JPS60171625A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPS60171625A
JPS60171625A JP2835284A JP2835284A JPS60171625A JP S60171625 A JPS60171625 A JP S60171625A JP 2835284 A JP2835284 A JP 2835284A JP 2835284 A JP2835284 A JP 2835284A JP S60171625 A JPS60171625 A JP S60171625A
Authority
JP
Japan
Prior art keywords
film
magnetic
substrate
recording medium
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2835284A
Other languages
Japanese (ja)
Inventor
Hiroaki Wakamatsu
若松 弘晃
Masaki Shinohara
正喜 篠原
Masahiro Miyazaki
宮崎 正裕
Hidekazu Kanda
英一 神田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2835284A priority Critical patent/JPS60171625A/en
Publication of JPS60171625A publication Critical patent/JPS60171625A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve the adhesion between a non-magnetic substrate and thin gamma-Fe2O3 magnetic film and to prevent damage such as exfoliation of the magnetic film by providing an intermediate film laminated alternately with >=1 layers of the 1st Ti2O3 film and the 2nd Ti2O3 film by a specific method between the substrate and the magnetic film. CONSTITUTION:A TiO2 film 23 is deposited to 0.02mu thickness on an alumitetreated Al substrate 21 then a Ti film 24 is deposited to 0.1mu thickness on the film 23. A thin alpha-Fe2O3 magnetic film 25 is deposited to a prescribed thickness on the film 24 and thereafter the film is reduced and oxidized at about 300 deg.C by which a magnetic recording medium having the thin magnetic film 25a transformed to gamma-Fe2O3 is formed. The O in the film 23 is taken into the film 24 by such treatment and the film 23 is changed to the Ti2O3 film 23a and the Ti film 24 to the Ti2O3 film 24a by which an intermediate film 22 consisting of the 1st film 23a and the 2nd film 24a is formed. The adhesion strength between the substrate 21 and the magnetic layer 25a is thus improved, and the magnetic disc, etc. having excellent durability without exfoliation, chipping, etc. are obtd.

Description

【発明の詳細な説明】 (a) 発明の技術分野 本発明は高密度記録に適した磁気記録媒体の改良に係り
、特に耐久性に優れた信頼性の良い磁気記録媒体に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to the improvement of a magnetic recording medium suitable for high-density recording, and particularly to a highly durable and reliable magnetic recording medium.

(bl 技術の背景 近年、磁気ディスク装置においては、磁気記録媒体、即
ち磁気ディスクの薄膜化及び磁気ヘッドの低浮上化等に
よって高密度記録化が図られている。そして上記磁気ヘ
ッドの低浮上化に加えて、更に例えば停止時には磁気ヘ
ッドが磁気ディスク面上に接触した状態であり、磁気デ
ィスクの回転速度の上昇に伴って生じる空気流により、
該磁気ヘッドを微小に浮上させるようにした、所謂C8
S (Contact 5tart 5top)方式が
採用されている。
(bl Background of the Technology) In recent years, in magnetic disk drives, high-density recording has been achieved by thinning the magnetic recording medium, that is, the magnetic disk, and lowering the flying height of the magnetic head. In addition, for example, when the magnetic head is stopped, the magnetic head is in contact with the surface of the magnetic disk, and due to the airflow that occurs as the rotational speed of the magnetic disk increases,
The so-called C8, which allows the magnetic head to float slightly
The S (Contact 5tart 5top) method is adopted.

しかしこの方式にあっては磁気ディスクの回転開始時、
又は停止時に磁気ヘッドが磁気ディスク表面に接触摺動
するので、該磁気ディスク表面に摩耗、損傷等のヘッド
クラッシュが発生し易い不都合があった。そこでこのよ
うな不都合を防止するため、磁気ディスク表面に高級脂
肪酸、高級脂肪酸のエステル化合物、或いは珪素化合物
等からなる潤滑剤を塗布、又は被覆するなどの表面処理
を施すことが一般に行われている。
However, with this method, when the magnetic disk starts rotating,
Also, since the magnetic head comes into contact with and slides on the surface of the magnetic disk when the magnetic disk is stopped, there is an inconvenience that head crashes such as abrasion and damage to the surface of the magnetic disk are likely to occur. Therefore, in order to prevent such inconveniences, it is common practice to perform surface treatment such as applying or coating the magnetic disk surface with a lubricant made of higher fatty acids, higher fatty acid ester compounds, silicon compounds, etc. .

