JPS60177452A - Method for punching center hole on stamper - Google Patents
Method for punching center hole on stamperInfo
- Publication number
- JPS60177452A JPS60177452A JP3222984A JP3222984A JPS60177452A JP S60177452 A JPS60177452 A JP S60177452A JP 3222984 A JP3222984 A JP 3222984A JP 3222984 A JP3222984 A JP 3222984A JP S60177452 A JPS60177452 A JP S60177452A
- Authority
- JP
- Japan
- Prior art keywords
- center hole
- center
- cut
- diameter
- stamper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 31
- 238000005520 cutting process Methods 0.000 claims abstract description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 10
- 238000005323 electroforming Methods 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 238000000465 moulding Methods 0.000 claims description 11
- 229920003023 plastic Polymers 0.000 claims description 9
- 239000004033 plastic Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000005553 drilling Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 229910010272 inorganic material Inorganic materials 0.000 claims description 2
- 239000011147 inorganic material Substances 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 8
- 239000011521 glass Substances 0.000 abstract description 4
- 229910052759 nickel Inorganic materials 0.000 abstract description 4
- 238000004528 spin coating Methods 0.000 abstract 1
- 238000001746 injection moulding Methods 0.000 description 3
- 238000000748 compression moulding Methods 0.000 description 2
- 239000004922 lacquer Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- -1 In2O3 Chemical class 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/0014—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture record carriers not specifically of filamentary or web form
- G11B23/0021—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture record carriers not specifically of filamentary or web form discs
- G11B23/0028—Details
- G11B23/0035—Details means incorporated in the disc, e.g. hub, to enable its guiding, loading or driving
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
- G11B33/10—Indicating arrangements; Warning arrangements
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は高密度情報記録担体の成形に用いられるスタン
パ−の製造方法およびそれにより得られるメタ／パーに
関するものであり、特に、光ディスク、静電容量式ディ
スク等のプラスチック製高密度情報記録ディスクの成形
時に使用されるスタンパ−の製造方法、特にメタ／バー
の中心に正確に中心孔を形成するだめの方法に関するも
のである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for manufacturing a stamper used for molding a high-density information recording carrier, and a meta/permanent product obtained thereby. The present invention relates to a method for manufacturing a stamper used in molding plastic high-density information recording disks such as capacitive disks, and in particular to a method for accurately forming a center hole in the center of a meta/bar.
（従来技術）
レーザーや静電容量変化を利用して高密度の情報をプラ
スチックディスク上に記録したり、読取ったりする方式
は広く用いられている０このプラスチックディスクは一
般に２ｐ法（ｐｈｏｔｏ −ｐｏｌｙｍｅｒｉｚａｔｉ
ｏｎ ｐｒｏｃｅｓｓ）といわれる紫外線硬化法、圧縮
成形法、工／ポジ／グあるいは射出成形によって作られ
る。いずれの方法を用いるに伊よ、プラスチック材料に
ザブミクロ／オーター−の微細な凹凸情報を転写するた
めにメタ／パーとよばれる型が使用される。このメタ／
パーの中心孔はスタンパ−を金型上に正確に位置決めす
るために極めて高い精度で形成しなければならない。(Prior art) A method of recording and reading high-density information on a plastic disk using a laser or a change in capacitance is widely used. Generally, this plastic disk is manufactured using the 2p method (photo-polymerization method).
It is made by ultraviolet curing method called "on process", compression molding method, molding/positing/injection molding or injection molding. In either method, a mold called Meta/Par is used to transfer microscopic/autoscopic unevenness information onto the plastic material. This meta/
The center hole of the par must be formed with extremely high precision in order to accurately position the stamper on the mold.
このスタノパーは種々の方法で作られる。すなわち、一
般にはガラス等で作られた基材上にラッカ一層、フォト
レジスト層あるいは金属薄膜層を形成し、これらの層を
釧またはレーザーによって選択的にその一部を除去しく
カンティングという）で原盤を作り、この原盤から電鋳
法等によってマスターあるいはメタ／パーが作られる。This stanoper can be made in a variety of ways. That is, in general, a layer of lacquer, a photoresist layer, or a thin metal film layer is formed on a substrate made of glass or the like, and a portion of these layers is selectively removed using a chisel or a laser (called canting). A master disc is made, and from this master disc, a master or meta/par is created by electroforming.
