JPS60187533U - Wafer alignment mechanism - Google Patents
Wafer alignment mechanismInfo
- Publication number
- JPS60187533U JPS60187533U JP7416184U JP7416184U JPS60187533U JP S60187533 U JPS60187533 U JP S60187533U JP 7416184 U JP7416184 U JP 7416184U JP 7416184 U JP7416184 U JP 7416184U JP S60187533 U JPS60187533 U JP S60187533U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- drive roller
- alignment mechanism
- roller
- radius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来例の平面図、第２図ないし第５図は本考案
の一実施例を示し第２図および第３図は異なる時点の平
面図、第４図は第２図の４−４線断面図、第５図は駆動
ローラと正転駆動ローラそして逆転駆動ローラ等の平面
図である。
１２・・・ウェハ、１２Ａ・・・オリエンテーションフ
ラット、２１・・・支持台、２４・・・従動ローラ、２
６・・・回転検出器、２７・・・駆動ローラ、２８・・
・逆転駆動ローラ、２９・・・アイドラローラ、３◎・
・・正転駆動ローラ。FIG. 1 is a plan view of a conventional example, FIGS. 2 to 5 show an embodiment of the present invention, FIGS. 2 and 3 are plan views at different times, and FIG. FIG. 5 is a plan view of the drive roller, the normal rotation drive roller, the reverse rotation drive roller, etc. DESCRIPTION OF SYMBOLS 12... Wafer, 12A... Orientation flat, 21... Support stand, 24... Followed roller, 2
6... Rotation detector, 27... Drive roller, 28...
・Reverse drive roller, 29...Idler roller, 3◎・
・Forward rotation drive roller.
Claims (1)
に複数の駆動ローラのうち１個或いは複数を接すること
により前記ウェハを支持台上で所定位置まで回転させて
位置決めする装置において、駆動ローラと、同駆動ロー
ラの両側に前記ウェハのオリエンテーションフラットの
長さの範囲内の間隔を置きかつ前記ウェハの外周の曲率
半径より大きい曲率半径の円弧に外接するように位置し
て設けられた正転駆動ローラおよび逆転駆動ローラと、
前記ウェハに接して回転しかつ前記ウェハの位置を決め
る従動ローラと、同従動ローラの回転停止を検出する回
転検出器とからなり、前記回転検出器の検出信号により
前記ウェハが粗位置決めされたことを検出するようにし
１ここウェハアライメント機構。In an apparatus for rotating and positioning a wafer to a predetermined position on a support stand by contacting one or more of a plurality of drive rollers with the outer periphery of a wafer on which an orientation flat is formed, the drive roller and the drive roller A forward rotation drive roller and a reverse rotation drive roller are provided on both sides at an interval within the length of the orientation flat of the wafer and are positioned so as to circumscribe an arc having a radius of curvature larger than the radius of curvature of the outer periphery of the wafer. and,
The device includes a driven roller that rotates in contact with the wafer and determines the position of the wafer, and a rotation detector that detects when the driven roller stops rotating, and that the wafer is roughly positioned based on a detection signal from the rotation detector. 1 to detect the wafer alignment mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7416184U JPS60187533U (en) | 1984-05-21 | 1984-05-21 | Wafer alignment mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7416184U JPS60187533U (en) | 1984-05-21 | 1984-05-21 | Wafer alignment mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60187533U true JPS60187533U (en) | 1985-12-12 |
Family
ID=30614196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7416184U Pending JPS60187533U (en) | 1984-05-21 | 1984-05-21 | Wafer alignment mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60187533U (en) |
-
1984
- 1984-05-21 JP JP7416184U patent/JPS60187533U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS58148604U (en) | Digital display type micrometer head | |
| JPS60187533U (en) | Wafer alignment mechanism | |
| JPS63192325U (en) | ||
| JPS59116815U (en) | X-Y direction input device | |
| JPS6070854U (en) | Paper discharge roller cleaning device | |
| JPS6296046U (en) | ||
| JPS6265558U (en) | ||
| JPS59101437U (en) | Lead frame reversing device | |
| JPS5845246U (en) | Conveyance device | |
| JPS5841727U (en) | Board receiving device | |
| JPS60177136U (en) | Paper jam detection device | |
| JPS616941U (en) | Tape cassette loading device | |
| JPS58166035U (en) | Wafer positioning device | |
| JPS5920458U (en) | Test cassette for cassette type tape drive equipment | |
| JPS612316U (en) | belt conveyor device | |
| JPS5981517U (en) | Coil feeding device | |
| JPS58163873U (en) | X-Y direction input device | |
| JPS6075352U (en) | Board reversing device | |
| JPS6092685U (en) | rotating device | |
| JPS6070929U (en) | Tape recorder tape running direction display device | |
| JPS59147257U (en) | imprint device | |
| JPS5887734U (en) | Conveyance device | |
| JPS5963366U (en) | Toner remaining amount detection device | |
| JPS5989693U (en) | tube rotation device | |
| JPS6266342U (en) |