JPS60212019A - Surface acoustic wave device - Google Patents

Surface acoustic wave device

Info

Publication number
JPS60212019A
JPS60212019A JP6881684A JP6881684A JPS60212019A JP S60212019 A JPS60212019 A JP S60212019A JP 6881684 A JP6881684 A JP 6881684A JP 6881684 A JP6881684 A JP 6881684A JP S60212019 A JPS60212019 A JP S60212019A
Authority
JP
Japan
Prior art keywords
surface wave
niobium oxide
ripple
substrate
group delay
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6881684A
Other languages
Japanese (ja)
Other versions
JPH0510844B2 (en
Inventor
Michio Kadota
道雄 門田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP6881684A priority Critical patent/JPS60212019A/en
Publication of JPS60212019A publication Critical patent/JPS60212019A/en
Publication of JPH0510844B2 publication Critical patent/JPH0510844B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects

Abstract

PURPOSE:To decrease remarkably a ripple of a group delay characteristic and a ripple of a frequency characteristic by using an absorbing member being a mixture of niobium oxide powder to a silicone group resin so as to improve the suppressing effect of an unnecessary surface wave. CONSTITUTION:Absorbing members 4, 5 are provided by screen print to a region to absorb the unnecessary surface wave on the surface wave substrate 1, e.g., between input/output electrodes 2, 3 and each substrate edge. The absorbing members 4, 5 are constituted with the silicone group resin, e.g., a material mixing niobium oxide (NbO, Nb2O3 or Nb2O5) powder to the silicone rubber, preferably in the weight ratio of 5:1-1:1 of the silicone rubber and the niobium oxide powder. The group delay characteristic suppresses the ripple to a small value <=100ns.

Description

【発明の詳細な説明】 本発明は、表面波デバイスに関し、特に、不要な表面波
をダンピングするための吸収材の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to surface wave devices, and more particularly to improvements in absorbers for damping unwanted surface waves.

一般に、表面波デバイスは、圧電性基板上にインターデ
ィジタルトランスジューサを形成し、このトランスジュ
ーサによって表面波を励振または受振するように構成さ
れ、例えば、表面波フィルタの場合には、入力(励振)
用トランスジューサと出力(受信)用トランスジューサ
とがt当量隔隔てて配置されている。このような表面波
フィルタにおいては、入力側トランスジューサで励振さ
れる表面波は2方向へ伝播し、そのうち一方向への表面
波は出力側トランスジューサへ伝播し、半分の表面波は
出力側トランスジューサでとり出されるが、残りの表面
波は通過し、基板端面で不要波として反射してくる。ま
た、他方向へ伝播する表面波も基板の端面で反射して不
要波となり、出力側トランスジューサで不要信号として
取り出される。これらの端面での反射、またはトランス
ジューサ電極での反射は周波数特性のりップルやグルー
プディレーのリップルとしてあられれてくるが、周波数
特性蒋よりグループディレーのリップルの方が顕著にあ
られれるので、本明細書において)まグループディレー
の評価結果を示している。
In general, a surface wave device is configured to form an interdigital transducer on a piezoelectric substrate and to excite or receive surface waves with this transducer. For example, in the case of a surface wave filter, an input (excitation)
The transmission transducer and the output (reception) transducer are spaced apart by t equivalents. In such a surface wave filter, the surface waves excited by the input transducer propagate in two directions, of which the surface waves in one direction propagate to the output transducer, and half of the surface waves are picked up by the output transducer. However, the remaining surface waves pass through and are reflected as unnecessary waves at the edge of the substrate. Furthermore, the surface waves propagating in the other direction are also reflected by the end face of the substrate and become unnecessary waves, which are extracted as unnecessary signals by the output side transducer. Reflections at these end faces or transducer electrodes appear as frequency characteristic ripples or group delay ripples, but since group delay ripples are more noticeable than frequency characteristic ripples, this specification will focus on them. ) shows the evaluation results of group delay.

