JPS60174899A - Polishing device for metallic surface - Google Patents

Polishing device for metallic surface

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Publication number
JPS60174899A
JPS60174899A JP19353483A JP19353483A JPS60174899A JP S60174899 A JPS60174899 A JP S60174899A JP 19353483 A JP19353483 A JP 19353483A JP 19353483 A JP19353483 A JP 19353483A JP S60174899 A JPS60174899 A JP S60174899A
Authority
JP
Japan
Prior art keywords
metal
radioactive
anode
cathode
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19353483A
Other languages
Japanese (ja)
Inventor
Masami Odajima
小田島 正見
Tetsuo Morisue
森末 哲夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP19353483A priority Critical patent/JPS60174899A/en
Publication of JPS60174899A publication Critical patent/JPS60174899A/en
Pending legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE:To polish a metallic surface and to remove thoroughly radioactive contaminants from a metallic surface contaminated by a radioactive material by conducting electricity between the metallic surface as anode and a cathode facing said surface in parallel therewith while injecting an aq. neutral inorg. salt soln. contg. hard insulating particles to the metallic surface which is the anode. CONSTITUTION:A parallel cathode plate 2 provided with an injection nozzle 3 is disposed in the upper part of a nuclear reactor member 1 onto which a radioactive material sticks and of which the surface of the material itself is irradiated. The metallic plate 1 itself is connected via a juncture 5 to the anode of a DC power source 4. An anode 1 and cathode 2 are insulated by an insulating material 6 and electricity is conducted thereto while the electrolyte in an electrolyte storage tank 1 is injected to the surface of the anodic plate 1 to be treated from the nozzle 3. The electrolyte contg. insulating particles such as glass particles or ceramics such as alumina and dissolved therein with NaNO3, NaONO2, Na2SO4, etc. at 5-30% is used. The radioactive deposit as well as the surface of the member 1 are ground by which the radioactive contaminants are removed therefrom.

Description

【発明の詳細な説明】 [発明の技術分野] 本発明は金属表面研摩装置に係り、特に原子力発電所等
で発生した放射性物質が金属表面に付着した金属の表向
を研摩し、除染するための金属表面研摩装置に関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a metal surface polishing device, particularly for polishing and decontaminating the surface of metal on which radioactive substances generated in nuclear power plants, etc. have adhered. This invention relates to a metal surface polishing device for use in metal surface polishing.

[発明の技術的背景とその問題点] 一般に、原子力発電所等で発生する放射性金属廃棄物は
原子力発電所内に永久貯蔵され、環境にfV’Efを与
えないようにしている。しかし、このように永久貯蔵す
ると放射性金属廃棄物の貯jfliffiは増加の一途
をたどり、貯蔵スペースの確保が困難となる。特に1原
子力発電所等の段僑の改修等の際に生じる配管等はその
寸法が大きくなっており、また容易に減容処理すること
ができないためその貯蔵が困難である。このため、放射
性金属廃棄物を除染し、その放射能レベルを自然界にお
ける放開催レベルつまりバックグラウンドレベルまで低
下させて、一般廃棄物と同様に取扱い得るようにするこ
とが検討されている。しかしながら、放射性金属廃棄物
はその表面の材質自体が放射化されているため、表面に
堆積している放射性クラッドを除去しただけでは完全な
除染はできず、金属自体も研摩してこの放射化された表
面層を除去する必要がある。この放射能除染に際してガ
ラス等の砥粒を用いたブラスティングまたは砥石を用い
た研削によるホーニング除染装置ではクラッドの除去は
容易であるが、反面材質自体の研削速度が近く、また研
削深さにも限界がある。さらに金属の材質により砥石を
交換する必要があり、これらの表面を確実に研摩、除染
することが困難である。
[Technical Background of the Invention and Problems Therewith] Generally, radioactive metal waste generated at nuclear power plants and the like is permanently stored within the nuclear power plant to prevent it from imparting fV'Ef to the environment. However, if such radioactive metal waste is stored permanently, the amount of radioactive metal waste will continue to increase, making it difficult to secure storage space. In particular, piping and the like generated during the renovation of tiered facilities at nuclear power plants and the like are large in size and cannot be easily reduced in volume, making it difficult to store them. For this reason, consideration is being given to decontaminating radioactive metal waste to reduce its radioactivity level to the level found in nature, that is, to the background level, so that it can be handled in the same way as general waste. However, since the material on the surface of radioactive metal waste is itself radioactive, complete decontamination cannot be achieved simply by removing the radioactive cladding deposited on the surface; the metal itself must also be polished to remove the radioactive cladding. It is necessary to remove the surface layer. During radioactive decontamination, it is easy to remove the crud using a honing decontamination device that uses abrasive grains such as glass or grinding using a grindstone, but on the other hand, the grinding speed of the material itself is similar, and the grinding depth is There are also limits. Furthermore, it is necessary to replace the grindstone depending on the metal material, and it is difficult to reliably polish and decontaminate these surfaces.

