JPS60193656U - 多極電極 - Google Patents

多極電極

Info

Publication number
JPS60193656U
JPS60193656U JP8167784U JP8167784U JPS60193656U JP S60193656 U JPS60193656 U JP S60193656U JP 8167784 U JP8167784 U JP 8167784U JP 8167784 U JP8167784 U JP 8167784U JP S60193656 U JPS60193656 U JP S60193656U
Authority
JP
Japan
Prior art keywords
multipolar electrode
teeth
multipolar
alternately
combining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8167784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH028355Y2 (enrdf_load_stackoverflow
Inventor
北山　豊樹
茂 守屋
一彦 小松
貞夫 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP8167784U priority Critical patent/JPS60193656U/ja
Publication of JPS60193656U publication Critical patent/JPS60193656U/ja
Application granted granted Critical
Publication of JPH028355Y2 publication Critical patent/JPH028355Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP8167784U 1984-06-01 1984-06-01 多極電極 Granted JPS60193656U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8167784U JPS60193656U (ja) 1984-06-01 1984-06-01 多極電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8167784U JPS60193656U (ja) 1984-06-01 1984-06-01 多極電極

Publications (2)

Publication Number Publication Date
JPS60193656U true JPS60193656U (ja) 1985-12-23
JPH028355Y2 JPH028355Y2 (enrdf_load_stackoverflow) 1990-02-28

Family

ID=30628680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8167784U Granted JPS60193656U (ja) 1984-06-01 1984-06-01 多極電極

Country Status (1)

Country Link
JP (1) JPS60193656U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH028355Y2 (enrdf_load_stackoverflow) 1990-02-28

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