JPS601740A - Rotary anode x-ray tube - Google Patents

Rotary anode x-ray tube

Info

Publication number
JPS601740A
JPS601740A JP10917083A JP10917083A JPS601740A JP S601740 A JPS601740 A JP S601740A JP 10917083 A JP10917083 A JP 10917083A JP 10917083 A JP10917083 A JP 10917083A JP S601740 A JPS601740 A JP S601740A
Authority
JP
Japan
Prior art keywords
anode
bearing
ray tube
frame body
speed rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10917083A
Other languages
Japanese (ja)
Inventor
Ichiro Inamura
稲村 一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10917083A priority Critical patent/JPS601740A/en
Publication of JPS601740A publication Critical patent/JPS601740A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08Anodes; Anti cathodes
    • H01J35/10Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • H01J35/101Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
    • H01J35/1017Bearings for rotating anodes
    • H01J35/103Magnetic bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2300/00Application independent of particular apparatuses
    • F16C2300/40Application independent of particular apparatuses related to environment, i.e. operating conditions
    • F16C2300/62Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions

Abstract

PURPOSE:To practically use a magnetic bearing type rotary anode x-ray tube by additionally use a pivot bearing that can fully be resistant to ultrahigh speed rotation in the magnetic bearing and separately providing a mechanical bearing for exclusive use that performs the required high temperature low speed rotation in the degassing exhaust process. CONSTITUTION:A rotary frame body 13 is provided at a part of a rotor 4 and a vacuum sealing frame body 14 is provided at a part of a vacuum container 1. Both form a pivot bearing 15 that can be resistant to the coaxial ultrahigh speed rotation with a magnetic bearing. While both are being operated as x-ray tubes, they are made to elastically touch each other and anode current is induced through the contact. On the other hand, in the exhaust process, a protrusion section 16 provided at a part of the rotary frame body 13 engages with a ball bearing 17 provided at a part of the vacuum sealing frame body 14 and is supported so as freely rotate. The rotation can be started only by applying a weak rotary magnetic field from the outside of the vacuum container 1.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は回転陽極X線管、特に超高速回転を目的として
磁気軸受を採用した回転陽極X線管に関するものである
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a rotating anode X-ray tube, and particularly to a rotating anode X-ray tube that employs a magnetic bearing for the purpose of ultra-high speed rotation.

〔発明の背景〕[Background of the invention]

従来のX線管は、例えば実公昭57−28391号公報
に記載されているように、真空外囲器中の陽極を機械的
ボールベアリング方式の軸受で支持し、X線管として動
作中にはその真空外囲器外から回転磁場を与えることで
回転させて使用している。
In conventional X-ray tubes, as described in Japanese Utility Model Publication No. 57-28391, for example, the anode in the vacuum envelope is supported by a mechanical ball bearing, and during operation as an X-ray tube, It is used by rotating it by applying a rotating magnetic field from outside the vacuum envelope.

このような機械的ボールベアリング方式のX線管は、陽
極回転数3,000〜20.000 rpmで使用され
てきているがs 20)000 r prn以上の回転
は、ボールベアリングの摩擦熱による素材鈍化を招き、
摩耗が激しく長寿命が実現できないこと、また騒音が回
転速度を上げるに従いきわめて高くなシ、特に医療現場
で使用されるX線管は静粛性を要求されることから実用
できず、実際には10,000rpm以上の回転速度で
の実用例はきわめて稀である。
Such mechanical ball bearing type X-ray tubes have been used with an anode rotation speed of 3,000 to 20,000 rpm, but rotations of more than s20)000 rprn cause material damage due to the frictional heat of the ball bearings. leading to slowdown,
X-ray tubes used in medical settings, in particular, cannot be put to practical use because they are subject to severe wear and cannot have a long service life, and as the rotational speed increases, they become extremely noisy. Practical examples at rotational speeds of ,000 rpm or higher are extremely rare.

その一方で、X線撮影画像の画質向上の観点からは、小
焦点X線管が要求されると同時に動く被写体に対して短
時間での撮影が要求されてきておシ、陽極の電子ビーム
照射面のスピード、すなわち陽極回転速度の向上が緊急
課題になシつつあって、その観点から上述したような従
来の機械的ボールベアリング方式に代わるものとして磁
気軸受の導入が考えられ40.000〜50.00Or
pmの陽極回転速度を目標に実用化が急がれている。
On the other hand, from the perspective of improving the quality of X-ray images, small-focus X-ray tubes are required, and at the same time, there is a need for rapid imaging of moving subjects. Improving the surface speed, that is, the anode rotation speed, is becoming an urgent issue, and from this perspective, the introduction of magnetic bearings is considered as an alternative to the conventional mechanical ball bearing system as described above. .00Or
There is an urgent need to put this technology into practical use, with the goal of achieving an anode rotation speed of pm.