また金属自体を研摩する方法としては、従来の電解研摩
法が知られているが、金属の材質によりその金属表面に
酸化皮膜が生成しこの酸化皮膜内に放射性物質がとりこ
まれて、再汚染する問題がある。このため強酸の高濃度
電解液が使用され、電解条件も高精度で制御する必要が
あり、実用化が困難である。さらに絶縁性の付着物例え
ばペンキ類が存在する場合は電解研摩されないため除染
が困難である。
In addition, the conventional electrolytic polishing method is known as a method of polishing the metal itself, but depending on the material of the metal, an oxide film is formed on the surface of the metal, and radioactive substances are incorporated into this oxide film, resulting in recontamination. There's a problem. For this reason, a highly concentrated electrolyte with a strong acid is used, and the electrolytic conditions must be controlled with high precision, making it difficult to put it into practical use. Furthermore, if insulating deposits such as paint are present, decontamination is difficult because electrolytic polishing is not performed.

[発明の目的] 本発明は以上の事情にもとづいてなされたもので、その
目的は放射性金属廃棄物の表面を確実に研摩でき、これ
らを完全に除染して放射能レベルをバックグラウンドレ
ベルまで低下させて、一般の廃棄物と同様に取扱うこと
ができるまで除染することができる放射性金属表面の研
摩装置を提供 。
[Purpose of the Invention] The present invention was made based on the above circumstances, and its purpose is to reliably polish the surface of radioactive metal waste, completely decontaminate it, and reduce the radioactivity level to the background level. Provides equipment for polishing radioactive metal surfaces that can be degraded and decontaminated to the point where they can be treated like general waste.

することにある。It's about doing.

[発明の概要] すなわち本発明は、放射性物質で汚染した原子力系機器
の金属表面を陽極とし、該金属表面と平行に陰極を対峙
させ、前記金属表面と陰極の間に中性無機塩水溶液に絶
縁性の硬質粒子、例えばガラス粒子を混入した電解液に
噴出圧力を与えて汚染金属面に向けて噴射させることに
より、電解研摩作用により汚染金属面を溶解させると共
に、前記絶縁性硬質粒子の衝突時の衝撃力で前記汚染面
の付着物や電解作用により生じた酸化皮膜を除去する金
属表面研摩装置である。また、金属表面と平行に対峙す
る陰極と、該金属表面及び陰極にそれぞれ直流電流を流
す電流電源と、絶縁性硬質粒子を含む中性無機塩水溶液
電解液に噴出圧力を加゛ える高圧空気源と、この高圧
空気源から噴出圧力が附与された前記電解液を金属表面
に向け、前記陰極と金属面の間に噴射するホーニング・
ガンから構成されたことを特徴とする金属表面研摩装置
である。
[Summary of the Invention] That is, the present invention uses a metal surface of nuclear equipment contaminated with radioactive substances as an anode, a cathode facing parallel to the metal surface, and a neutral inorganic salt aqueous solution is placed between the metal surface and the cathode. By applying jet pressure to an electrolytic solution mixed with insulating hard particles, such as glass particles, and jetting it toward the contaminated metal surface, the contaminated metal surface is dissolved by electrolytic polishing action, and the insulating hard particles collide. This is a metal surface polishing device that uses the impact force of time to remove deposits on the contaminated surface and oxide film formed by electrolytic action. In addition, a cathode facing parallel to the metal surface, a current power source that sends a direct current to the metal surface and the cathode, respectively, and a high-pressure air source that applies jet pressure to the neutral inorganic salt aqueous electrolyte containing insulating hard particles. and a honing process in which the electrolytic solution to which ejection pressure is applied from the high-pressure air source is directed toward the metal surface and injected between the cathode and the metal surface.
This is a metal surface polishing device characterized by comprising a gun.

