JPS60168034U

JPS60168034U - pressure sensor

Info

Publication number: JPS60168034U
Application number: JP5418884U
Authority: JP
Inventors: 憲一吉田
Original assignee: 日本電気株式会社
Priority date: 1984-04-13
Filing date: 1984-04-13
Publication date: 1985-11-07

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は従来の圧力センサの断面図、第２図は本考案の
一実施例を示す圧力センサの組み立て断面図、第３図は
第２の実施例を示す組み立て断面図である。図において、１はシリコンダイヤフラム型圧力センサ素
子、２は支持台、３及び７は台座、４及び１２は加圧棒
、５及び８はケース、６及び１８は弾性体、９ははめあ
い部、１０は逃げ穴部、１１は案内穴、１３は針先形状
先端の球面、１４はストレート部、１５はねじ部、１６
は先端球面、１７は止め輪、１９及び２１はふた、２，
０は溝部、２２はすりわりである。FIG. 1 is a sectional view of a conventional pressure sensor, FIG. 2 is an assembled sectional view of a pressure sensor showing one embodiment of the present invention, and FIG. 3 is an assembled sectional view of a second embodiment. In the figure, 1 is a silicon diaphragm type pressure sensor element, 2 is a support base, 3 and 7 are pedestals, 4 and 12 are pressure rods, 5 and 8 are cases, 6 and 18 are elastic bodies, 9 is a fitting part, 10 11 is the guide hole, 13 is the spherical surface of the tip shaped tip, 14 is the straight part, 15 is the threaded part, 16
is a spherical tip, 17 is a retaining ring, 19 and 21 are lids, 2,
0 is a groove, and 22 is a slot.

Claims

[Scope of utility model registration request]

It has a support base to which a silicon diaphragm type pressure sensor element is attached, a base into which the support base is press-fitted and protects the bonding wire of the element, a fitting part on one inner end on which the outer periphery of the base slides, and a fitting part on the other end on which the outer circumference of the base slides. a case having an escape hole portion smaller than the fitting portion and having a guide hole smaller than the escape hole portion in the center; an elastic body having an escape hole smaller than the escape hole of the case and at the center; It is in the shape of a needle tip and has a slightly spherical tip, and the center part has a straight part of the same size as the guide hole of the case,
a pressure rod having a threaded portion whose other end is larger than the straight portion and smaller than the elastic body relief hole, and a tip of the threaded portion has a spherical surface; a retaining ring for fixing the amount of movement of the pressure rod; In a pressure sensor consisting of a lid that is screwed onto a threaded portion of a pressure rod, two of the pressure rods are inserted into a guide hole of the case.
The straight part is slidably inserted and fixed in the case by the retaining ring, and the elastic body is installed in the threaded part of the pressure rod and the escape hole of the case, and the threaded part of the inner surface of the lid is fixed. By screwing the pressure rod into the threaded portion at the other end and compressing the elastic body, a slight gap is created between the pressure rod and the escape hole of the case, and the fitting part number of the case is A support base with a sensor element attached thereto is inserted, and the sensor element comes into contact with the spherical surface of the tip-shaped tip of the pressure rod, and the retaining ring press-fitted into the pressure rod and the pressure rod screwed into the threaded portion of the pressure rod are inserted. A pressure sensor characterized in that, by installing the elastic body between the lids, the initial moving load of the pressure rod can be controlled by changing the way the lid is tightened.