ところが、磁気軸受は、本質的に、陽極を高真空容器中
に非接触で浮遊状態で位置させ、その状態で超高速回転
させるものであるため、そのままでは陽極電流の真空容
器外への導出が不可能である。また、X線管内を高真空
にする過程で、管内電極部品、す力わち陽極および陰極
を900℃以上に長時間加熱して脱ガスする工程があシ
、その際、発生するガスが集りやすい陰極側を排気真空
系に取シ付け、陽極が鉛直上方に位置するようにして低
速回転させ外から陰極から電子ビームを照射して加熱脱
ガスする方法が従来周知であるが、磁気軸受を用いた場
合、磁気軸受用コイルの耐熱性不足と高耐電圧性を確保
することが不可能であることから、このような脱ガスの
ための排気工程が十分に実施できないという実用化のた
めの隘路があった。
However, since magnetic bearings essentially place the anode in a floating state in a high-vacuum container without contact and rotate it at ultra-high speed, the anode current cannot be drawn out of the vacuum container as it is. It's impossible. In addition, in the process of creating a high vacuum inside the X-ray tube, there is a process of degassing the tube's internal electrode parts, namely the anode and cathode, by heating them to over 900°C for a long time. A well-known method is to attach the easy-to-use cathode side to the exhaust vacuum system, rotate it at low speed with the anode positioned vertically upward, and irradiate the cathode with an electron beam from the outside to heat and degas it. However, due to the lack of heat resistance of the magnetic bearing coil and the inability to ensure high voltage resistance, the exhaust process for degassing cannot be carried out sufficiently. There was a bottleneck.

〔発明の目的〕[Purpose of the invention]

本発明はこのような事情に鑑みてなされたもので、その
目的は、陽極電流導出と脱ガス工程に関する隘路を打開
し、実用化を可能にする磁気軸受形回転陽極X線管を提
供することにある。
The present invention has been made in view of the above circumstances, and its purpose is to provide a magnetic bearing type rotating anode X-ray tube that overcomes the bottlenecks regarding anode current derivation and degassing process and enables practical use. It is in.

〔発明の概要〕[Summary of the invention]

このような目的を達成するために、本発明は、陽極電流
導出のために超高速回転にも十分に耐え得るピボット軸
受を磁気軸受に併用するとともに、脱ガス排気工程で必
要な高温低速回転を磁気軸受の助けを借シることなく行
なうための専用の機械的軸受を別途設けたものである。
In order to achieve these objectives, the present invention combines a magnetic bearing with a pivot bearing that can sufficiently withstand ultra-high speed rotation for deriving anode current, and also uses a pivot bearing that can sufficiently withstand ultra-high speed rotation for degassing and exhausting. A special mechanical bearing is separately provided to perform this operation without the aid of a magnetic bearing.

〔発明の実施例〕[Embodiments of the invention]

はじめに、第1図を用いて磁気軸受形回転陽極X線管の
概念を説明する。
First, the concept of a magnetic bearing type rotating anode X-ray tube will be explained using FIG.

第1図において、高真空絶縁外囲器としてのガラス製の
真空容器1の内部に、電子ビーム2を放射する陰極3お
よび回転陽極を構成するローター4、ターゲット5、こ
れらを結合してローター4の回転をターゲット5に伝え
る回転軸6が収容しである。陰極3より放射される電子
ビーム2は、3− 超高速回転するターゲット5にエネルギーを与え、X線
放射窓7を通して外部にX線8が放射される。
In FIG. 1, a cathode 3 that emits an electron beam 2, a rotor 4 that constitutes a rotating anode, a target 5, and a rotor 4 that is connected to a cathode 3 that emits an electron beam 2, a rotor 4 that constitutes a rotating anode, and a target 5 are placed inside a glass vacuum container 1 that serves as a high vacuum insulating envelope. A rotating shaft 6 that transmits the rotation of the target 5 to the target 5 is housed therein. The electron beam 2 emitted from the cathode 3 gives energy to the target 5 which rotates at an extremely high speed, and X-rays 8 are emitted to the outside through the X-ray emission window 7.

