JPS60195986U

JPS60195986U - piezoelectric vibrator pump

Info

Publication number: JPS60195986U
Application number: JP8517584U
Authority: JP
Inventors: 奥山　英憲; 永野　進
Original assignee: 株式会社三鈴エリー
Priority date: 1984-06-08
Filing date: 1984-06-08
Publication date: 1985-12-27

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

□　　　　第１図は従来の圧電体振動子ポンプの第１例
を゛示す断面図、第２図は同じくその第２例を示す断面
図、第３図は本考案圧電体振動子ポンプの一実施例を示
す断面図、第４図は従来の第１例と本考案実施例による
ポンプをガス吸込み、吐出用に適用した場合の吐出流量
対吐出圧の特性線図である。１・・・平板状ケーシング、２・・・圧電体、３，４・
・・、電極、５・・・圧電体振動子、６・・・吸孔込通
路、７・・・吐出通路、８，９・・・吸込用、吐出用チ
ェック弁、１２．１３・・・吸込側、吐出側ポンプ室、
１４・・・連絡通路、１５・・・連絡用チェック弁、１
６・・・シール材。□ Fig. 1 is a sectional view showing a first example of a conventional piezoelectric resonator pump, Fig. 2 is a sectional view showing the second example, and Fig. 3 is an implementation of the piezoelectric resonator pump of the present invention. FIG. 4, which is a sectional view showing an example, is a characteristic diagram of discharge flow rate versus discharge pressure when the pump according to the first conventional example and the embodiment of the present invention is applied to gas suction and discharge. 1... Flat casing, 2... Piezoelectric body, 3, 4...
..., electrode, 5... piezoelectric vibrator, 6... suction hole passage, 7... discharge passage, 8, 9... check valve for suction and discharge, 12.13... Suction side, discharge side pump chamber,
14...Communication passage, 15...Communication check valve, 1
6...Sealing material.

Claims

[Scope of utility model registration request]

゛ The outer peripheral part of the piezoelectric vibrator is supported on the inner circumferential surface of the flat casing, and a suction passage and a discharge passage are provided in the flat casing part facing on both sides of the piezoelectric vibrator, and the suction passage and the discharge passage are connected to each other. In addition to providing check valves for suction and discharge, respectively, a communication passageway is provided in the flat casing to communicate the suction side and discharge side pump spaces formed between both surfaces of the piezoelectric vibrator and the flat casing. A piezoelectric vibrator pump is provided with a connecting check valve in this communication passage.