JPS60162476U - 処理装置 - Google Patents

処理装置

Info

Publication number
JPS60162476U
JPS60162476U JP5044984U JP5044984U JPS60162476U JP S60162476 U JPS60162476 U JP S60162476U JP 5044984 U JP5044984 U JP 5044984U JP 5044984 U JP5044984 U JP 5044984U JP S60162476 U JPS60162476 U JP S60162476U
Authority
JP
Japan
Prior art keywords
processing equipment
processing case
humidifier
fill
vapor atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5044984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047747Y2 (enrdf_load_stackoverflow
Inventor
千明 大浜
Original Assignee
ミナト産業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミナト産業株式会社 filed Critical ミナト産業株式会社
Priority to JP5044984U priority Critical patent/JPS60162476U/ja
Publication of JPS60162476U publication Critical patent/JPS60162476U/ja
Application granted granted Critical
Publication of JPH047747Y2 publication Critical patent/JPH047747Y2/ja
Granted legal-status Critical Current

Links

JP5044984U 1984-04-06 1984-04-06 処理装置 Granted JPS60162476U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5044984U JPS60162476U (ja) 1984-04-06 1984-04-06 処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5044984U JPS60162476U (ja) 1984-04-06 1984-04-06 処理装置

Publications (2)

Publication Number Publication Date
JPS60162476U true JPS60162476U (ja) 1985-10-29
JPH047747Y2 JPH047747Y2 (enrdf_load_stackoverflow) 1992-02-28

Family

ID=30568590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5044984U Granted JPS60162476U (ja) 1984-04-06 1984-04-06 処理装置

Country Status (1)

Country Link
JP (1) JPS60162476U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH047747Y2 (enrdf_load_stackoverflow) 1992-02-28

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