(C1従来技術と問題点 ところで従来の磁気記録媒体、例えば磁気ディスフはア
ルマイト表面処理が施された円板状のアルミニウム等か
らなる非磁性基板上に、直接スパッタリング法及び還元
・酸化処理等によってy −Fe203からなる磁性膜
を形成した構成が採られているので、上記のようにこの
磁気ディスク表面に潤滑剤を塗布してC8S方式により
該磁気ディスクを回転・停止操作した場合、前記磁性膜
が剥がれることがある。特に潤滑剤の塗布量が多い場合
には、磁気ディスクの停止時に多量の潤滑塗布剤により
磁気ディスク面に磁気ヘッドが吸着されるといった現象
が発生し、磁気ディスクの回転開始時に吸着された磁気
ヘッドにより磁性膜が容易に引き剥がされる問題があり
、上記非磁性基板に対して磁性膜が強固に密着され、上
記CSS方式により該磁気ディスクを回転・停止操作し
た際に、磁気ヘッドの摺動に磁性膜の剥離損傷が充分耐
え得る磁気ディスクが要望されている。
(C1 Prior Art and Problems By the way, conventional magnetic recording media, such as magnetic disks, are made by direct sputtering, reduction/oxidation treatment, etc. -Since the configuration is adopted in which a magnetic film made of Fe203 is formed, when a lubricant is applied to the surface of this magnetic disk as described above and the magnetic disk is rotated and stopped by the C8S method, the magnetic film is Particularly when the amount of lubricant applied is large, a phenomenon occurs in which the magnetic head is attracted to the surface of the magnetic disk due to the large amount of lubricant applied when the magnetic disk stops, and when the magnetic disk starts rotating. There is a problem that the magnetic film is easily peeled off by the attracted magnetic head, and when the magnetic film is tightly adhered to the non-magnetic substrate and the magnetic disk is rotated or stopped using the CSS method, the magnetic film is easily peeled off. There is a need for a magnetic disk that can sufficiently withstand peeling damage of the magnetic film due to head sliding.

+d) 発明の目的 本発明は上記従来の実情に鑑み、磁性膜を非磁性基板上
に、密着性を高めるチタン及びチタン酸化物等の介在膜
を介して設けた構成とし、ヘッドクラッシュ等による磁
性膜の剥がれ損傷を防止した信頼性の良い磁気記録媒体
を提供することを目的とするものである。
+d) Purpose of the Invention In view of the above-mentioned conventional situation, the present invention has a structure in which a magnetic film is provided on a non-magnetic substrate with an intervening film of titanium or titanium oxide or the like that enhances adhesion, and magnetic film due to head crash etc. The object of the present invention is to provide a highly reliable magnetic recording medium that prevents film peeling and damage.

(la) 発明の構成 そしてこの目的は本発明によれば、非磁性基板上にγ−
Fe203磁性薄膜を設けた磁気記録媒体において、上
記非磁性基板とr −’Fe203磁性薄膜との間に、
 第1の三二酸化チタン膜と第2の三二酸化チタン膜と
を少なくとも1層以上交互に積層した中間膜を介在した
構造、又、上記第1の三二酸化チタン膜の膜厚が0.0
2〜0.1μm、第2の三二酸化チタン膜の膜厚が0.
05〜0,2μmであることを特徴とする新規な磁気記
録媒体を提供することによって達成される。
(la) Structure and object of the invention According to the present invention, γ-
In the magnetic recording medium provided with the Fe203 magnetic thin film, between the nonmagnetic substrate and the r-'Fe203 magnetic thin film,
A structure in which a first titanium sesquioxide film and a second titanium sesquioxide film are alternately laminated in at least one layer with an intermediate film interposed therebetween, and the film thickness of the first titanium sesquioxide film is 0.0.
2 to 0.1 μm, and the thickness of the second titanium sesquioxide film is 0.1 μm.
This is achieved by providing a novel magnetic recording medium characterized by a thickness of 0.05 to 0.2 μm.

(fl 発明の実施例 以下図面を用いて本発明に係る一実施例について詳細に
説明する。
(fl Embodiment of the Invention An embodiment of the present invention will be described in detail below with reference to the drawings.

第1図はかかる実施例を示す要部断面図である。FIG. 1 is a sectional view of a main part showing such an embodiment.

