JPS60158738U - 薄形ｉｃのプリヒ−ト用搬送装置 - Google Patents

薄形ｉｃのプリヒ−ト用搬送装置

Info

Publication number
JPS60158738U
JPS60158738U JP4516184U JP4516184U JPS60158738U JP S60158738 U JPS60158738 U JP S60158738U JP 4516184 U JP4516184 U JP 4516184U JP 4516184 U JP4516184 U JP 4516184U JP S60158738 U JPS60158738 U JP S60158738U
Authority
JP
Japan
Prior art keywords
transport device
thin
preheating
heat block
ics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4516184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238455Y2 (enrdf_load_stackoverflow
Inventor
真庭　友由
風間　清二
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP4516184U priority Critical patent/JPS60158738U/ja
Publication of JPS60158738U publication Critical patent/JPS60158738U/ja
Application granted granted Critical
Publication of JPH0238455Y2 publication Critical patent/JPH0238455Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP4516184U 1984-03-30 1984-03-30 薄形ｉｃのプリヒ−ト用搬送装置 Granted JPS60158738U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4516184U JPS60158738U (ja) 1984-03-30 1984-03-30 薄形ｉｃのプリヒ−ト用搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4516184U JPS60158738U (ja) 1984-03-30 1984-03-30 薄形ｉｃのプリヒ−ト用搬送装置

Publications (2)

Publication Number Publication Date
JPS60158738U true JPS60158738U (ja) 1985-10-22
JPH0238455Y2 JPH0238455Y2 (enrdf_load_stackoverflow) 1990-10-17

Family

ID=30558411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4516184U Granted JPS60158738U (ja) 1984-03-30 1984-03-30 薄形ｉｃのプリヒ−ト用搬送装置

Country Status (1)

Country Link
JP (1) JPS60158738U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0238455Y2 (enrdf_load_stackoverflow) 1990-10-17

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