このような不要な表面波をダンピングさせるために、従
来では、入出力用トランスジューサの外側の基板上に、
シリコンゴムあるいはエポキシ系接着剤等からなる吸収
材が塗布または印刷されている。しかし、このようにシ
リコンゴムやエポキシ系接着剤を印刷した場合、不要信
号の抑圧特に周波数特性の頭部やグループディレー特性
のりップルを抑圧するにはいまだ不十分であった。例え
ば、表面波基板上にシリコンゴムを印刷した場合には、
第2図(C)に示すように、グループディレー特性(G
DT)に1@s以上のリップルが生じている。
In order to dampen such unnecessary surface waves, conventionally, on the substrate outside the input/output transducer,
An absorbent material made of silicone rubber or epoxy adhesive is coated or printed. However, when silicone rubber or epoxy adhesive is printed in this way, it is still insufficient to suppress unnecessary signals, particularly ripples in the head of frequency characteristics and group delay characteristics. For example, if silicone rubber is printed on a surface wave substrate,
As shown in Figure 2 (C), the group delay characteristic (G
DT) has a ripple of 1@s or more.

本発明は、上述した従来の欠点を除去したもので、不要
な表面波の抑圧、特に、周波数特性のリップルやグルー
プディレー特性のリップルを十分小さくできる表面波装
置を提供することを目的とし、その要旨は、表面波基板
上であって、不要な表面波を吸収するための領域に、シ
リコーン系接着剤に酸化ニオブ粉末を混合した吸収材が
設けられたことにある。
The present invention eliminates the above-mentioned conventional drawbacks, and aims to provide a surface acoustic wave device that can suppress unnecessary surface waves, in particular, sufficiently reduce ripples in frequency characteristics and ripples in group delay characteristics. The gist is that an absorbing material made of silicone adhesive mixed with niobium oxide powder is provided on the surface wave substrate in a region for absorbing unnecessary surface waves.

以下、本発明の一実施例を図面を参照しつつ詳述する。Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

第1図において、1は表面波基板で、P Z T tラ
ミックス、単結晶、ガラス基板上のZnO膜などで構成
され、この表面波基板1上に、入力側インターディジタ
ル電極2と出力側インターディジタル電極3とが適当間
隔あけて形成されている。
In FIG. 1, numeral 1 denotes a surface wave substrate, which is composed of PZT lamics, single crystal, ZnO film on a glass substrate, etc. On this surface wave substrate 1, there are interdigital electrodes 2 on the input side and Interdigital electrodes 3 are formed at appropriate intervals.

この表面波基板1上であって、不要な表面波を吸収する
ための領域、例えば、入出力電極2.3と各基板端縁と
の間に、それぞれ吸収材4.5がスクリーン印刷などに
より設けられている。これらの吸収材4.5は、シリコ
ーン系樹脂例えばシリコーンゴムに酸化ニオブ(Nb 
O,Nb 203またはNb2O5など)粉末を混合し
た材料で構成 ゛され、好ましくは、シリコーンゴムと
酸化ニオブ粉末が重量比で5:1ないし1:1の割合で
混合された材料である。例えば、ガラス基板上のznO
膜からなる表面波基板を用いてテレビ受像機のVIFフ
ィルタを構成し、重量比で、シリコーンゴム:ニオブ粉
末=5:1の吸収材料と、シリコーンゴム:ニオブ粉末
=1:1の吸収材料をそれぞれスクリーン印刷した場合
、グループディレー特性は第2図(a )、(b)に示
すようになった。
On this surface wave substrate 1, an absorbing material 4.5 is formed by screen printing or the like in a region for absorbing unnecessary surface waves, for example, between the input/output electrode 2.3 and the edge of each substrate. It is provided. These absorbers 4.5 are silicone resins such as silicone rubber and niobium oxide (Nb
The material is preferably a mixture of silicone rubber and niobium oxide powder in a weight ratio of 5:1 to 1:1. For example, znO on a glass substrate
A VIF filter for a television receiver is constructed using a surface wave substrate made of a film, and the absorption material has a weight ratio of silicone rubber:niobium powder=5:1 and silicone rubber:niobium powder=1:1. When screen printing was performed, the group delay characteristics became as shown in FIGS. 2(a) and 2(b).

同図から明らかなように、リップルを10Dos以下に
小さく抑えることができた。そして、重量比5:1より
も酸化ニオブ粉末を少なくした場合にはリップル抑圧の
効果が小さくなり、また、重量比1:1を越えて酸化ニ
オブ粉末を多量に混合すると、材料の粘度が大きくなり
過ぎてスクリーン印刷が困難になり、量産性にとほしく
、実用上問題であつ lご 。
As is clear from the figure, the ripple could be suppressed to 10 Dos or less. If the weight ratio of niobium oxide powder is less than 5:1, the ripple suppression effect will be reduced, and if the weight ratio exceeds 1:1 and a large amount of niobium oxide powder is mixed, the viscosity of the material will increase. This would make screen printing difficult, and would be a practical problem for mass production.

