Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長filedCritical工業技術院長
Priority to JP5669684UpriorityCriticalpatent/JPS60170188U/ja
Publication of JPS60170188UpublicationCriticalpatent/JPS60170188U/ja
Application grantedgrantedCritical
Publication of JPH0232152Y2publicationCriticalpatent/JPH0232152Y2/ja