JPS60185238U - 表面温度測定用白金測温抵抗体 - Google Patents

表面温度測定用白金測温抵抗体

Info

Publication number
JPS60185238U
JPS60185238U JP7194884U JP7194884U JPS60185238U JP S60185238 U JPS60185238 U JP S60185238U JP 7194884 U JP7194884 U JP 7194884U JP 7194884 U JP7194884 U JP 7194884U JP S60185238 U JPS60185238 U JP S60185238U
Authority
JP
Japan
Prior art keywords
platinum resistance
surface temperature
temperature measurement
resistance thermometer
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7194884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0142018Y2 (enrdf_load_stackoverflow
Inventor
今村 郁
Original Assignee
株式会社 ネツシン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 ネツシン filed Critical 株式会社 ネツシン
Priority to JP7194884U priority Critical patent/JPS60185238U/ja
Publication of JPS60185238U publication Critical patent/JPS60185238U/ja
Application granted granted Critical
Publication of JPH0142018Y2 publication Critical patent/JPH0142018Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP7194884U 1984-05-18 1984-05-18 表面温度測定用白金測温抵抗体 Granted JPS60185238U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7194884U JPS60185238U (ja) 1984-05-18 1984-05-18 表面温度測定用白金測温抵抗体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7194884U JPS60185238U (ja) 1984-05-18 1984-05-18 表面温度測定用白金測温抵抗体

Publications (2)

Publication Number Publication Date
JPS60185238U true JPS60185238U (ja) 1985-12-09
JPH0142018Y2 JPH0142018Y2 (enrdf_load_stackoverflow) 1989-12-11

Family

ID=30609900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7194884U Granted JPS60185238U (ja) 1984-05-18 1984-05-18 表面温度測定用白金測温抵抗体

Country Status (1)

Country Link
JP (1) JPS60185238U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7307575B2 (ja) 2019-03-28 2023-07-12 株式会社Screenホールディングス 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPH0142018Y2 (enrdf_load_stackoverflow) 1989-12-11

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