JPS60211756A - Ion microscope - Google Patents

Abstract

PURPOSE:To obtain an image of a sample surface expanded with high magnification by a method, in which a sample is made into a plane body while facing said plane body, one or plural anodes having ion passage holes are disposed and the anodes with the phosphor films arranged so as to overlap said anodes at a fixed distance are also disposed. CONSTITUTION:When a direct current supply is impressed on the electrodes 1, 2 and 3, the directions of the electric lines of force are those shown by the dotted lines. Accordingly, when a sample such as sodium or other metal materials is attached onto a plane electrode 1, its atoms are ionized and flying out vertically to every part of the face of the electrode 2 in the shape of a circular arc. Some of ion particles are made to pass through a minute hole 4 in the center part of the anode 2 while said ion particles being further accelerated by the voltage impressed between the anode 2 and the anode 3 so that said ion particles may expand in the directions of electric lines of force for vertically colliding with each part of the face of the anode 3 in the shape of the circular arc. Thereby, the ion particles having passed through the minute hole 4 further project an expanded image of a part of the sample surface.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a 1-on b that can confirm the Table 7fi+ state of a sample using electrons or 1-on emitted from the surface of the sample.
σ1 Microscope Conventionally, by accelerating thermoelectrons and electrons emitted from metals and semiconductors, these surface states are expressed as an enlarged image on a film. A microscope is provided.

This 1-on microscope, for example, collects electrons that can be emitted from a highly sharp spherical cathode with a radius of 103A' into two rings of an annular anode.
When a voltage of ~15 KV is applied (adjusted to the direction of the electric line of force, and the spherical fluorescent film is impacted, and the distance between the cathode and the fluorescent film is set to 0 crn), a voltage of 106 times is applied. However, such conventional ion microscopes are configured to obtain magnified sample surface images.
This method forms a cathode with a tip radius of 10" A0 or less, and aims to concentrate a sufficiently large electric field to accelerate the acceleration of electrons and 4-ons generated from the tip. However, there are limits to the advanced technology at the tip of the cathode. , the electric field concentration was insufficient,
Therefore, it is difficult to secure a magnification of 0 or more than 2, where a sufficiently enlarged image cannot be obtained. The other anode between the anode and the cathode with a membrane has an ion passage hole,
This makes it possible to search the surface of a cathode-exposed sample, and is also an innovation that allows a highly magnified image of the sample surface to be displayed on a fluorescent film (similar to the ion microscope). Below, the embodiment of Mizumoto Iυ1 will be explained in detail with reference to the drawings.The figure is a diagram of the operating principle of this example.1 is a cathode as a planar electrode, for example, a material with a particularly high melting point. Metal analogy - inert metal such as tungsten is used.2.3
is an anode installed opposite to the planar electrode 1, and has a circular arc shape 117.
．． Formed as a pole))7, these are also formed using the above-mentioned materials with high melting points.

In addition, for example, 1 (
A micro hole 4 of JOA0 to 100OA0 is provided, and through this micro hole 4, a 1n1-shaped electrode 2'-
Select some of the 1111 molecules and ions emitted from the cystic surface provided on this i11-shaped electrode 2; i1
1 is required.

By intervening inert scum in the three electrodes 1, 2 and 3 of the old C5, it is possible to improve the insulation properties and average distribution of the lines of electric force.C5 is the planar electrode 1.
With a DC power supply connected to the anode 2 and the anode 2, a voltage suitable for the 4-on generation from the sample to be observed is generated.For example, the voltage ranges from 8 KV to 2 CI KV
The degree is chosen. A generator can be used as this DC power source, but it is expensive, so for example, a DC-DC converter is used.C6 is a DC power source connected between the anodes 2 and 3. The voltage was set at a level that would re-accelerate the 1-on light. The principle of operation of an ion microscope having such a configuration will be described below.

However, by applying a DC power source as described in 2.2 to the above three electrodes L2.3, since this DC power source voltage is high voltage, for example 15KV, a C1 field will be generated between these electrodes. , the direction of the lines of electric force is virtually as shown by the dotted lineC The number of ionized particles that fly out in the direction perpendicular to each surface r of the arc-shaped electrode 2 is 100A0 to 100.
If a fluorescent film is coated on the temporary IC anode 2 with a thickness of about 0 A0, the 1-on will collide with this and an enlarged image of the surface state of the sample can be obtained. However, in this invention, some of the ion particles are passed through the micropore 4 in the center of the anode 2, and the LH between the electrode 3 and the
By accelerating the ion particles slowly by the applied voltage I pc, some of the 1-on particles expand in the direction of the lines of electric force shown by the dotted lines and reach each i of the arc-shaped anode 3.
? Since the ion particles collide perpendicularly to ii, the ion particles that have followed the microhole 4f further project an enlarged image of a portion of the sample surface on the fluorescent film 7.

In this way, a part of the sample can be further enlarged and viewed, and by changing the position of the microhole 4, the part of the sample can be enlarged while searching for it. Therefore, by using such technology, it becomes easier to find slip crystal defects when a semiconductor is used as a sample. Similarly, it is possible to observe the semiconductor crystal structure and atomic patterns of the sample at high magnification. Easy to arrange etc.
C In addition, in integrated circuit elements, diffusion layers of P-type semiconductors and N-type semiconductors, Ehita Kinyal layer, and π can also be used to observe the structure of each junction of the electrode pattern. According to the present invention, the sample placed on the cathode of the negative electrode is an mJ-shaped body, which is F.
One or more anodes each having a one-on passage hole and anodes having a phosphor film arranged so as to overlap each other at a certain distance from the anode are disposed so as to face each other, By creating a potential difference between the valley cathode and the anode, it is possible to select a part of the sample from the cathode or the anode and easily observe its magnified image on the fluorescent film. This makes it possible to recognize the properties of transport substances with high resolution.

[BRIEF DESCRIPTION OF THE DRAWINGS] The figure is an explanatory diagram showing the schematic configuration of the ion microscope of the present invention]
It is. 1... Cathode 2.3... Anode 4... On passing hole 5.6... Power supply n'F Applicant Tadashi Sekiguchi QQ -

Claims (1)

[Claims] The sample attached to the cathode was made into a planar body, and the structure was such that a plurality of anodes each having ion passage holes and a constant pressure were applied to the anodes. Features of Ion Aki Microscope 0