JPS60175001A - Microlens array - Google Patents
Microlens arrayInfo
- Publication number
- JPS60175001A JPS60175001A JP2946484A JP2946484A JPS60175001A JP S60175001 A JPS60175001 A JP S60175001A JP 2946484 A JP2946484 A JP 2946484A JP 2946484 A JP2946484 A JP 2946484A JP S60175001 A JPS60175001 A JP S60175001A
- Authority
- JP
- Japan
- Prior art keywords
- transparent
- mask
- resin
- microlens array
- photodissociative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00278—Lenticular sheets
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Optical Filters (AREA)
- Laminated Bodies (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の属する技術分野〕 本発明岐、マイクロレンズの形成方法に関する。[Detailed description of the invention] [Technical field to which the invention pertains] The present invention relates to a method for forming a microlens.
近距離、例えば数の程度離れた原稿を感光性機能素子上
に結像する場合、従来は、第1図に示すようなグレーデ
ツトインデックスのある光ファイバーを束ねレンズとし
て用いていた。しかしながら、この種の構造のレンズは
、光路長が長くなり光路での光損失が大きくなる欠点が
あった。一方第1図および第2図に示す如く微少レンズ
を多数同一平面上に形成することは、上記光損失を減す
上で極めて有利であるが、この小さなレンズを形成する
こと車体が極めて難しい技術であった。When an image of an original document placed at a short distance, for example, a few seconds apart, is to be imaged on a photosensitive functional element, conventionally, optical fibers having a graded index as shown in FIG. 1 have been used as a bundle lens. However, lenses with this type of structure have the disadvantage that the optical path length is long and the optical loss in the optical path is large. On the other hand, forming a large number of microlenses on the same plane as shown in Figs. 1 and 2 is extremely advantageous in reducing the above-mentioned optical loss, but it is extremely difficult to form such small lenses on the car body using technology. Met.
本発明は、係る車状に鑑みなされたもので、比較的簡単
に微少レンズを形成することが可能なマイクロレンズの
形成方法を提供するものであるっ〔発明の概要〕
本発明によれば、透明基体に紫外線で重合度が解離する
透明な樹脂を塗布し5円形のマスクパターンにて露光し
て局部的に解離部分と非解離部分を形成し、解離部分を
除去して凹凸を形成することよシ、この白部分をレンズ
として機能させることが可能となる。The present invention has been developed in view of the wheel shape, and provides a method for forming microlenses that can relatively easily form microlenses. [Summary of the Invention] According to the present invention, Applying a transparent resin whose degree of polymerization dissociates with ultraviolet rays to a transparent substrate, exposing it to light using a 5-circular mask pattern to locally form dissociated portions and non-dissociated portions, and remove the dissociated portions to form irregularities. Well, this white part can now function as a lens.
以上説明した本発明によれば、紫外線で解離する樹脂を
使用することによシ透明基体上に極めて容易にマイクロ
レンズの形成が可能となシ、薄型の光損失が少ないマイ
クロレンズを提供でキル効果がある。According to the present invention described above, microlenses can be formed extremely easily on a transparent substrate by using a resin that dissociates with ultraviolet rays, and microlenses that are thin and have low optical loss can be provided. effective.
以下図面を参照して本発明の実施例を詳細に説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第3図(a)乃至(C)は、本発明に係るマイクロレン
ズの形成方法を説明するための部分的切欠斜視図である
。FIGS. 3(a) to 3(C) are partially cutaway perspective views for explaining the method of forming a microlens according to the present invention.
すなわち、第3図(a)において、10はガラス或いは
プラスチック環の透明な平板で形成された基体であって
、この基体10の一方の表面に透明な光解離性樹脂層1
1をコートする。この光解離性樹脂層11としては例え
ば、紫外線で解離するアクリル。That is, in FIG. 3(a), reference numeral 10 denotes a base formed of a transparent flat plate of glass or plastic ring, and a transparent photolabile resin layer 1 is provided on one surface of this base 10.
Coat 1. This photo-dissociable resin layer 11 is made of, for example, acrylic that dissociates under ultraviolet light.
ウレタン、エポキシ、シリコーン等がある。このような
樹脂層11の上に第3図(b)図の如く部分的に透明な
マスク13で露光して現像することによってマイクロレ
ンズアレイが実現出来る。更に詳細に述べれば第4図に
示すようにマスク13は5円状のパターンが形成されて
おり1円は周辺部に向って逐次透過率が変化している。There are urethane, epoxy, silicone, etc. A microlens array can be realized by exposing and developing a partially transparent mask 13 on such a resin layer 11 as shown in FIG. 3(b). More specifically, as shown in FIG. 4, the mask 13 is formed with a five-circle pattern, and the transmittance of each circle changes successively toward the periphery.
従って、光の照射によシ光゛解離性樹脂の重合度は連続
的に変化する今、重合した光解離性樹脂の断面が円状に
なる様に、マスクの透過率を選べば、断面が球状の透明
レジストを形成する事ができる。Therefore, since the degree of polymerization of a photodissociable resin changes continuously when irradiated with light, if the transmittance of the mask is selected so that the cross section of the polymerized photodissociable resin becomes circular, the cross section can be changed. A spherical transparent resist can be formed.
マイクロレンズアレイのパターンとしては第5図の如き
円ドツトのくりかえしパターンである。The pattern of the microlens array is a repeating pattern of circular dots as shown in FIG.
各日のはじめの重合度を第4図にて説明する。The degree of polymerization at the beginning of each day is illustrated in FIG.