実際にはこの他に種々の処理・操作が必要であるが、こ
れらは本発明の一部を成すものではないので詳細は省略
する。メタ／バーの製造法に関しては特開昭５４−２４
６０２号、特開昭５８−１５７９８４号等を参照された
い。In reality, various other processes and operations are required, but since these do not form part of the present invention, their details will be omitted. Regarding the manufacturing method of meta/bar, see Japanese Patent Application Laid-Open No. 54-24.
Please refer to No. 602, JP-A-58-157984, etc.
上記のように電鋳等により作られたスタンパ−原板、す
なわち例えば０．２５ ｍｍ厚のニッケル製スタンバ−
原板にはスタンパ−を金型に取付けるための中心孔を形
成する必要がある。この中心孔は一般にスタンパ−原板
から中心部を切削工具あるいはレーザーを用いて切り抜
くことによって形成されるが、メタ／バー原板の中心に
正確に中心孔を明けるだめのメタ／バー原板の位置決め
法に完全なものはこれまでなかった。そのため、従来は
、成形後のディスクの中心孔の偏心が何によって生じた
のか、すなわちメタ／パーの中心孔自体の偏心によるも
のか、成形機の金型に取付ける際り心出し不良によるも
のかを評価することができなかった。A stamper original plate made by electroforming as described above, i.e., a 0.25 mm thick nickel stamper, for example.
It is necessary to form a center hole in the original plate for attaching the stamper to the mold. This center hole is generally formed by cutting out the center part of the stamper original plate using a cutting tool or a laser, but there is a method for positioning the meta/bar original plate that allows the center hole to be accurately drilled in the center of the stamper original plate. Nothing has ever been perfect. Therefore, in the past, it was difficult to determine what caused the eccentricity of the center hole of the disk after molding, i.e., whether it was due to the eccentricity of the center hole of the meta/par itself, or due to poor centering when attaching it to the mold of the molding machine. could not be evaluated.
成形後の高密度情報記録用ディスクの中心孔の許容偏心
度は一般に３０μｍ以下が要求される。The permissible eccentricity of the center hole of a high-density information recording disk after molding is generally required to be 30 μm or less.
この偏心度はメタ／パー原板への穿孔時とスタンパ−の
金型への取付は時の両方の偏心度の和となり、特に前者
の偏心度が成形ディスクの偏心に大きな影響を与える。This eccentricity is the sum of the eccentricities at the time of drilling into the meta/par original plate and at the time of attaching the stamper to the mold, and the former eccentricity has a particularly large effect on the eccentricity of the molded disk.
（発明の目的）
本発明の目的Ｖｉ電鋳等によって原盤から作ったメタ／
パー原板の中心に高精度で中心孔を明ける方法を提供す
ることにある。(Object of the invention) Object of the invention ViMeta/
To provide a method for drilling a center hole in the center of a par original plate with high precision.
本発明の他の目的はさらに上記方法によって作ったメタ
／パーを提供することにある。Another object of the present invention is to further provide meta/par produced by the above method.
（発明の構成）
本発明の第１の％徴はター／テーブルの中上・スピンド
ルと係合する中心開口を有する高密度情報記録用プラス
チックディスクの成形時に用いられるスタンパ−の製作
方法であって、基材上に被カクテイ／ダ層を形成し、こ
の被カッティング層に情報をカッティングした原盤上に
金属層を形成し、この金属層を原盤から剥してメタ／パ
ー原板を作り、このメタ／パー原板に中心孔を穿孔して
最終メタ／パーを製作する方法において、上記の情報の
カンフ４フフ時に、上記の中心孔の直径と同じかそれよ
りわずかに大きい直径の中心孔ガイド円をカッティング
する点にある。(Structure of the Invention) The first feature of the present invention is a method for manufacturing a stamper used in molding a plastic disk for high-density information recording having a center opening that engages with the center upper part of the tar/table and the spindle. , a cut/da layer is formed on the base material, a metal layer is formed on the master with information cut on the cut layer, this metal layer is peeled off from the master to create a meta/par master, and the meta/par master is created. In the method of manufacturing the final meta/par by drilling a center hole in the par original plate, at the time of completion of the above information, cut a center hole guide circle with a diameter that is the same as or slightly larger than the diameter of the above center hole. It is in the point of doing.