本発明は、以上説明したように、シリコーン系樹脂に酸
化ニオブ粉末を混合した吸収材を用いるようにしている
ので、不要な表面波の抑圧効果が大ぎく、特に、グルー
プディレー特性のリップルならびに周波数特性のリップ
ルを大幅に小さくすることができる。
As explained above, since the present invention uses an absorbing material made of a silicone resin mixed with niobium oxide powder, the effect of suppressing unnecessary surface waves is great, especially ripples in group delay characteristics and frequency Characteristic ripples can be significantly reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による表面波装置の一実施例を示す平面
図、第2図(a )および(b)は本発明に基づくグル
ープディレー特性図、同図(C)は従来例に基づくグル
ープディレー特性図である。 1は表面波基板、2.3は電極、4.5は吸収材である
。 特 許 出 願 人 株式会社村田製作所 117図
Fig. 1 is a plan view showing an embodiment of the surface wave device according to the present invention, Fig. 2 (a) and (b) are group delay characteristic diagrams based on the present invention, and Fig. 2 (C) is a group delay characteristic diagram based on the conventional example. It is a delay characteristic diagram. 1 is a surface wave substrate, 2.3 is an electrode, and 4.5 is an absorbing material. Patent applicant Murata Manufacturing Co., Ltd. Figure 117

Claims (1)

【特許請求の範囲】[Claims] 表面波基板上であって、不要な表面波を吸収するための
領域に、シリコーン系樹脂に酸化ニオブ粉末を混合した
吸収材が設けられたことをfj徴とする表面波デバイス
A surface wave device characterized in that an absorbing material made of silicone resin mixed with niobium oxide powder is provided on a surface wave substrate in a region for absorbing unnecessary surface waves.
JP6881684A 1984-04-05 1984-04-05 Surface acoustic wave device Granted JPS60212019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6881684A JPS60212019A (en) 1984-04-05 1984-04-05 Surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6881684A JPS60212019A (en) 1984-04-05 1984-04-05 Surface acoustic wave device

Publications (2)

Publication Number Publication Date
JPS60212019A true JPS60212019A (en) 1985-10-24
JPH0510844B2 JPH0510844B2 (en) 1993-02-10

Family

ID=13384611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6881684A Granted JPS60212019A (en) 1984-04-05 1984-04-05 Surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPS60212019A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6992126B2 (en) * 2001-03-12 2006-01-31 Coppe/Ufrj-Coordenacao Dos Programas De Pos Graduacao De Engenharia Da Universidade Federal Do Rio De Janeiro Niobium based paints and coatings, its oxides and anticorrosive use

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636818A (en) * 1979-09-03 1981-04-10 Meidensha Electric Mfg Co Ltd Vacuum degree deterioration detector for vacuum breaker
JPS5783916A (en) * 1980-11-12 1982-05-26 Fujitsu Ltd Sound absorbing material for surface acoustic wave element
JPS587705U (en) * 1981-07-07 1983-01-19 ニツカン株式会社 trash can
JPS5838971A (en) * 1981-09-02 1983-03-07 Canon Inc Image forming apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636818A (en) * 1979-09-03 1981-04-10 Meidensha Electric Mfg Co Ltd Vacuum degree deterioration detector for vacuum breaker
JPS5783916A (en) * 1980-11-12 1982-05-26 Fujitsu Ltd Sound absorbing material for surface acoustic wave element
JPS587705U (en) * 1981-07-07 1983-01-19 ニツカン株式会社 trash can
JPS5838971A (en) * 1981-09-02 1983-03-07 Canon Inc Image forming apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6992126B2 (en) * 2001-03-12 2006-01-31 Coppe/Ufrj-Coordenacao Dos Programas De Pos Graduacao De Engenharia Da Universidade Federal Do Rio De Janeiro Niobium based paints and coatings, its oxides and anticorrosive use

Also Published As

Publication number Publication date
JPH0510844B2 (en) 1993-02-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term