JPS60192358U - Charged particle beam device - Google Patents

Charged particle beam device

Info

Publication number
JPS60192358U
JPS60192358U JP8063084U JP8063084U JPS60192358U JP S60192358 U JPS60192358 U JP S60192358U JP 8063084 U JP8063084 U JP 8063084U JP 8063084 U JP8063084 U JP 8063084U JP S60192358 U JPS60192358 U JP S60192358U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
beam device
deflection coil
deflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8063084U
Other languages
Japanese (ja)
Inventor
和夫 小柳
河合　政夫
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP8063084U priority Critical patent/JPS60192358U/en
Publication of JPS60192358U publication Critical patent/JPS60192358U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

゛　　第１図は本考案の一実施例偏向コイル構成の縦断
側面図、第２図、第３図は本考案の夫々異る他の実施例
におけるシールドパイプの縦断側面図である。 １．２・・・・・・偏向コイル、４・・・・・・シール
ドパイプ、５・・・・・・抵抗体層。−1 is a longitudinal sectional side view of a deflection coil configuration according to one embodiment of the present invention, and FIGS. 2 and 3 are longitudinal sectional side views of shield pipes in other different embodiments of the present invention. 1.2... Deflection coil, 4... Shield pipe, 5... Resistor layer. −

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 荷電粒子線を偏向させて試料面を走査するための荷電粒
子線偏向コイルの荷電粒子線通路に面する内面を、少く
とも内面に高電気抵抗層を有するシールドパイプで遮蔽
したことを特徴とする荷電粒子線装置。The inner surface facing the charged particle beam path of the charged particle beam deflection coil for deflecting the charged particle beam to scan the sample surface is shielded with a shield pipe having at least a high electrical resistance layer on the inner surface. Charged particle beam device.
JP8063084U 1984-05-31 1984-05-31 Charged particle beam device Pending JPS60192358U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8063084U JPS60192358U (en) 1984-05-31 1984-05-31 Charged particle beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8063084U JPS60192358U (en) 1984-05-31 1984-05-31 Charged particle beam device

Publications (1)

Publication Number Publication Date
JPS60192358U true JPS60192358U (en) 1985-12-20

Family

ID=30626658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8063084U Pending JPS60192358U (en) 1984-05-31 1984-05-31 Charged particle beam device

Country Status (1)

Country Link
JP (1) JPS60192358U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020009765A (en) * 2018-07-06 2020-01-16 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ Electron microscope with improved imaging resolution

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147208A (en) * 1975-06-13 1976-12-17 Hitachi Ltd Deflector of charged particle
JPS52106267A (en) * 1976-03-03 1977-09-06 Hitachi Ltd Electronic line deflection unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147208A (en) * 1975-06-13 1976-12-17 Hitachi Ltd Deflector of charged particle
JPS52106267A (en) * 1976-03-03 1977-09-06 Hitachi Ltd Electronic line deflection unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020009765A (en) * 2018-07-06 2020-01-16 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ Electron microscope with improved imaging resolution

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