JPS60177188A - Formation of fine calcined pattern film consisting of noble metal - Google Patents

Abstract

PURPOSE:To form a calcined pattern film which consists of only the noble metal and is dense and strong by mixing the ultrafine noble metal with a carrier gas and spraying the mixture through a nozzle to the surface of a heated base material. CONSTITUTION:A fluid mixture is prepd. by putting <=0.1mum ultrafine particles of a noble metal such as Ag, Au, Pt, Pd or the like into a vessel, blowing a carrier gas such as H2, He or the like into the vessel from the bottom thereof and suspending and stirring the ultrafine particles of the noble metal. A base material consisting of glass, heat resistant plastic or other material such as metal or the like is disposed into the inside of the chamber which is shut off from the outdoor air and is evacuated to a vacuum state. The base material is heated to >=150 deg.C and the tip of a nozzle is disposed apart at about 0.5mm. spacing from the surface thereof. The fluid mixture composed of the pulverous noble metal and the carrier gas is sprayed from the tip of the nozzle while the base body is moved according to the pattern. The calcined pattern film consisting of the noble metal is quickly and easily formed on the base material surface at a high yield.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for forming a fine baked pattern film using a noble metal.

Conventionally, fine patterns made of precious metals were created by mixing a small amount of binder with the desired precious metal particles and then creating a paste.
By this, a desired fine pattern is drawn on the surface of the base material to be turned, and then it is heated to a high temperature of approximately 800°C or higher to evaporate the organic solvent of the binder and bind the precious metal particles to each other through the crosslinking reaction of the binder. However, due to the volatilization of the binder and organic solvent, the patterns produced are porous and have weak mechanical strength, and because paste is used, fine particles of a specified fineness cannot be formed. To provide a method for forming a firing pattern made only of a durable precious metal material, which is advantageous in producing a pattern that is thick and does not require the preparation of a predetermined paste using a solvent, binder, etc. The specific desire is to transport at least one kind of ultrafine particles of a noble metal in a carrier gas and spray the heated substrate surface from a nozzle in a predetermined fine pattern.

Next, the present invention will be explained in detail.

Ag, Au, Pt, P with an average particle size of 0.1 μm or less
The raw material is precious metal ultrafine particles such as d, which are mixed with a carrier gas, preferably a gas such as H2 or He that is easily diffused, and this mixed fluid is sprayed onto the heated substrate surface from all nozzles in a predetermined shape. Draw a pattern. The heating temperature of the base material is
Since it is made of ultrafine particles of precious metal, it can be fired at temperatures as low as 150°C. Therefore, as the base material, ordinary glass base materials, heat-resistant synthetic resin materials, and of course other inorganic materials can be used.

Metal materials are also acceptable. In this way, any dense firing pattern (turns) such as a pattern of points, lines, etc. can be obtained on the surface of the substrate (in the turn forming operation, the substrate is heated, so Gases such as H, and Hθ are easily expelled from the fired film due to their inherently good diffusivity and heating, resulting in a dense fired film containing no gas (turns).

Example: Au ultrafine particles 309 with an average particle size of 0.05 μm are placed in a glass container with an internal volume of 11, and a gas source is blown into the container from the bottom through a supply pipe connected to the container. A suspended agitated mixed fluid is obtained. The container has a conveyor pipe with an inner diameter of 2 am and a length of 111+ connected to the upper part of the container, and a circular diameter of 0.07 gm attached to the tip of the pipe for exchange.
It has a nozzle. The nozzle faces a room isolated from the outside air, and a glass substrate is provided below with a distance of 0.50'i between the nozzle tip and the nozzle tip. The glass substrate is fixed on a movable table and bamboo is killed. For example, the room is evacuated and kept in a vacuum state. The mixed fluid is sprayed from the container through a conveying pipe from a nozzle onto the surface of the substrate, which has been heated to, for example, 150° C. in advance.

During this time, the substrate was moved at a speed of 50 m/miy+.

In this way, the width of 0.064 m, the length of 5311, the thickness of 0.2 m, and the bulk density of 12.89/cd (
A linear firing pattern with a density ratio of 68%) was obtained.

The specific resistance of the fired pattern was 4.8 x 10-60 scratches. The adhesion strength of the film to the substrate and the strength of the film itself were also sufficient for practical use.

The amount of Au ultrafine particles required to form the film was 8.68 μm. No ultrafine particles scattered during the formation of this film were observed in the SICM electron microscope observation or even within a 100-width area around the pattern. It has been found that more than 99% of the Sugrey Juban is used for pattern formation.

When forming a pattern by mixing conventional Au fine powder into a polymer binder to form an Au paste and then spraying it onto an unheated substrate, it is necessary to mix Au powder into a polymer binder and then spray it onto an unheated substrate to form a pattern. Fine powder adheres and remains, and the yield is
It was 75%. Furthermore, in order to obtain a resistivity of 10<-5 >[Omega].alpha. from the same linear pattern as above, it was necessary to heat the pattern at 600 DEG C. for 11 hours or more.

In this way, according to the present invention, the raw material is ultrafine precious metal particles, which are mixed with the carrier gas and conveyed, and the mixed fluid is sprayed from the nozzle onto the heat base surface, so that the yield is high and easy. It has the effect of quickly obtaining a dense and fine firing pattern.

Claims (1)

[Claims] 1. The production of a fine baked pattern film made of precious metals, characterized by carrying and conveying at least one type of ultrafine particles of 'IIj metal in a carrier gas, and spraying the heated substrate surface from a nozzle in a predetermined fine pattern. Formation method.