JPS60166143U - 電子ビ−ム描画装置用カセツト - Google Patents

電子ビ−ム描画装置用カセツト

Info

Publication number
JPS60166143U
JPS60166143U JP5360084U JP5360084U JPS60166143U JP S60166143 U JPS60166143 U JP S60166143U JP 5360084 U JP5360084 U JP 5360084U JP 5360084 U JP5360084 U JP 5360084U JP S60166143 U JPS60166143 U JP S60166143U
Authority
JP
Japan
Prior art keywords
cassette
electron beam
beam lithography
lithography equipment
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5360084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541547Y2 (cs
Inventor
岩瀬　昭
章 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP5360084U priority Critical patent/JPS60166143U/ja
Publication of JPS60166143U publication Critical patent/JPS60166143U/ja
Application granted granted Critical
Publication of JPH0541547Y2 publication Critical patent/JPH0541547Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP5360084U 1984-04-12 1984-04-12 電子ビ−ム描画装置用カセツト Granted JPS60166143U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5360084U JPS60166143U (ja) 1984-04-12 1984-04-12 電子ビ−ム描画装置用カセツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5360084U JPS60166143U (ja) 1984-04-12 1984-04-12 電子ビ−ム描画装置用カセツト

Publications (2)

Publication Number Publication Date
JPS60166143U true JPS60166143U (ja) 1985-11-05
JPH0541547Y2 JPH0541547Y2 (cs) 1993-10-20

Family

ID=30574618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5360084U Granted JPS60166143U (ja) 1984-04-12 1984-04-12 電子ビ−ム描画装置用カセツト

Country Status (1)

Country Link
JP (1) JPS60166143U (cs)

Also Published As

Publication number Publication date
JPH0541547Y2 (cs) 1993-10-20

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