JPS60193291U - クリ−ンル−ム - Google Patents

クリ−ンル−ム

Info

Publication number
JPS60193291U
JPS60193291U JP8147984U JP8147984U JPS60193291U JP S60193291 U JPS60193291 U JP S60193291U JP 8147984 U JP8147984 U JP 8147984U JP 8147984 U JP8147984 U JP 8147984U JP S60193291 U JPS60193291 U JP S60193291U
Authority
JP
Japan
Prior art keywords
clean room
membrane
bellows
supports
outside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8147984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356825Y2 (enrdf_load_stackoverflow
Inventor
文彦 曽我
溝部　雅章
Original Assignee
石川島播磨重工業株式会社
石川島汎用機サービス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 石川島播磨重工業株式会社, 石川島汎用機サービス株式会社 filed Critical 石川島播磨重工業株式会社
Priority to JP8147984U priority Critical patent/JPS60193291U/ja
Publication of JPS60193291U publication Critical patent/JPS60193291U/ja
Application granted granted Critical
Publication of JPH0356825Y2 publication Critical patent/JPH0356825Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)
JP8147984U 1984-06-01 1984-06-01 クリ−ンル−ム Granted JPS60193291U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8147984U JPS60193291U (ja) 1984-06-01 1984-06-01 クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8147984U JPS60193291U (ja) 1984-06-01 1984-06-01 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS60193291U true JPS60193291U (ja) 1985-12-23
JPH0356825Y2 JPH0356825Y2 (enrdf_load_stackoverflow) 1991-12-24

Family

ID=30628297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8147984U Granted JPS60193291U (ja) 1984-06-01 1984-06-01 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS60193291U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148382A (ja) * 1987-12-02 1989-06-09 Hanwa:Kk 保温材微粉末の飛散、拡散防止方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148382A (ja) * 1987-12-02 1989-06-09 Hanwa:Kk 保温材微粉末の飛散、拡散防止方法

Also Published As

Publication number Publication date
JPH0356825Y2 (enrdf_load_stackoverflow) 1991-12-24

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