本発明によれば、電解研摩により効率良く汚染金属表面
を溶解することができ、電解液は中性無機塩水溶液であ
るため取扱いが容易であり、8?!電解液は中和する必
要がないため二次廃棄物の発生を減少させることができ
る。さらに硬質粒子の噴射により付着物や酸化皮膜が除
去できるため電解作業のための前処理が不要となり、ま
た酸化皮膜内への取り込みによる再汚染が防止できる。
According to the present invention, the contaminated metal surface can be efficiently dissolved by electrolytic polishing, and since the electrolytic solution is a neutral inorganic salt aqueous solution, it is easy to handle. ! Since the electrolyte does not need to be neutralized, the generation of secondary waste can be reduced. Furthermore, since deposits and oxide films can be removed by spraying hard particles, pretreatment for electrolytic work is not necessary, and recontamination due to incorporation into the oxide film can be prevented.

[発明の実施例] 以下、第1図を参照しながら本発明に係る金属表面研摩
装置の一実施例を説明する。第1図において、符号1は
被処理金属で、この被処理金属1の表面に対峙するよう
に陰極2と、この陰極2の中心部を貫通して噴射ノズル
3が配置されている。
[Embodiment of the Invention] Hereinafter, an embodiment of a metal surface polishing apparatus according to the present invention will be described with reference to FIG. In FIG. 1, reference numeral 1 denotes a metal to be treated, and a cathode 2 and a spray nozzle 3 are disposed so as to face the surface of the metal to be treated 1 and to penetrate through the center of the cathode 2.

陰極2は直流電源4のマイナス極に接続されており、該
直流電源4のプラス極は被処理金属1の表面に載置され
た陽極接触部5を通して該陽極接触部5を外力で押しつ
けることにより被処理金属1の表面と電気的に接続され
ている。陰極2と被処理金属1の表面とは絶縁体6で電
気的に絶縁されている。噴射ノズル3は電解液貯留槽7
に接続され、貯留417は、加圧供給ポンプ8を通して
電解液供給槽9および電解液回収槽10に接続している
The cathode 2 is connected to the negative electrode of a DC power source 4, and the positive electrode of the DC power source 4 is connected to the positive electrode by pressing the anode contact portion 5 with an external force through the anode contact portion 5 placed on the surface of the metal to be treated 1. It is electrically connected to the surface of the metal to be processed 1. The cathode 2 and the surface of the metal to be treated 1 are electrically insulated by an insulator 6. The injection nozzle 3 is connected to the electrolyte storage tank 7
The reservoir 417 is connected to the electrolyte supply tank 9 and the electrolyte recovery tank 10 through the pressurized supply pump 8 .

以上の如く構成された本発明に係る金属表面研摩装置は
、まず研摩・除染すべき放射性被処理金属10表面に、
陽極接触部5陰極2およびと噴射ノズル3を所定位置に
設置する。次に NaNOs NaN0zまたはNaz、SO4の如き中
性無機塩の水溶液に絶縁性の硬質粒子、例えばガラス粒
子またはセラミックス粒子を混入した電解液を電解液供
給槽9から加圧供給ポンプ8を通して電解液貯留槽7に
送り、さらに噴射ノズル3より被処理金属1の表面に噴
出する。同時に直流電源4により被処理金属1と陰極2
にそれぞれ電圧を印加すると、電解液を通して電流が流
れることにより被処理金属1の表面が電解研摩される。
The metal surface polishing apparatus according to the present invention configured as above first applies the following steps to the surface of the radioactive metal 10 to be polished and decontaminated.
The anode contact portion 5, cathode 2, and injection nozzle 3 are installed at predetermined positions. Next, an electrolyte solution in which insulating hard particles, such as glass particles or ceramic particles are mixed into an aqueous solution of a neutral inorganic salt such as NaNOs, NaN0z, NaZ, or SO4, is passed from an electrolyte supply tank 9 through a pressurized supply pump 8 to an electrolyte reservoir. It is sent to a tank 7 and further sprayed onto the surface of the metal to be treated 1 from the spray nozzle 3. At the same time, the metal to be treated 1 and the cathode 2 are connected by the DC power supply 4.
When a voltage is applied to each, a current flows through the electrolytic solution, and the surface of the metal to be processed 1 is electrolytically polished.

