JPS60162515U - 薄形ｉｃのプリヒ−ト用搬送機構の駆動装置 - Google Patents

薄形ｉｃのプリヒ−ト用搬送機構の駆動装置

Info

Publication number
JPS60162515U
JPS60162515U JP4961884U JP4961884U JPS60162515U JP S60162515 U JPS60162515 U JP S60162515U JP 4961884 U JP4961884 U JP 4961884U JP 4961884 U JP4961884 U JP 4961884U JP S60162515 U JPS60162515 U JP S60162515U
Authority
JP
Japan
Prior art keywords
transport mechanism
drive device
preheating
cam
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4961884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH032493Y2 (enrdf_load_stackoverflow
Inventor
真庭　友由
風間　清二
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP4961884U priority Critical patent/JPS60162515U/ja
Publication of JPS60162515U publication Critical patent/JPS60162515U/ja
Application granted granted Critical
Publication of JPH032493Y2 publication Critical patent/JPH032493Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Reciprocating Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP4961884U 1984-04-06 1984-04-06 薄形ｉｃのプリヒ−ト用搬送機構の駆動装置 Granted JPS60162515U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4961884U JPS60162515U (ja) 1984-04-06 1984-04-06 薄形ｉｃのプリヒ−ト用搬送機構の駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4961884U JPS60162515U (ja) 1984-04-06 1984-04-06 薄形ｉｃのプリヒ−ト用搬送機構の駆動装置

Publications (2)

Publication Number Publication Date
JPS60162515U true JPS60162515U (ja) 1985-10-29
JPH032493Y2 JPH032493Y2 (enrdf_load_stackoverflow) 1991-01-23

Family

ID=30566987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4961884U Granted JPS60162515U (ja) 1984-04-06 1984-04-06 薄形ｉｃのプリヒ−ト用搬送機構の駆動装置

Country Status (1)

Country Link
JP (1) JPS60162515U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419674A (en) * 1977-07-15 1979-02-14 Fujitsu Ltd Checking mechanism of photo repeaters
JPS5644723U (enrdf_load_stackoverflow) * 1979-09-13 1981-04-22
JPS5732977U (enrdf_load_stackoverflow) * 1980-07-31 1982-02-20

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5419674A (en) * 1977-07-15 1979-02-14 Fujitsu Ltd Checking mechanism of photo repeaters
JPS5644723U (enrdf_load_stackoverflow) * 1979-09-13 1981-04-22
JPS5732977U (enrdf_load_stackoverflow) * 1980-07-31 1982-02-20

Also Published As

Publication number Publication date
JPH032493Y2 (enrdf_load_stackoverflow) 1991-01-23

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