JPS6016998U - セラミツク焼成用治具 - Google Patents

セラミツク焼成用治具

Info

Publication number
JPS6016998U
JPS6016998U JP8674484U JP8674484U JPS6016998U JP S6016998 U JPS6016998 U JP S6016998U JP 8674484 U JP8674484 U JP 8674484U JP 8674484 U JP8674484 U JP 8674484U JP S6016998 U JPS6016998 U JP S6016998U
Authority
JP
Japan
Prior art keywords
firing jig
ceramic firing
ceramic
jig
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8674484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0218480Y2 (enrdf_load_stackoverflow
Inventor
勇 阿部
増山　邦彦
光男 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP8674484U priority Critical patent/JPS6016998U/ja
Publication of JPS6016998U publication Critical patent/JPS6016998U/ja
Application granted granted Critical
Publication of JPH0218480Y2 publication Critical patent/JPH0218480Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
JP8674484U 1984-06-13 1984-06-13 セラミツク焼成用治具 Granted JPS6016998U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8674484U JPS6016998U (ja) 1984-06-13 1984-06-13 セラミツク焼成用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8674484U JPS6016998U (ja) 1984-06-13 1984-06-13 セラミツク焼成用治具

Publications (2)

Publication Number Publication Date
JPS6016998U true JPS6016998U (ja) 1985-02-05
JPH0218480Y2 JPH0218480Y2 (enrdf_load_stackoverflow) 1990-05-23

Family

ID=30216669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8674484U Granted JPS6016998U (ja) 1984-06-13 1984-06-13 セラミツク焼成用治具

Country Status (1)

Country Link
JP (1) JPS6016998U (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193763U (enrdf_load_stackoverflow) * 1987-12-16 1989-06-20
JPH055592A (ja) * 1990-10-30 1993-01-14 Toshiba Corp 高温熱処理用治具
JP2002114537A (ja) * 2000-10-04 2002-04-16 Nippon Electric Glass Co Ltd ガラス基板熱処理用セッター
JP2018148163A (ja) * 2017-03-09 2018-09-20 日本特殊陶業株式会社 半導体製造装置用部品の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4417658Y1 (enrdf_load_stackoverflow) * 1965-02-13 1969-07-30
JPS477435U (enrdf_load_stackoverflow) * 1971-02-23 1972-09-27
JPS50101410A (enrdf_load_stackoverflow) * 1974-01-11 1975-08-12

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4417658Y1 (enrdf_load_stackoverflow) * 1965-02-13 1969-07-30
JPS477435U (enrdf_load_stackoverflow) * 1971-02-23 1972-09-27
JPS50101410A (enrdf_load_stackoverflow) * 1974-01-11 1975-08-12

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193763U (enrdf_load_stackoverflow) * 1987-12-16 1989-06-20
JPH055592A (ja) * 1990-10-30 1993-01-14 Toshiba Corp 高温熱処理用治具
JP2002114537A (ja) * 2000-10-04 2002-04-16 Nippon Electric Glass Co Ltd ガラス基板熱処理用セッター
JP2018148163A (ja) * 2017-03-09 2018-09-20 日本特殊陶業株式会社 半導体製造装置用部品の製造方法

Also Published As

Publication number Publication date
JPH0218480Y2 (enrdf_load_stackoverflow) 1990-05-23

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