そして、上記硬質粒子の衝突によって被処理金属1の表
面に付着している放射性クラッドが除去される。引き続
いて被処理金属内面の汚染層が電解研摩によって研削除
去される。なお、電解作用で生成する不動態酸化皮膜は
硬質粒子の衝突により除去される。その後除去された放
射性クラッドや汚染層の研削粉等は電解液で洗い流され
回収槽10に溜る。したがって、この被処理金属1は放
射性クラッドおよび内面の汚染層が除去され放射能レベ
ルが自然界のi制能レベルいわゆるバックグラウンドレ
ベルまで低下され、一般の廃棄物と同様に取扱うことが
できる。つぎに上記実施例の効果を確認するためのおこ
なった実験の結果を第2図によって説明する。第2図中
、曲線aは電解研摩のみを、曲線すはブラスティングと
電解研摩との組合せを示し、水平線Cはバックグラウン
ドを示している。なお、たて軸は表面汚染量を、横軸は
研削時間を任意単位で示している。この第2図から明ら
かなようにプラスティイブと電解研摩を組み合せること
により、研摩速度と研摩mを大きくすることができ、表
面の汚染量をバック・グラウンド・レベル以下にできる
。また、陰極2と被処理金属1の間に5〜20Vの電圧
を印加し、0.5〜2.5A/cm の電流密度の電流
を通電することにより電解研摩する。そして研削時間を
放射性物質が金属結晶組織に入り込んだ深さおよびその
濃度によって定まる表面汚染の程度に応じて適宜選定す
る。所定の放射能レベルまで除染した後は、前記陰極2
、噴射ノズル3および陽極接触部5を他の場所へ移動し
再設置して除染作業を繰り返す。電解液はNaN0aN
aNO2またはNazS04から選ばれた少なくとも一
種を5〜30ii1パーセント含む水溶液を使用する。
Then, the radioactive cladding adhering to the surface of the metal to be processed 1 is removed by the collision of the hard particles. Subsequently, the contaminant layer on the inner surface of the metal to be treated is removed by electrolytic polishing. Note that the passive oxide film generated by electrolytic action is removed by collision with hard particles. Thereafter, the removed radioactive cladding, grinding powder of the contaminated layer, etc. are washed away with the electrolytic solution and collected in the collection tank 10. Therefore, the radioactive cladding and the inner surface contamination layer are removed from the metal 1 to be treated, and the radioactivity level is reduced to the i-control level of the natural world, so-called background level, and it can be handled in the same way as general waste. Next, the results of an experiment conducted to confirm the effects of the above embodiment will be explained with reference to FIG. In FIG. 2, curve a shows only electrolytic polishing, curve 2 shows a combination of blasting and electrolytic polishing, and horizontal line C shows the background. Note that the vertical axis shows the amount of surface contamination, and the horizontal axis shows the grinding time in arbitrary units. As is clear from FIG. 2, by combining plastic and electrolytic polishing, the polishing speed and polishing m can be increased, and the amount of surface contamination can be brought below the background level. Further, electrolytic polishing is performed by applying a voltage of 5 to 20 V between the cathode 2 and the metal to be processed 1 and passing a current at a current density of 0.5 to 2.5 A/cm 2 . The grinding time is appropriately selected depending on the depth into which the radioactive substance has penetrated into the metal crystal structure and the degree of surface contamination determined by its concentration. After decontamination to a predetermined radioactivity level, the cathode 2
Then, the injection nozzle 3 and the anode contact part 5 are moved to another location and reinstalled, and the decontamination work is repeated. The electrolyte is NaN0aN
An aqueous solution containing 5 to 30ii1% of at least one selected from aNO2 or NazS04 is used.