上記プラスチックディスクＵＺｐ法、エンボス法、圧縮
成形法、射出成形法等、メタ／パーを必要とする任意の
成形法によって成形することができる。ディスクの寸法
は外径が約１００〜３００朋、内径が１０〜３５＃＋＋
＋１１厚さが１〜２＃Ｉｍのものが一般的であり、樹脂
としてはアクリル樹脂、ポリカーボネートポリ塩化ビニ
ル、ポリ″エステル等がある。It can be molded by any molding method that requires meta/par, such as the plastic disk UZp method, embossing method, compression molding method, injection molding method, etc. The dimensions of the disc are approximately 100 to 300mm in outer diameter and 10 to 35mm in inner diameter.
+11 Thickness is generally 1 to 2 #Im, and resins include acrylic resin, polycarbonate, polyvinyl chloride, and polyester.
上記プラスチックディスク上にはザブミクロ／オでグー
の凹凸情報が刻印されていて、レーサー光の変化や静電
容量の変化を利用して情報の記録・再生が行われる。機
能的には読取り専用（ＲｅａｄＯｎｌｙ）型、書込み可
能（ＤＲＡＷ）型、再記鋒可能（Ｅ−’ＤＲＡＷ）型が
あり、読取り専用型では上記凹凸自体が情報となり、Ｄ
ＲＡＷおよびＥ−ＤｒＬＡＷ型では上記凹凸をトラッキ
７グに利用するのが普通である。本発明はこの凹凸情報
を刻印（成形）する際に使われるスタンパ−に関するも
のである。On the above-mentioned plastic disk, information on the goo is engraved with Zabu Micro/O, and information is recorded and reproduced using changes in the laser light and changes in capacitance. Functionally, there are read-only (ReadOnly) types, writable (DRAW) types, and rewritable (E-'DRAW) types. In the read-only type, the unevenness itself becomes information, and D
In the RAW and E-DrLAW types, the above-mentioned unevenness is usually used for tracking. The present invention relates to a stamper used for stamping (molding) this unevenness information.
前記基拐としては一般に研磨ガラス板が使用さノｔ、被
カンティング層としてはラッカ一層、フォトレジスト層
あるいはＢｉ ＋ Ｃｕ ＋ ＡＩ 、 Ｃｒ等の金属
やＩｎ２Ｏ３等の金属酸化物、その他の無機材料の層に
することができる。カッティングはラッカーノーの場合
には針で、フォトレジスト層や金属層の場合にはレーザ
ーで行われ、１ｔｅａｄ ０ｎｌｙ型用には不連続ナヒ
ットカ、マタ、ＤＲＡＷ、Ｅ−ＤＲＡＷ型用には同心円
またはスパイラル状のトランク溝が被カッティ／り層に
刻まれる。Generally, a polished glass plate is used as the substrate, and the layer to be canted is a lacquer layer, a photoresist layer, a metal such as Bi + Cu + AI, Cr, a metal oxide such as In2O3, or other inorganic material. can be made into layers. Cutting is done with a needle in the case of lacquerware, with a laser in the case of photoresist and metal layers, with a discontinuous cutter for the 1tead 0nly type, and with a concentric circle or spiral for the mata, DRAW, and E-DRAW types. Trunk grooves of the shape of the shape are carved in the layer to be cut.
こうしてカッティングされたいわゆる原盤から一般に電
鋳によって金属層を形成する。すなわち原盤に導電処理
をした後に回転陰極に取付け、ニッケル陽極を用いて厚
さ約０．２５ ａｍのマスターを作る。これをスタンパ
−に利用することもできるが、必要に応じてマザーを作
り、それから再度マスターを作ることもできる。この電
鋳方法は公知であり、例えば本出願人による特願昭５８
−６８（１２０号、Ｗｉｌｌ＆５８−１２１６９０号に
詳＃ＩＫ説明されている。A metal layer is generally formed by electroforming from the so-called master disk cut in this way. That is, after the master is subjected to conductive treatment, it is attached to a rotating cathode and a nickel anode is used to create a master approximately 0.25 am thick. You can use this as a stamper, but you can also make a mother and then a master again if necessary. This electroforming method is publicly known, for example, in a patent application filed in 1983 by the applicant.
-68 (No. 120, Will & No. 58-121690).
