JPS60172746U - Vacuum continuous processing equipment - Google Patents
Vacuum continuous processing equipmentInfo
- Publication number
- JPS60172746U JPS60172746U JP5981784U JP5981784U JPS60172746U JP S60172746 U JPS60172746 U JP S60172746U JP 5981784 U JP5981784 U JP 5981784U JP 5981784 U JP5981784 U JP 5981784U JP S60172746 U JPS60172746 U JP S60172746U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- continuous processing
- chamber
- preliminary
- processing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は本考案の真空連続処理装置の一実
施例を示すもので、第１図は正面図、第２図は第１図の
平面図、第３図は本考案装置における予備真空室の要部
を示す拡大図、第４図は第３図の４−４線矢視図である
。
１・・・・・・真空処理室、２．２’、 ３．３’・・
・・・・予備真空室、１６，１７・・・・・・シールロ
ール、１９・・・・・・リップル部材、２０．２１・・
・・・・ケース。
９７図
第 ４ 図Figures 1 and 2 show an embodiment of the vacuum continuous processing apparatus of the present invention. Figure 1 is a front view, Figure 2 is a plan view of Figure 1, and Figure 3 is a view of the vacuum continuous processing apparatus of the present invention. FIG. 4 is an enlarged view showing the main parts of the preliminary vacuum chamber, and is a view taken along the line 4--4 in FIG. 3. 1... Vacuum processing chamber, 2.2', 3.3'...
...Preliminary vacuum chamber, 16,17...Seal roll, 19...Ripple member, 20.21...
····Case. Figure 97Figure 4
Claims (1)
室を、一対のシールロールを被処理物の搬送方向に複数
組配置し、このシールロールの一部に軸方向に沿ってリ
ップル部材を対接させることにより形成し、前記真空処
理室で被処理物を連続的に処理する真空連続処理装置に
おいて、前記シールロールと予備真空室を形成するケー
ス間のギャップを、シールロールの軸方向の全長にわた
って非常に小さくしたことを特徴とする真空連続処理装
置。The preliminary vacuum chamber is equipped with a vacuum processing chamber and a plurality of preliminary vacuum chambers, and the preliminary vacuum chamber is formed by arranging a plurality of pairs of seal rolls in the conveyance direction of the workpiece, and ripples a part of the seal rolls along the axial direction. In a vacuum continuous processing device that is formed by bringing members into contact with each other and continuously processes the workpiece in the vacuum processing chamber, the gap between the seal roll and the case forming the preliminary vacuum chamber is defined by the axis of the seal roll. A vacuum continuous processing device characterized by being extremely small over the entire length in the direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5981784U JPS60172746U (en) | 1984-04-25 | 1984-04-25 | Vacuum continuous processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5981784U JPS60172746U (en) | 1984-04-25 | 1984-04-25 | Vacuum continuous processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60172746U true JPS60172746U (en) | 1985-11-15 |
Family
ID=30586586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5981784U Pending JPS60172746U (en) | 1984-04-25 | 1984-04-25 | Vacuum continuous processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60172746U (en) |
-
1984
- 1984-04-25 JP JP5981784U patent/JPS60172746U/en active Pending
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