なお、電流効率を向上させるため NaFを0.1〜2.50/L添加しても良い。In addition, in order to improve current efficiency NaF may be added in an amount of 0.1 to 2.50/L.

絶縁性の硬質粒子は例えばソーダ石灰ガラスのようなガ
ラス粒子、またはアルミニウムオキサイドの如きセラミ
ックス粒子が適当であるが、他の材料でもよい。
The insulating hard particles are suitably glass particles such as soda-lime glass, or ceramic particles such as aluminum oxide, but other materials may also be used.

以上の実施例では、電解液は使い捨ての場合について説
明したが、回収槽10からポンプ8で回収し循環使用す
るものでもよい。
In the above embodiments, the case where the electrolytic solution is disposable has been described, but it may be recovered from the recovery tank 10 by the pump 8 and used for circulation.

[発明の効果] 上述の如く本発明は除染すべき被処理金属を陽極とし、
該金属表面と平行に陰極を対峙させ、前 。
[Effect of the invention] As described above, the present invention uses the metal to be decontaminated as an anode,
The cathode was placed parallel to the metal surface and faced before.

2被処理金属と陰極の間に中性無機塩水溶液に絶縁性の
硬質粒子を混入した電解液に噴射圧力を加えて被処理金
属面に向けて噴射することにより被処理金属表面を電解
研摩するとともに、絶縁性硬質粒子の衝突時の衝激力で
付着物や電解作用で生じた不動態化酸化被膜を除去する
金属表面研摩装置である。したがって、本発明によれば
11iP質粒子の噴射により付着物や不動態化酸化被膜
が除去できるため効率よく電解研摩することができ、ま
た放射性金属廃棄物の放射能レベルをバックグラウンド
レベルまで下げることができ、さらにこの固体放射性廃
棄物を一般の廃棄物と同様に取扱うことができるなどそ
の効果は顕著なものがある。
2 Electrolytically polish the surface of the metal to be treated by applying injection pressure to an electrolytic solution containing insulating hard particles mixed in a neutral inorganic salt aqueous solution between the metal to be treated and the cathode and spraying it toward the metal surface to be treated. It is also a metal surface polishing device that uses the impact force generated when insulating hard particles collide to remove deposits and passivating oxide films produced by electrolytic action. Therefore, according to the present invention, since deposits and passivating oxide films can be removed by spraying 11iP particles, electrolytic polishing can be carried out efficiently, and the radioactivity level of radioactive metal waste can be lowered to the background level. It has remarkable effects, such as the ability to handle solid radioactive waste in the same way as general waste.

特にブラスティングのみを使用した場合に比べ、研削速
度は10倍以上増加し、研削深さに限界はなく、その制
御も容易で、研削物体の減耗量も半分以下になる。また
電解液も中性無機塩でも十分電解研摩の効果があられれ
、安全で取り扱いも容易である。
In particular, compared to when only blasting is used, the grinding speed is increased by more than 10 times, there is no limit to the grinding depth, it is easy to control, and the amount of wear on the grinding object is less than half. In addition, even a neutral inorganic salt as an electrolytic solution can sufficiently produce an electrolytic polishing effect, and is safe and easy to handle.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す。第2図は研摩時間と
表面汚染量の低減との関係を示す線図である。 1・・・被処理金属 2・・・陰極 3・・・噴射ノズル 4・・・直流電源5・・・陽極接
続部 7・・・電解液貯留槽8・・・加圧供給ポンプ 
9・・・電解液供給槽出願代理人 弁理士 菊 池 五
 部
FIG. 1 shows an embodiment of the invention. FIG. 2 is a diagram showing the relationship between polishing time and reduction in surface contamination amount. 1... Metal to be treated 2... Cathode 3... Injection nozzle 4... DC power supply 5... Anode connection part 7... Electrolyte storage tank 8... Pressurized supply pump
9... Electrolyte supply tank application agent Patent attorney Gobe Kikuchi