こうして作られたマスター原板すなわち中心に孔の明い
ていないスタンパ−原板を金型中に正確に位置決めする
ためにはスタンパ−原板の中心に正確に中心孔を形成し
なければならない。この中心孔の穿孔は一般に機械的切
削またはレーザーによシ行われるが、第１図に示すよう
に電鋳しただけのメタ／パー原板ＩＫは正確な中心がな
く、中心には原盤を・陰極に取付けるボルトによって生
じる不正確な穴３しかない。中心孔の切削には一般に情
報（ピットまたはグループ）が転写された情報区域２を
ガイドとして行われているが、中心孔が正確に中心に切
削されたか否かを確認するのは困難である。In order to accurately position the thus produced master original plate, that is, the stamper original plate without a hole in the center, in the mold, it is necessary to form a center hole accurately in the center of the stamper original plate. This center hole is generally drilled by mechanical cutting or laser, but as shown in Figure 1, the meta/par original plate IK, which is simply electroformed, does not have an exact center, and the original plate and cathode are placed in the center. There is only an incorrect hole 3 caused by the bolt that attaches to the. The cutting of the center hole is generally performed using the information area 2 onto which information (pits or groups) has been transferred as a guide, but it is difficult to confirm whether the center hole has been cut accurately at the center.
本発明の特徴は、上記中ノビ孔の直径とほぼ同じかそれ
よりわずかに大きい中心孔ガイド円をカッティング時に
被カソテイノグ層に形成しておく点にある。A feature of the present invention is that a center hole guide circle that is approximately the same as or slightly larger than the diameter of the center hole is formed in the layer to be cut during cutting.
こうして被カッティング層に付けた中心孔ガイド円は電
鋳後メタ／パー原板１に中心孔ガイド円５として転写さ
れるので、この中心孔ガイド円５を案内として切削を行
うことができ、また、切削後の偏心度評価も容易に行う
ことができる。In this way, the center hole guide circle attached to the layer to be cut is transferred to the meta/par original plate 1 after electroforming as the center hole guide circle 5, so cutting can be performed using the center hole guide circle 5 as a guide. Eccentricity evaluation after cutting can also be easily performed.
なお、スタンパ−原板ｌの外周には余分な電鋳部分４が
あり、この部分４にも前記と同じ外周ガイド円６を付け
ておけばメタ／パー外径の切除がよシ正確に行える。Incidentally, there is an extra electroformed part 4 on the outer periphery of the stamper original plate 1, and if the same outer periphery guide circle 6 as described above is attached to this part 4, the cutting of the meta/par outer diameter can be performed more accurately.
上記中心孔ガイド円５の直径は現実に切削する中心孔の
直径とほぼ同一かわずかに大きくてよく、実際には両者
の差が１００μｍ以下になるようにするのが好ましい。The diameter of the center hole guide circle 5 may be approximately the same as or slightly larger than the diameter of the center hole to be actually cut, and it is actually preferable that the difference between the two is 100 μm or less.
上記中心ガイド円５の巾は特に限定されないが、５０μ
ｍ以下で十分である。The width of the center guide circle 5 is not particularly limited, but is 50 μm.
m or less is sufficient.
中心孔切削時および切削後の偏心度の評価は顕微鏡を用
いて容易に行うことができる。Eccentricity can be easily evaluated using a microscope during and after cutting the center hole.
また、上記中心孔ガイド円はスタンパ−を金型のスタン
パ−押えに取付ける締付ける際にメタ／パーがスタンパ
−押えに対して正確に中心に来ているか否かを評価する
ときにも利用できる。すなわち、メタ／パー押えを締付
けた際にスタンパ−に付く押圧痕と上記中心孔ガイド円
とを目視で観察してスタンパ−の金型への心出しをより
正確に行うことができる。The center hole guide circle can also be used to evaluate whether the metal/par is accurately centered with respect to the stamper holder when the stamper is attached to and tightened to the stamper holder of the mold. That is, it is possible to more accurately center the stamper in the mold by visually observing the press marks left on the stamper and the center hole guide circle when the meta/par presser is tightened.
以下、実施例を用いて本発明を説明する。The present invention will be explained below using examples.
実施例
直径３５０ｍｍの研磨ガラス上にフォトレジストをスピ
ンコードして形成したフォトレジスト層にレーザーを用
いて２μｍピンチのスパイラル状トラック溝を半径が４
０ｍｍから１５０ｍｍの情報区域にカッティングした。Example: A photoresist layer was formed by spin-coding a photoresist on a polished glass having a diameter of 350 mm, and a spiral track groove with a radius of 4 μm was formed using a laser.
