JPS60194230U - clean tunnel - Google Patents
clean tunnelInfo
- Publication number
- JPS60194230U JPS60194230U JP8122284U JP8122284U JPS60194230U JP S60194230 U JPS60194230 U JP S60194230U JP 8122284 U JP8122284 U JP 8122284U JP 8122284 U JP8122284 U JP 8122284U JP S60194230 U JPS60194230 U JP S60194230U
- Authority
- JP
- Japan
- Prior art keywords
- clean
- air
- hood
- clean hood
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ventilation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はクリーントンネルの一般的な形状を平面的に見
た一部平面図、第２図は第１図のＸ−Ｘ線の断面を拡大
してこの部分の空気処理系統を図解的に示した従来のク
リーントンネルの代表例の７略断面図、第３図は第２図
と同様の関係をもって示しｈ本考案のクリーントンネル
の例を示す略断 ゛面図、第４図は本考案のり１月−ン
トンネルにおけるクリ、−ンフードの例を示す部分斜視
図、第５図は本考案のクリーントンネルにおけるクリー
ンフードの他の例を示す部分斜視図である。
１・・・開口、２・・・垂直壁、３・・・メンテエリア
、４・・・クリーンフード、５・・・作業台、６・・・
作業通路、７・・・空調機、８・・・給気路、１４・・
・高性能フィルター （ＨＥＰＡフィルター）、１５・
・・パンチングボード、１６・・・垂れ壁、１８・・・
メンテエリアからクリーンフードへの送気路、１９・・
・ファン、２０・・・クリーンフードへの空気入口部。
−「−乍ｍ
８＠「１７−
’ 、１１Ｎ月 １ト・
、 ｔ、 −５
第３図
−８−Figure 1 is a partial plan view of the general shape of a clean tunnel, and Figure 2 is an enlarged cross-section taken along line X-X in Figure 1, illustrating the air treatment system in this part. 7 is a schematic cross-sectional view of a representative example of a conventional clean tunnel shown in FIG. FIG. 5 is a partial perspective view showing another example of the clean hood in the clean tunnel of the present invention. 1... Opening, 2... Vertical wall, 3... Maintenance area, 4... Clean hood, 5... Workbench, 6...
Work passage, 7... Air conditioner, 8... Air supply path, 14...
・High performance filter (HEPA filter), 15・
...Punching board, 16... Hanging wall, 18...
Air supply path from maintenance area to clean hood, 19...
・Fan, 20...Air inlet to the clean hood. -'-m 8@'17-', 11N month 1t., t, -5 Figure 3-8-
Claims (1)
ンテエリア３を形成し、清浄空気の下向きの流れを形成
させるクリーンフード４を該垂直壁２の前面上部に設置
し、このクリーンフード４′ の下方に作業台５を据付
けると共にこの作業台５の前に作業通路６を形成し、そ
のクリーントンネルの外に設置した空調機７からメンテ
エリア３に調和空気を供給するようにしたクリーントン
ネルであって、 □ 前記のクリーンフード４の空気吹出面を多孔板１５から
なる空気吹出口に形成し、該メンテエリア３内の空気を
ファン１９によって該クリーンフード４に送気する空気
路１８を設けると共にファン１９の吐出側であって且つ
クリーンフード４への入口部にＨＥＰＡフィルター１４
を取り付け、このＨＥＰＡフィルター１４によってクリ
ーンフード４内に供給される空気の供給速度を低下させ
ると同時にクリーンフード４内に供給される気流を均一
化するようにしたクリーントンネル。[Claims for Utility Model Registration] A maintenance area 3 is formed behind a vertical wall 2 having an opening 1 at the lower end, and a clean hood 4 for forming a downward flow of clean air is provided at the upper front side of the vertical wall 2. A workbench 5 is installed below the clean hood 4', and a work passage 6 is formed in front of the workbench 5, and conditioned air is supplied to the maintenance area 3 from an air conditioner 7 installed outside the clean tunnel. □ The air blowing surface of the clean hood 4 is formed into an air blowing port made of a perforated plate 15, and the air in the maintenance area 3 is supplied to the clean hood 4 by a fan 19. An air passage 18 for supplying air to the clean hood 4 is provided, and a HEPA filter 14 is provided on the discharge side of the fan 19 and at the inlet to the clean hood 4.
The clean tunnel is equipped with a HEPA filter 14 that lowers the supply speed of air supplied into the clean hood 4 and at the same time equalizes the airflow supplied into the clean hood 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8122284U JPS60194230U (en) | 1984-06-02 | 1984-06-02 | clean tunnel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8122284U JPS60194230U (en) | 1984-06-02 | 1984-06-02 | clean tunnel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60194230U true JPS60194230U (en) | 1985-12-24 |
| JPH029321Y2 JPH029321Y2 (en) | 1990-03-07 |
Family
ID=30627803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8122284U Granted JPS60194230U (en) | 1984-06-02 | 1984-06-02 | clean tunnel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60194230U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0453138U (en) * | 1990-09-06 | 1992-05-07 |
-
1984
- 1984-06-02 JP JP8122284U patent/JPS60194230U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0453138U (en) * | 1990-09-06 | 1992-05-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH029321Y2 (en) | 1990-03-07 |
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