図において1はアルマイト処理を施したAQ′3F−磁
性基板であり、該AQ非磁性基板1上には例えば第1の
三二酸化チタン(Ti203 )膜3と第2の三二酸化
チタン(Ti20 a )膜4とから成る中間膜2を介
在させてγ−Fe2 o、 3磁性薄膜5が設けられた
構造が採られている。
In the figure, 1 is an alumite-treated AQ'3F-magnetic substrate, and on the AQ non-magnetic substrate 1, for example, a first titanium sesquioxide (Ti203) film 3 and a second titanium sesquioxide (Ti20a) film are formed. A structure is adopted in which a γ-Fe 2 O, 3 magnetic thin film 5 is provided with an intermediate film 2 consisting of a film 4 interposed therebetween.

従って、上記のように磁気記録媒体を構成することによ
って、前記アルマイト処理を施したAll非磁性基板1
(Al!203)と、第1の三二酸化チタン(Ti20
3 )膜3及び第2の三二酸化チタン(Ti203 )
膜4と、rFe2O3磁性薄膜5との密着性がルイス酸
(電子の授受に基づいて定義された酸で、電子対を受け
て相手と共有結合を形成するもの、電子対を与えて相手
と共有結合を形成するものをルイス塩基という)の理論
によっても説明出来るように強力となり、その結果、前
記非磁性基板1に対するrFe2O3磁性薄膜5の密着
性が著しく向上する。
Therefore, by configuring the magnetic recording medium as described above, the alumite-treated All nonmagnetic substrate 1
(Al!203) and the first titanium sesquioxide (Ti20
3) Membrane 3 and second titanium sesquioxide (Ti203)
The adhesion between the film 4 and the rFe2O3 magnetic thin film 5 is determined by Lewis acid (an acid defined based on the transfer of electrons, which accepts a pair of electrons and forms a covalent bond with the other party, and one which gives a pair of electrons and shares it with the other party). The strength of the rFe2O3 magnetic thin film 5 to the non-magnetic substrate 1 is significantly improved as can be explained by the theory of Lewis bases.

尚、上記した非磁性基板1に対してγ〜Fe203磁性
薄膜5の密着性が向上する所以を更にルイス酸の理論に
よって説明すると、一般にA(hOscアルマイト処理
を施したへQ非磁性基板1面)、γ−Fe203(磁性
薄膜5)及びTi203(中間膜2)のルイス酸度の強
さの関係は、A(ho3≧γ−Fe203>>Ti20
8となっている。そしてルイス酸度の強さが同じ程度の
もの同士、例えば、AQ20sとγ−Pe203との密
着性については、両者の表面極性が同程度なので強い密
着性を得ることは期待出来ないが、前記ルイス酸度の強
さが、一方の強1tlAQ203と他方の弱いT’i2
’03との密着性については、両者の表面極性が互いに
逆の関係にあり、静電力が相乗効果として作用すること
から、両者の密着性が著しく強力になるものと考えられ
る。従って従来のようにアルマイト処理を施したAP非
磁性基板1面(A11203 )に直接γ−Fe203
磁性薄膜5を設けることば、両者の表面極性的相性が悪
く、密着性の良くないことが裏付けられる。
Furthermore, to further explain the reason why the adhesion of the γ~Fe203 magnetic thin film 5 to the non-magnetic substrate 1 described above is improved using the Lewis acid theory, it can be said that generally one surface of the non-magnetic substrate A (hOsc anodized) is improved. ), the relationship between the Lewis acidity strength of γ-Fe203 (magnetic thin film 5) and Ti203 (intermediate film 2) is A(ho3≧γ-Fe203>>Ti20
It is 8. As for the adhesion between objects with the same Lewis acidity strength, for example, AQ20s and γ-Pe203, since the surface polarities of both are the same, strong adhesion cannot be expected. The strength of is one strong 1tlAQ203 and the other weak T'i2
Regarding the adhesion with '03, it is thought that the surface polarities of both are in an inverse relationship to each other and the electrostatic force acts as a synergistic effect, so that the adhesion between the two becomes extremely strong. Therefore, γ-Fe203 is directly applied to one surface of the AP nonmagnetic substrate (A11203) which has been anodized as in the past.
Providing the magnetic thin film 5 proves that the surface polarity of the two is not compatible and the adhesion is poor.