真空容器1は、X線管装置の外囲器としての容器9の中
に絶縁油10を介して配置される。一方、陽極の回転は
、回転コイル11によジローター4に高周波回転磁場を
与えることによって実現されるが、この回転陽極部は、
真空容器1の内部で他に接触することなく、位置コイル
12によシ与えられる磁場によって浮遊した形で存在す
る。すなわち、回転陽極部は浮遊状態で高速回転を行な
い、その軸方向並びに径方向の位置固定は位置コイル1
2によシ達成される。
The vacuum container 1 is placed in a container 9 as an envelope of an X-ray tube device with an insulating oil 10 in between. On the other hand, the rotation of the anode is realized by applying a high frequency rotating magnetic field to the gerotor 4 using the rotating coil 11.
It exists inside the vacuum vessel 1 in a suspended form due to the magnetic field applied by the position coil 12 without coming into contact with anything else. That is, the rotating anode part rotates at high speed in a floating state, and its position in the axial and radial directions is fixed by the position coil 1.
Achieved by 2.

この場合、陰極3と陽極部、すなわちターゲット5、回
転軸6およびローター4との間には電流が流れ々ければ
ならないが、回転陽極が浮遊状態で回転している場合、
その電流の導出ができない、すなわち電子ビームが流れ
ないこととなる。また、陰極3および陽極部を収容した
真空容器1を外部真空排気系と結合させて排気する工程
において、位置コイル12が動作しない限シ、陽極部は
その4− 位置を保持できずに真空容器1または陰極3に接触する
。高電圧動作を行なうX線管においては、前述したよう
に真空容器1の内部を高真空に保つために一般に陰極3
から通常のX線管動作中の数倍の電力を与えてターゲッ
ト5を赤熱しながら、真空容器1の一部を外部真空排気
系と結合させることにより脱ガスをし高真空を得るが、
その場合、電子ビーム2で直接照射されるターゲット5
のみならず回転軸6およびローター4も高温になってく
るため、X線管動作中のように絶縁油10によって冷却
されない位置コイル12は、ローター4からの熱放散が
X線管動作時の数倍となることもあって、耐熱性の上か
ら使用が不可能であシ、結局陽極の位置保持が不可能と
なる。
In this case, current must flow between the cathode 3 and the anode section, that is, the target 5, the rotating shaft 6, and the rotor 4, but when the rotating anode is rotating in a floating state,
The current cannot be derived, that is, the electron beam does not flow. In addition, in the process of connecting the vacuum vessel 1 containing the cathode 3 and the anode part to an external evacuation system and evacuating it, unless the position coil 12 operates, the anode part cannot maintain its 4- position and the vacuum vessel collapses. 1 or the cathode 3. In an X-ray tube that operates at a high voltage, generally the cathode 3 is
A high vacuum is obtained by degassing a part of the vacuum vessel 1 by connecting a part of the vacuum vessel 1 to an external vacuum evacuation system while applying power several times higher than during normal X-ray tube operation to make the target 5 red-hot.
In that case, the target 5 directly irradiated with the electron beam 2
Not only that, but also the rotating shaft 6 and rotor 4 become hot, so the position coil 12, which is not cooled by the insulating oil 10 as it is when the X-ray tube is in operation, has heat dissipated from the rotor 4 at a rate higher than that during the X-ray tube operation. Since it may double in size, it cannot be used due to heat resistance issues, and as a result, it becomes impossible to maintain the position of the anode.

このような問題を解決するため、第2図に示す本発明の
実施例においては、ローター4の一部に回転構体13を
設けるとともに真空容器1の一部に真空封着構体14を
設け、この両者で磁気軸受と同軸状の超高速回転に耐え
るピボット軸受15を形成している。X線管として動作
中は、第1図に示したと同様の位置コイル12の作用で
両者は弾力的に接触し、その接触を通じて陽極電流の導
出が行なわれる。
In order to solve such problems, in the embodiment of the present invention shown in FIG. Together, they form a pivot bearing 15 that is coaxial with the magnetic bearing and can withstand ultra-high speed rotation. During operation as an X-ray tube, the two come into elastic contact due to the action of the position coil 12 similar to that shown in FIG. 1, and an anode current is derived through this contact.

