load_stackoverflow
Inventor
定夫 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP11595883U priority Critical patent/JPS6022239U/ja
Publication of JPS6022239U publication Critical patent/JPS6022239U/ja
Application granted granted Critical
Publication of JPS6342997Y2 publication Critical patent/JPS6342997Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP11595883U 1983-07-25 1983-07-25 Ｘｙステ−ジ Granted JPS6022239U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11595883U JPS6022239U (ja) 1983-07-25 1983-07-25 Ｘｙステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11595883U JPS6022239U (ja) 1983-07-25 1983-07-25 Ｘｙステ−ジ

Publications (2)

Publication Number Publication Date
JPS6022239U true JPS6022239U (ja) 1985-02-15
JPS6342997Y2 JPS6342997Y2 (enrdf_load_stackoverflow) 1988-11-10

Family

ID=30267499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11595883U Granted JPS6022239U (ja) 1983-07-25 1983-07-25 Ｘｙステ−ジ

Country Status (1)

Country Link
JP (1) JPS6022239U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268293A (ja) * 2004-03-16 2005-09-29 Psc Kk 微小移動機構
JP2006309654A (ja) * 2005-05-02 2006-11-09 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529186A (en) * 1975-07-14 1977-01-24 Hitachi Ltd Machine tool
JPS5642831U (enrdf_load_stackoverflow) * 1979-09-12 1981-04-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529186A (en) * 1975-07-14 1977-01-24 Hitachi Ltd Machine tool
JPS5642831U (enrdf_load_stackoverflow) * 1979-09-12 1981-04-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005268293A (ja) * 2004-03-16 2005-09-29 Psc Kk 微小移動機構
JP2006309654A (ja) * 2005-05-02 2006-11-09 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ

Also Published As

Publication number Publication date
JPS6342997Y2 (enrdf_load_stackoverflow) 1988-11-10

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