JPS60168012U - 水平位置検出サ−ボ系 - Google Patents

水平位置検出サ−ボ系

Info

Publication number
JPS60168012U
JPS60168012U JP5540084U JP5540084U JPS60168012U JP S60168012 U JPS60168012 U JP S60168012U JP 5540084 U JP5540084 U JP 5540084U JP 5540084 U JP5540084 U JP 5540084U JP S60168012 U JPS60168012 U JP S60168012U
Authority
JP
Japan
Prior art keywords
servo system
position detection
horizontal position
detection servo
bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5540084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0411130Y2 (enExample
Inventor
酒井　頴一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP5540084U priority Critical patent/JPS60168012U/ja
Publication of JPS60168012U publication Critical patent/JPS60168012U/ja
Application granted granted Critical
Publication of JPH0411130Y2 publication Critical patent/JPH0411130Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP5540084U 1984-04-17 1984-04-17 水平位置検出サ−ボ系 Granted JPS60168012U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5540084U JPS60168012U (ja) 1984-04-17 1984-04-17 水平位置検出サ−ボ系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5540084U JPS60168012U (ja) 1984-04-17 1984-04-17 水平位置検出サ−ボ系

Publications (2)

Publication Number Publication Date
JPS60168012U true JPS60168012U (ja) 1985-11-07
JPH0411130Y2 JPH0411130Y2 (enExample) 1992-03-19

Family

ID=30578038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5540084U Granted JPS60168012U (ja) 1984-04-17 1984-04-17 水平位置検出サ−ボ系

Country Status (1)

Country Link
JP (1) JPS60168012U (enExample)

Also Published As

Publication number Publication date
JPH0411130Y2 (enExample) 1992-03-19

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