次に上記した本発明の磁気記録媒体を得るには、先ず第
2図に示すように例えばアル、マイト処理を施したへQ
非磁性基板21上にスパッタリング法等によって二酸化
チタン(Ti02 )膜23を0.02μmの厚さに被
着する。引続き該二酸化チタン(Ti02 )膜23上
にチタン(Ti)股24を0.1μmの厚さに被着する
。更に、上記チタン(Ti)膜24上に、α−Fe20
3磁性薄膜25を所定の厚さに被着する。次に上記α−
Fe203薄膜25を略300℃の温度により還元・酸
化処理を行って第3図に示すようにγ−Fe203に変
態された磁性薄膜25aを有する磁気記録媒体を形成す
る。この還元・酸化処理時に、前記二酸化チタン(Ti
O2>膜23中の酸素が、前記Ti膜24に奪われて該
二酸化チタン(TiO2)膜23が第1の三二酸化チタ
ン(Ti203) 膜23aに、またチタン膜(Tf 
)膜24は第2の三二酸化チタン(Ti20 a )膜
24aにそれぞれ変化された中間膜22が形成され、本
発明の目的とする磁気記録媒体を得ることが出来る。
Next, in order to obtain the magnetic recording medium of the present invention described above, first, as shown in FIG.
A titanium dioxide (Ti02) film 23 with a thickness of 0.02 μm is deposited on the nonmagnetic substrate 21 by sputtering or the like. Subsequently, a titanium (Ti) crotch 24 is deposited on the titanium dioxide (Ti02) film 23 to a thickness of 0.1 μm. Further, on the titanium (Ti) film 24, α-Fe20
3. A magnetic thin film 25 is deposited to a predetermined thickness. Next, the above α-
The Fe203 thin film 25 is reduced and oxidized at a temperature of about 300 DEG C. to form a magnetic recording medium having a magnetic thin film 25a transformed into .gamma.-Fe203 as shown in FIG. During this reduction/oxidation treatment, the titanium dioxide (Ti
Oxygen in the film 23 is taken away by the Ti film 24, and the titanium dioxide (TiO2) film 23 becomes the first titanium sesquioxide (Ti203) film 23a, and the titanium film (Tf
) film 24 is a second titanium sesquioxide (Ti20a) film 24a with an intermediate film 22 formed thereon, thereby obtaining the magnetic recording medium targeted by the present invention.

因に、(11アルマイト処理を施したΔQ非磁性基板(
以下アルマイト基板と呼ぶ)上にγ−Fe203磁性膜
を直接設け、その表面に潤滑剤(クライトックス)の0
.01希釈液をスピンコードした従来の磁気記録媒体、
(2)アルマイト基板上に、0.02μmの膜厚の第1
の三二酸化チタン膜と 0.1 μmの膜厚の第2の三
二酸化チタン膜からなる中間膜を介在してγ−Fe20
3磁性膜を設け、その表面に潤滑剤(クライトックス)
の0.01希釈液をスピンコードした本発明の磁気記録
媒体A、(3)アルマイト基板上に、0.02μmの膜
厚の第1の三二酸化チタン膜と 0.1 μmの膜厚の
第2の三二酸化チタン膜とを交互に2層ずつ積層した中
間膜を介在してγ−Fe203磁性膜を設け、その表面
に潤滑剤(クライトソクス)の0.01希釈液をスピン
コードした本発明の磁気記録媒体B等について、20g
rの荷重を負荷した磁気ヘッドを用いてC3S試験によ
りその耐久性を比較した結果、(1)の従来の磁気記録
媒体においては、1000回のC5S試験によってγ−
Fe203磁性膜に剥離損傷が発生したが、本発明によ
る(2)の磁気記録媒体A及び(3)の磁気記録媒体B
においては20000回のC3S試験に対してもγ−F
e203磁性膜に剥離損傷は見受りられす、優れた耐久
性を示した。
Incidentally, (11 anodized ΔQ nonmagnetic substrate (
A γ-Fe203 magnetic film is directly provided on the alumite substrate (hereinafter referred to as an alumite substrate), and a lubricant (Krytox) is applied to the surface of the γ-Fe203 magnetic film.
.. Conventional magnetic recording medium spin-coded with 01 diluent,
(2) A first film with a thickness of 0.02 μm is placed on the alumite substrate.
γ-Fe20 with an intermediate film consisting of a titanium sesquioxide film and a second titanium sesquioxide film with a film thickness of
3 A magnetic film is provided and a lubricant (Krytox) is applied to the surface.
(3) A first titanium sesquioxide film with a thickness of 0.02 μm and a second titanium sesquioxide film with a thickness of 0.1 μm on an alumite substrate. In the present invention, a γ-Fe203 magnetic film is provided with an interlayer film in which two titanium sesquioxide films are alternately laminated, and a 0.01 dilution of a lubricant (Krytosox) is spin-coded on the surface of the γ-Fe203 magnetic film. For magnetic recording medium B etc., 20g
As a result of comparing the durability using a C3S test using a magnetic head loaded with a load of
Although peeling damage occurred in the Fe203 magnetic film, (2) magnetic recording medium A and (3) magnetic recording medium B according to the present invention
γ-F for 20,000 C3S tests
No peeling damage was observed in the e203 magnetic film, but it showed excellent durability.

