JPS60216183A - 排塵ダクトを有するライニング装置 - Google Patents
排塵ダクトを有するライニング装置Info
- Publication number
- JPS60216183A JPS60216183A JP25599184A JP25599184A JPS60216183A JP S60216183 A JPS60216183 A JP S60216183A JP 25599184 A JP25599184 A JP 25599184A JP 25599184 A JP25599184 A JP 25599184A JP S60216183 A JPS60216183 A JP S60216183A
- Authority
- JP
- Japan
- Prior art keywords
- trunk
- pipe
- furnace
- exhaust duct
- dust exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25599184A JPS60216183A (ja) | 1984-12-03 | 1984-12-03 | 排塵ダクトを有するライニング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25599184A JPS60216183A (ja) | 1984-12-03 | 1984-12-03 | 排塵ダクトを有するライニング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60216183A true JPS60216183A (ja) | 1985-10-29 |
| JPS622236B2 JPS622236B2 (enrdf_load_stackoverflow) | 1987-01-19 |
Family
ID=17286378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25599184A Granted JPS60216183A (ja) | 1984-12-03 | 1984-12-03 | 排塵ダクトを有するライニング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60216183A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63215036A (ja) * | 1987-03-04 | 1988-09-07 | Hitachi Ltd | 化合物半導体成長装置および成長方法 |
-
1984
- 1984-12-03 JP JP25599184A patent/JPS60216183A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS622236B2 (enrdf_load_stackoverflow) | 1987-01-19 |
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