JPS60195829U - 基板反転装置 - Google Patents

基板反転装置

Info

Publication number
JPS60195829U
JPS60195829U JP8314784U JP8314784U JPS60195829U JP S60195829 U JPS60195829 U JP S60195829U JP 8314784 U JP8314784 U JP 8314784U JP 8314784 U JP8314784 U JP 8314784U JP S60195829 U JPS60195829 U JP S60195829U
Authority
JP
Japan
Prior art keywords
substrate
board
utility
substrate reversing
reversing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8314784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130422Y2 (US07122547-20061017-C00273.png
Inventor
研一 中村
Original Assignee
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社 filed Critical 大日本スクリ−ン製造株式会社
Priority to JP8314784U priority Critical patent/JPS60195829U/ja
Publication of JPS60195829U publication Critical patent/JPS60195829U/ja
Application granted granted Critical
Publication of JPH0130422Y2 publication Critical patent/JPH0130422Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Attitude Control For Articles On Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Registering Or Overturning Sheets (AREA)
JP8314784U 1984-06-04 1984-06-04 基板反転装置 Granted JPS60195829U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8314784U JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8314784U JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Publications (2)

Publication Number Publication Date
JPS60195829U true JPS60195829U (ja) 1985-12-27
JPH0130422Y2 JPH0130422Y2 (US07122547-20061017-C00273.png) 1989-09-18

Family

ID=30631509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8314784U Granted JPS60195829U (ja) 1984-06-04 1984-06-04 基板反転装置

Country Status (1)

Country Link
JP (1) JPS60195829U (US07122547-20061017-C00273.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62181540U (US07122547-20061017-C00273.png) * 1986-05-08 1987-11-18
JPH073138U (ja) * 1993-12-10 1995-01-17 東京エレクトロン株式会社 半導体ウエハの搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62181540U (US07122547-20061017-C00273.png) * 1986-05-08 1987-11-18
JPH073138U (ja) * 1993-12-10 1995-01-17 東京エレクトロン株式会社 半導体ウエハの搬送装置

Also Published As

Publication number Publication date
JPH0130422Y2 (US07122547-20061017-C00273.png) 1989-09-18

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