Claims (4)

【特許請求の範囲】[Claims] (1) 被処理金属を陽極にするための陽極接触部と、
前記被処理金属に対峙して設けられた陰極と、前記両電
極間に電圧を印加するための直流電源と、前記陰極を通
して前記被処理金属に電解液を噴射するための噴射ノズ
ルとを具備したことを特徴とする金属表面研摩装置。
(1) An anode contact part for making the metal to be treated an anode;
A cathode provided facing the metal to be treated, a DC power source for applying a voltage between the two electrodes, and an injection nozzle for injecting an electrolytic solution to the metal to be treated through the cathode. A metal surface polishing device characterized by:
(2) 電解液は絶縁性硬質粒子を混入した中性無機塩
の水溶液であることを特徴とする特許請求の範囲第1項
記載の金属表面研摩装置装買。
(2) The metal surface polishing apparatus according to claim 1, wherein the electrolytic solution is an aqueous solution of a neutral inorganic salt mixed with insulating hard particles.
(3) 絶縁性硬質粒子はソーダ石灰ガラスまたはアル
ミニウムオキサイドで、中性無機塩は硝酸ソーダ亜硝酸
ソーダ、硫酸ソーダから選ばれた少なくとも一種で、5
〜30重量パーセント溶解していることを特徴とする特
許請求の範囲第2項記載の金属表面研摩装置。
(3) The insulating hard particles are soda lime glass or aluminum oxide, the neutral inorganic salt is at least one selected from sodium nitrate, sodium nitrite, and sodium sulfate;
3. The metal surface polishing device according to claim 2, wherein the metal surface polishing device has a melt content of ˜30% by weight.
(4) 噴射ノズルの下流側には電解液貯留槽および加
圧供給ポンプが接続されていることを特徴とする特許請
求の範囲第1項記載の金属表面研摩装置。
(4) The metal surface polishing apparatus according to claim 1, wherein an electrolytic solution storage tank and a pressurized supply pump are connected to the downstream side of the injection nozzle.
JP19353483A 1983-10-18 1983-10-18 Polishing device for metallic surface Pending JPS60174899A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19353483A JPS60174899A (en) 1983-10-18 1983-10-18 Polishing device for metallic surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19353483A JPS60174899A (en) 1983-10-18 1983-10-18 Polishing device for metallic surface

Publications (1)

Publication Number Publication Date
JPS60174899A true JPS60174899A (en) 1985-09-09

Family

ID=16309672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19353483A Pending JPS60174899A (en) 1983-10-18 1983-10-18 Polishing device for metallic surface

Country Status (1)

Country Link
JP (1) JPS60174899A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462499A (en) * 1987-08-31 1989-03-08 Fujitsu Ltd Spray type etching method
GB2319259A (en) * 1996-11-15 1998-05-20 Babcock Rosyth Defence Limited reducing radionucleide contamination of a metallic component
KR100557681B1 (en) 2005-09-30 2006-03-10 엑셀랩주식회사 Polishing method and the system for test of metals structure
JP2007107025A (en) * 2005-10-11 2007-04-26 Hitachi Zosen Corp Method for removing thin film of electroconductive metal oxide, and apparatus therefor
CN105316755A (en) * 2014-07-29 2016-02-10 盛美半导体设备(上海)有限公司 Electrochemical polishing equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462499A (en) * 1987-08-31 1989-03-08 Fujitsu Ltd Spray type etching method
GB2319259A (en) * 1996-11-15 1998-05-20 Babcock Rosyth Defence Limited reducing radionucleide contamination of a metallic component
KR100557681B1 (en) 2005-09-30 2006-03-10 엑셀랩주식회사 Polishing method and the system for test of metals structure
JP2007107025A (en) * 2005-10-11 2007-04-26 Hitachi Zosen Corp Method for removing thin film of electroconductive metal oxide, and apparatus therefor
CN105316755A (en) * 2014-07-29 2016-02-10 盛美半导体设备(上海)有限公司 Electrochemical polishing equipment
CN105316755B (en) * 2014-07-29 2019-06-25 盛美半导体设备(上海)有限公司 Electrochemical polish equipment

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