(g) 発明の効果 以上の説明から明らかなように、本発明に係る磁気記録
媒体の構造によれば、アルマイト処理を施したアルミニ
ウム基板等からなる滞磁性基板とγ−Fe203磁性膜
との間に三二酸化チタン膜からなる中間膜を介在させる
ことにより、該非磁性基板とγ−Fe203磁性膜との
密着性が著しく向上する。従ってヘンドクラノシュ等に
よる磁性膜の剥がれ損傷が防止され、耐久性の優れた信
頼性の良い磁気記録媒体を提供することができ、CSS
方式を採用した磁気ディスク装置に適用して極めて有利
である。
(g) Effects of the Invention As is clear from the above explanation, according to the structure of the magnetic recording medium according to the present invention, the magnetic recording medium between the magnetically retentive substrate made of an alumite-treated aluminum substrate, etc. and the γ-Fe203 magnetic film. By interposing an intermediate film made of titanium sesquioxide film, the adhesion between the nonmagnetic substrate and the γ-Fe203 magnetic film is significantly improved. Therefore, peeling and damage to the magnetic film due to hendokranosh etc. can be prevented, and a highly durable and reliable magnetic recording medium can be provided.
It is extremely advantageous to apply this method to a magnetic disk device that employs this method.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る磁気記録媒体の一実施例を示す要
部断面図、第2図及び第3図は本発明に係る磁気記録媒
体の製造方法の一実施例を工程順に説明する要部断面図
である。
FIG. 1 is a sectional view of a main part showing an embodiment of a magnetic recording medium according to the present invention, and FIGS. 2 and 3 are essential parts explaining an embodiment of a method for manufacturing a magnetic recording medium according to the present invention in the order of steps. FIG.

Claims (1)

【特許請求の範囲】 (リ 非磁性基板上にγ−Fe20 g磁性薄膜を設け
た磁気記録媒体において、上記非磁性基板とγ−Fe2
03磁性薄膜との間に、第1の三二酸化チタン膜と第2
の三二酸化チタン膜とを少なくとも1層以上交互に積層
した中間膜を介在して成ることを特徴とする磁気記録媒
体。 (2) 上記第1の三二酸化チタン膜の膜厚が0.02
〜0.1μm、第2の三二酸化チタン膜の膜厚が0.0
5〜0.2μmであることを特徴とする特許請求の範囲
第(1)項に記載の磁気記録媒体。
[Scope of Claims] (Li) A magnetic recording medium in which a γ-Fe20 g magnetic thin film is provided on a non-magnetic substrate, wherein the non-magnetic substrate and a γ-Fe2
03 A first titanium sesquioxide film and a second titanium sesquioxide film are placed between the magnetic thin film.
What is claimed is: 1. A magnetic recording medium comprising an intermediate film in which at least one titanium sesquioxide film and at least one titanium sesquioxide film are alternately laminated. (2) The thickness of the first titanium sesquioxide film is 0.02
~0.1 μm, the thickness of the second titanium sesquioxide film is 0.0
The magnetic recording medium according to claim 1, wherein the magnetic recording medium has a thickness of 5 to 0.2 μm.
JP2835284A 1984-02-16 1984-02-16 Magnetic recording medium Pending JPS60171625A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2835284A JPS60171625A (en) 1984-02-16 1984-02-16 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2835284A JPS60171625A (en) 1984-02-16 1984-02-16 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS60171625A true JPS60171625A (en) 1985-09-05

Family

ID=12246209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2835284A Pending JPS60171625A (en) 1984-02-16 1984-02-16 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS60171625A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007290022A (en) * 2006-04-27 2007-11-08 Maruyasu Industries Co Ltd Bending device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007290022A (en) * 2006-04-27 2007-11-08 Maruyasu Industries Co Ltd Bending device

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