The information area was cut from 0 mm to 150 mm.
このカッティング工程と同時に、フォトレジスト層の中
心に半径が３２．５５ ｍｍの所に巾２０μの中心・ガ
イド円をカッティングした。Simultaneously with this cutting process, a center/guide circle with a width of 20 μm was cut at the center of the photoresist layer at a radius of 32.55 mm.
こうして得られたカッティング済み原盤からニッケル電
鋳により作ったメタ／パー原板の中心に切削工具を用い
て中心孔を切削した。得られた中心孔を穿孔したメタ／
パーを倍率２００倍の顕微鏡を用いて調べた結果を第２
図に示す。この図はスタンパ−１の中心孔の直径方向対
向４ヶ所Ａ７Ｂ、Ｃ，Ｄの顕微鏡写真を模写したもので
、中心ガイド円５と実際に切削した中心孔の端縁１０と
の間の距離ｄは以下に示すような値であった０従って、
このスタンパ−の最大偏心量は６８−４０＝２８μｍで
あることが評価できた。A center hole was cut using a cutting tool in the center of a meta/par original plate made by nickel electroforming from the thus obtained cut master plate. Meta/
The results of examining the par using a microscope with a magnification of 200x are shown in the second
As shown in the figure. This figure is a reproduction of a microscopic photograph of four diametrically opposed locations A7B, C, and D of the center hole of the stamper 1, and shows the distance d between the center guide circle 5 and the edge 10 of the center hole that was actually cut. was the value shown below. Therefore,
It was evaluated that the maximum eccentricity of this stamper was 68-40=28 μm.
以上の説明から明らかなように、本発明の方法を用いる
ことによりメタ／パーの偏心度が簡単に評価でき、従っ
て高密度情報記録担体用ディスクの偏心量を正確に制御
することが可能となり、蟲技術分野に多大の貢献をする
ものである。As is clear from the above explanation, by using the method of the present invention, the degree of eccentricity of meta/par can be easily evaluated, and therefore it is possible to accurately control the amount of eccentricity of a disk for a high-density information recording carrier. This will make a great contribution to the field of insect technology.
第１図は中心孔切削前のメタ／パー原板を示す概念的斜
視図。
第２図は本発明による中心孔の偏心度評価法の一実施例
を示す倍率２００倍の顕微鏡写真の模写図である。
（図中符号）
１°スタ／パー原板、 ２：情報記録区域、５：中心孔
ガイド円、 １０：中心孔端縁、Ａ、Ｂ、Ｃ，Ｄ 観察
位置FIG. 1 is a conceptual perspective view showing the meta/par original plate before cutting the center hole. FIG. 2 is a copy of a micrograph at a magnification of 200 times, showing an example of the method for evaluating the eccentricity of a central hole according to the present invention. (Symbols in the figure) 1° star/par original plate, 2: Information recording area, 5: Center hole guide circle, 10: Center hole edge, A, B, C, D Observation position
Claims (1)
口を有する高密度情報記録用プラスチックディスクの成
形時に用いられるメタ／バーの製作方法であって、基材
上に被カッティング層を形成し、この被カッティング層
に情報をカッティングした原盤上に金属層を形成し、こ
の金属層を原盤から剥してメタ／パー原板を作り、仁の
スタンパ−原板に中心孔を穿孔して最終メタ／パーを製
作する方法において、上記の情報のカッティング時に、
上記の中心孔の直径と同じかわずかに大きい直径の中心
孔ガイド円をカッティングすることを特徴とするスタン
パ−の製作方法。 ２）上記の被カッティング層がフォトレジスト層である
ことを特徴とする特許請求の範囲第１項記載の方法。 ３）上記の被カッティング層が無機材料または金属であ
ることを特徴とする特許請求の範囲第１項に記載の方法
。 ４）上記の原盤上に形成される金属層が電鋳によって形
成されることを特徴とする特許請求の範囲第１項記載の
方法。 ５）上記の中心孔の穿孔が機械的カッターによって行わ
れることを特徴とする特許請求の範囲第１項記載の方法
。 ６）上記の中心孔の穿孔がレーザーによって行われるこ
とを特徴とする特許請求の範囲第１項に記載の方法。 ７）上記の中心孔ガイド円の直径が上記中心孔の直径よ
り２０〜１００μだけ大きいことを特徴とする特許請求
の範囲第１項記載の方法。 ８）ターンテーブルの中心スピンドルと係合する中心開
口を有する高密度情報記録用プラスチックディスクの成
形時に用いられる中心孔を有するスタンパ−であって、
メタ／パー上に上記中心孔の直径と同じかまたはわずか
に大きい直径の中心孔ガイド円か設けられていることを
特徴とするメタ／パー。 ９）上記の中心孔ガイド円の直径が上記中心孔の直径と
同じか筐だけ１００μ以内だけ大きいことを特徴とする
特許請求の範囲第８項記載のスタノパー。[Scope of Claims] 1) A method for manufacturing a meta/bar used in molding a plastic disk for high-density information recording having a central opening that engages with a central spindle of a turntable, comprising: a layer to be cut on a base material; A metal layer is formed on the master disc with information cut on the layer to be cut, this metal layer is peeled off from the master disc to create a meta/par master board, and a center hole is punched in the stamper master board for the final stamping. In the method of producing meta/par, when cutting the above information,
