JPS60173438A - 光フアイバの散乱光測定装置 - Google Patents
光フアイバの散乱光測定装置Info
- Publication number
- JPS60173438A JPS60173438A JP2630084A JP2630084A JPS60173438A JP S60173438 A JPS60173438 A JP S60173438A JP 2630084 A JP2630084 A JP 2630084A JP 2630084 A JP2630084 A JP 2630084A JP S60173438 A JPS60173438 A JP S60173438A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- scattered light
- measured
- angle
- scattering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/35—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is transversely coupled into or out of the fibre or waveguide, e.g. using integrating spheres
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Light Guides In General And Applications Therefor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2630084A JPS60173438A (ja) | 1984-02-14 | 1984-02-14 | 光フアイバの散乱光測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2630084A JPS60173438A (ja) | 1984-02-14 | 1984-02-14 | 光フアイバの散乱光測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60173438A true JPS60173438A (ja) | 1985-09-06 |
| JPH0531735B2 JPH0531735B2 (OSRAM) | 1993-05-13 |
Family
ID=12189486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2630084A Granted JPS60173438A (ja) | 1984-02-14 | 1984-02-14 | 光フアイバの散乱光測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60173438A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8282768B1 (en) | 2005-04-26 | 2012-10-09 | Novellus Systems, Inc. | Purging of porogen from UV cure chamber |
| US8137465B1 (en) | 2005-04-26 | 2012-03-20 | Novellus Systems, Inc. | Single-chamber sequential curing of semiconductor wafers |
| US8398816B1 (en) | 2006-03-28 | 2013-03-19 | Novellus Systems, Inc. | Method and apparatuses for reducing porogen accumulation from a UV-cure chamber |
-
1984
- 1984-02-14 JP JP2630084A patent/JPS60173438A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0531735B2 (OSRAM) | 1993-05-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |