JPS60185659U - Substrate wet processing equipment - Google Patents
Substrate wet processing equipmentInfo
- Publication number
- JPS60185659U JPS60185659U JP7363484U JP7363484U JPS60185659U JP S60185659 U JPS60185659 U JP S60185659U JP 7363484 U JP7363484 U JP 7363484U JP 7363484 U JP7363484 U JP 7363484U JP S60185659 U JPS60185659 U JP S60185659U
- Authority
- JP
- Japan
- Prior art keywords
- processing equipment
- wet processing
- substrate wet
- processing tank
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の第１の実施例の断面図、第２図は第１
図の要部でＡ矢視図、第３図は第２の実施例で、第２図
に相当する部分を示すし、第４図は第３図のＢ矢視図、
第５図は従来例の側断面図を示す。
１・・・基板、２・・・収納容器、６・・・処理液槽、
１２・・・吸水性材料、１３・・・点滴液受は皿。FIG. 1 is a sectional view of the first embodiment of the present invention, and FIG. 2 is a cross-sectional view of the first embodiment of the present invention.
The main part of the figure is a view in the direction of arrow A, FIG. 3 is the second embodiment and shows the part corresponding to FIG. 2, and FIG. 4 is a view in the direction of arrow B in FIG.
FIG. 5 shows a side sectional view of a conventional example. 1... Substrate, 2... Storage container, 6... Processing liquid tank,
12... Water-absorbing material, 13... Intravenous drip receiver is a dish.
Claims (1)
内に浸漬し、及び／又は、前記処理槽から取り出し、か
つ、前記被処理物を搬送する移動手段と；被処理物を処
理槽から引き上げた位置で前記被処理物の底部に接触す
る、吸水性部材からなる点滴液受は手段とを備えてなる
ことを特徴とする基板ウェット処理装置。a processing tank filled with a processing liquid; a moving means for immersing the object to be processed into the processing tank and/or taking it out from the processing tank and transporting the object; A substrate wet processing apparatus comprising: a drip liquid receiver made of a water-absorbing member that contacts the bottom of the object to be processed at a position lifted from the processing tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7363484U JPS60185659U (en) | 1984-05-19 | 1984-05-19 | Substrate wet processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7363484U JPS60185659U (en) | 1984-05-19 | 1984-05-19 | Substrate wet processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60185659U true JPS60185659U (en) | 1985-12-09 |
Family
ID=30613179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7363484U Pending JPS60185659U (en) | 1984-05-19 | 1984-05-19 | Substrate wet processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60185659U (en) |
-
1984
- 1984-05-19 JP JP7363484U patent/JPS60185659U/en active Pending
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