A method for manufacturing a stamper, comprising cutting a center hole guide circle having a diameter that is the same as or slightly larger than the diameter of the center hole. 2) The method according to claim 1, wherein the layer to be cut is a photoresist layer. 3) The method according to claim 1, wherein the layer to be cut is an inorganic material or a metal. 4) The method according to claim 1, wherein the metal layer formed on the master is formed by electroforming. 5) A method according to claim 1, characterized in that the drilling of the central hole is carried out by a mechanical cutter. 6) The method according to claim 1, characterized in that the drilling of the central hole is performed by a laser. 7) A method according to claim 1, characterized in that the diameter of said central hole guide circle is 20 to 100 microns larger than the diameter of said central hole. 8) A stamper having a center hole used in molding a plastic disk for high-density information recording having a center opening that engages with the center spindle of a turntable, comprising:
A meta/par characterized in that a center hole guide circle having a diameter equal to or slightly larger than the diameter of the center hole is provided on the meta/par. 9) The stanoper according to claim 8, wherein the diameter of the center hole guide circle is the same as the diameter of the center hole or is larger than the diameter of the center hole by 100 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3222984A JPS60177452A (en) | 1984-02-22 | 1984-02-22 | Method for punching center hole on stamper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3222984A JPS60177452A (en) | 1984-02-22 | 1984-02-22 | Method for punching center hole on stamper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60177452A true JPS60177452A (en) | 1985-09-11 |
Family
ID=12353138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3222984A Pending JPS60177452A (en) | 1984-02-22 | 1984-02-22 | Method for punching center hole on stamper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60177452A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0284387A2 (en) * | 1987-03-24 | 1988-09-28 | Mitsubishi Denki Kabushiki Kaisha | Master disk |
| WO1999063535A1 (en) * | 1998-05-29 | 1999-12-09 | Obducat Aktiebolag | Raw matrix for optical storage media and a method of manufacturing such a matrix |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56169234A (en) * | 1980-05-29 | 1981-12-25 | Trio Kenwood Corp | Manufacture of recorded disk of optical record disk |
| JPS5814336A (en) * | 1981-07-20 | 1983-01-27 | Toshiba Corp | Information storage medium and its production |
| JPS6027426A (en) * | 1983-07-26 | 1985-02-12 | Nikka Eng Kk | Device for blanking inside and outside diameters of stamper plate |
-
1984
- 1984-02-22 JP JP3222984A patent/JPS60177452A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56169234A (en) * | 1980-05-29 | 1981-12-25 | Trio Kenwood Corp | Manufacture of recorded disk of optical record disk |
| JPS5814336A (en) * | 1981-07-20 | 1983-01-27 | Toshiba Corp | Information storage medium and its production |
| JPS6027426A (en) * | 1983-07-26 | 1985-02-12 | Nikka Eng Kk | Device for blanking inside and outside diameters of stamper plate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0284387A2 (en) * | 1987-03-24 | 1988-09-28 | Mitsubishi Denki Kabushiki Kaisha | Master disk |
| WO1999063535A1 (en) * | 1998-05-29 | 1999-12-09 | Obducat Aktiebolag | Raw matrix for optical storage media and a method of manufacturing such a matrix |
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