マスクの濃度が連結して変化している時、レジストの重
合度は第4図の如く曲面をもつ断面となシレンズが形成
される。When the concentration of the mask is varied continuously, the degree of polymerization of the resist is such that a cylens with a curved cross section is formed as shown in FIG.
又、この様な連続的に濃度の変るパターンの代9に、第
6図の如く乾板14を離して置き、光の回折を利用して
レジスト2に第4図と同様のレンズを形成する事ができ
る。Furthermore, in the interval 9 of such a pattern in which the density changes continuously, the dry plate 14 is placed apart as shown in FIG. 6, and a lens similar to that shown in FIG. 4 is formed on the resist 2 by utilizing the diffraction of light. I can do it.
またマイクロレンズアレイは、ガラス板1の片面だけで
なく、第7図に示す如く両面(11,11’)に形成す
る事により、正立の像を得る事ができる。Furthermore, by forming the microlens array not only on one side of the glass plate 1 but also on both sides (11, 11') as shown in FIG. 7, an erect image can be obtained.
更に第8図に示すようにガラス上に、色フイルタ−14
−1,14−2,14−3を形成し、次いでレンズ2,
3を形成する事により、カラーのレンズアレイが形成で
きる。。Further, as shown in FIG. 8, a color filter 14 is placed on the glass.
-1, 14-2, 14-3, then lenses 2,
3, a color lens array can be formed. .
第1図および第2図は、マイクロレンズアレーの原理構
成を示す斜視図および部分拡大斜視図。
第3図は、本発明によるマイクロレンズアレーの形成法
の一実施例を示した部分拡大視図。
第4図は、マイクロレンズアレイを得るマスクの説明図
、第5図は、マスクの一例を示す平面図。
第6図は、マスクの他の例を示す断面図、第7図および
第8図は本発明の変形例を示す断面図。
lO・・・透BA基体
11・・・透明樹脂
13・・・パターンマスク
代理人 弁理士 則近憲佑(ほか1名)第 l 図
第 3 図
第 4 図
第 5 図
第 6 図1 and 2 are a perspective view and a partially enlarged perspective view showing the basic structure of a microlens array. FIG. 3 is a partially enlarged perspective view showing an embodiment of the method for forming a microlens array according to the present invention. FIG. 4 is an explanatory diagram of a mask for obtaining a microlens array, and FIG. 5 is a plan view showing an example of the mask. FIG. 6 is a sectional view showing another example of the mask, and FIGS. 7 and 8 are sectional views showing modified examples of the present invention. lO...Transparent BA substrate 11...Transparent resin 13...Pattern mask Agent Patent attorney Kensuke Norichika (and one other person) Figure l Figure 3 Figure 4 Figure 5 Figure 6
Claims (5)
合度が解離する透明な樹脂を塗布し1円形の少くも1つ
のマスクパターンにて露光し、現像する事によシレンズ
を形成する事を特徴とするマイクロレンズアレー。(1) A transparent substrate such as glass or plastic is coated with a transparent resin whose degree of polymerization is dissociated by ultraviolet rays, and a lens is formed by exposing it to at least one circular mask pattern and developing it. microlens array.
アレー。(2) The above-mentioned micropattern is an array with continuously changing density.
イクロレンズアレー(3) The microlens array according to claim 1, wherein the micropattern is formed at a 4° angle using a diffraction effect.
アレー。(4) The microlens array according to claim 1, wherein the lenses are formed on both sides of a transparent substrate.
を介在させることを特徴とする特許請求の範囲第一項記
載のマイクロレンズアレー。(5) The microlens array according to claim 1, characterized in that a color filter is interposed between the transparent substrate and the lens.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2946484A JPS60175001A (en) | 1984-02-21 | 1984-02-21 | Microlens array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2946484A JPS60175001A (en) | 1984-02-21 | 1984-02-21 | Microlens array |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60175001A true JPS60175001A (en) | 1985-09-09 |
Family
ID=12276819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2946484A Pending JPS60175001A (en) | 1984-02-21 | 1984-02-21 | Microlens array |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60175001A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6480901A (en) * | 1987-09-22 | 1989-03-27 | Brother Ind Ltd | Microlens and its production |
US5239412A (en) * | 1990-02-05 | 1993-08-24 | Sharp Kabushiki Kaisha | Solid image pickup device having microlenses |
WO1995006887A3 (en) * | 1993-09-02 | 1995-04-06 | Nashua Corp | Improvements in or relating to microlens screens and the like |
JPH07509325A (en) * | 1993-04-29 | 1995-10-12 | ライカ リトグラフィー システーメ イエーナ ゲーエムベーハー | Stepped lens with Fresnel surface structure made by lithography and manufacturing method |
-
1984
- 1984-02-21 JP JP2946484A patent/JPS60175001A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6480901A (en) * | 1987-09-22 | 1989-03-27 | Brother Ind Ltd | Microlens and its production |
US5239412A (en) * | 1990-02-05 | 1993-08-24 | Sharp Kabushiki Kaisha | Solid image pickup device having microlenses |
EP0627637A1 (en) * | 1990-02-05 | 1994-12-07 | Sharp Kabushiki Kaisha | Method of forming microlenses |
JPH07509325A (en) * | 1993-04-29 | 1995-10-12 | ライカ リトグラフィー システーメ イエーナ ゲーエムベーハー | Stepped lens with Fresnel surface structure made by lithography and manufacturing method |
WO1995006887A3 (en) * | 1993-09-02 | 1995-04-06 | Nashua Corp | Improvements in or relating to microlens screens and the like |
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