一方、排気工程中には、陰極3を下方にして鉛直方向に
立てると重力に従って陽極部は落下するが、回転構体1
3の一部に設けた突出部16が真空封着構体14の一部
に設けたボールベアリング17に嵌合して回転自在に支
持され、それ以上の落下が防がれるとともに、真空容器
1の外部から弱い回転磁場を与えるだけで回転が開始で
き、排気中室子ビーム2をターゲット5に照射すること
により発生しやすいターゲット面荒れおよび溶けを抑え
て回転照射加熱が行える。
On the other hand, during the exhaust process, if the cathode 3 is stood vertically with the cathode 3 facing downward, the anode will fall due to gravity, but the rotating structure 1
A protrusion 16 provided on a part of the vacuum sealing structure 14 fits into a ball bearing 17 provided on a part of the vacuum sealing structure 14 and is rotatably supported, preventing further fall and preventing the vacuum container 1 from falling further. Rotation can be started simply by applying a weak rotating magnetic field from the outside, and by irradiating the target 5 with the Muroko beam 2 during exhaust, rotational irradiation heating can be performed while suppressing target surface roughening and melting that are likely to occur.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、磁気軸受にピボ
ット軸受を併用したことにより陽極電流の導出が可能に
なるとともに、陰極側を下にしたときに陽極部を支持し
て低速回転を可能にする専用の機械的軸受を別途設けた
ことによシ高温低速回転をさせながらの脱ガス排気工程
が磁気軸受を用いずに行なえることとなり、磁気軸受形
回転陽極X線管の実用化が可能となる。
As explained above, according to the present invention, by using a pivot bearing in combination with a magnetic bearing, it is possible to derive an anode current, and when the cathode side is facing down, it supports the anode part and enables low-speed rotation. By separately installing a special mechanical bearing for this purpose, the degassing process while rotating at high temperature and low speed can be performed without using a magnetic bearing, which has led to the practical application of magnetic bearing type rotating anode X-ray tubes. It becomes possible.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は磁気軸受形回転陽極X線管の概念を説明するた
めの断面図、第2図は本発明の一実施例を示す陽極回転
構造の詳細を示す断面図である。 1・・拳・真空容器、2・・申・電子ビーム、3・Φ・
Φ陰極、4・・・・ローター、5・・・・ターゲット、
6・・拳・回転軸、11@・・・回転コイル、12・・
・・位置コイル、13・拳・・回転構体、14・・・―
真空封着構体、15Φ・・・ピボット軸受、16・―・
拳突出部、17・・・・ボールベアリング。
FIG. 1 is a sectional view for explaining the concept of a magnetic bearing type rotating anode X-ray tube, and FIG. 2 is a sectional view showing details of an anode rotating structure showing an embodiment of the present invention. 1. Fist/vacuum container, 2. Monkey/electron beam, 3. Φ.
Φ cathode, 4... rotor, 5... target,
6...Fist/rotating shaft, 11@...Rotating coil, 12...
...Position coil, 13.Fist...Rotating structure, 14...
Vacuum sealed structure, 15Φ...Pivot bearing, 16...
Fist protrusion, 17...Ball bearing.

Claims (1)

【特許請求の範囲】[Claims] 電子放射用の陰極部と、この陰極部に対向して配置され
た陽極部と、この陽極部を真空管内に浮遊状態で位置さ
せ超高速回転を可能にする磁気軸受とを具備してなる回
転陽極X線管において、上記磁気軸受と同軸的に配置さ
れた、陽極電流導出用のピボット軸受と、このX線管を
陰極部を下方にして鉛直方向に配置し磁気軸受を除去し
た時に陽極部を回転自在に支え、当該陽極部の落下を防
ぐとともにその状態で低速回転を可能にする機械的軸受
とを設けたことを特徴とする回転陽極X線管。
A rotating device comprising a cathode section for electron emission, an anode section placed opposite to the cathode section, and a magnetic bearing that allows the anode section to float in a vacuum tube and enable ultra-high speed rotation. In the anode X-ray tube, there is a pivot bearing for deriving the anode current, which is arranged coaxially with the magnetic bearing, and when the X-ray tube is arranged vertically with the cathode section facing downward and the magnetic bearing is removed, the anode section What is claimed is: 1. A rotating anode X-ray tube comprising a mechanical bearing that rotatably supports the anode, prevents the anode from falling, and enables low-speed rotation in that state.
JP10917083A 1983-06-20 1983-06-20 Rotary anode x-ray tube Pending JPS601740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10917083A JPS601740A (en) 1983-06-20 1983-06-20 Rotary anode x-ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10917083A JPS601740A (en) 1983-06-20 1983-06-20 Rotary anode x-ray tube

Publications (1)

Publication Number Publication Date
JPS601740A true JPS601740A (en) 1985-01-07

Family

ID=14503426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10917083A Pending JPS601740A (en) 1983-06-20 1983-06-20 Rotary anode x-ray tube

Country Status (1)

Country Link
JP (1) JPS601740A (en)

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