JPS60155537A - Manufacture of optical fiber - Google Patents
Manufacture of optical fiberInfo
- Publication number
- JPS60155537A JPS60155537A JP1118984A JP1118984A JPS60155537A JP S60155537 A JPS60155537 A JP S60155537A JP 1118984 A JP1118984 A JP 1118984A JP 1118984 A JP1118984 A JP 1118984A JP S60155537 A JPS60155537 A JP S60155537A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- tube
- glass tube
- optical fiber
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01876—Means for heating tubes or rods during or immediately prior to deposition, e.g. electric resistance heaters
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【発明の詳細な説明】
(技術分野)
本発明は低損失の元ファイバを容易に製造する光7アイ
パの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a method for manufacturing an optical 7-eyeper that easily manufactures a low-loss original fiber.
(従来技術)
従来の光ファイバの製造方法としては、洗浄した石英ガ
ラス管を回転保持できるガラス旋盤にセットし、そのセ
ットした石英ガラス管の中へ反応原料ガスを導入し、そ
の外部から加熱掃引して、その石英ガラス管の内壁に光
ファイバのコアとクラッドとなるガラス膜を堆積させて
、その稜その石英ガラス管をムク状に中実化し、さらに
線引きして光ファイバを得る方法がある。一般に、光フ
ァイバを低損失にするためには、石英ガラス管内への外
気の不純物混入を防ぐことが重要である。(Prior art) The conventional method for manufacturing optical fibers is to set a cleaned quartz glass tube in a glass lathe that can be rotated, introduce a reaction raw material gas into the set quartz glass tube, and heat and sweep it from the outside. Then, there is a method of depositing a glass film that will become the core and cladding of the optical fiber on the inner wall of the quartz glass tube, solidifying the quartz glass tube at the edge, and then drawing it to obtain an optical fiber. . Generally, in order to reduce the loss of an optical fiber, it is important to prevent impurities from entering the quartz glass tube from outside air.
しかし、この製造方法の場合、石英ガラス管内の洗浄工
程と、その石英ガラス管をガラス旋盤にセットする工程
とで、外気の不純物が混入しやすい問題があシ、この不
純物が混入したままガラス膜を堆積すると石英ガラス管
内壁とガラス膜の間にその不純物が残存し、光ファイバ
の伝送損失に悪影響を及ぼすという問題がある。。However, with this manufacturing method, there is a problem that impurities from outside air tend to get mixed in during the cleaning process inside the quartz glass tube and the process of setting the quartz glass tube on a glass lathe. When such impurities are deposited, the impurities remain between the inner wall of the quartz glass tube and the glass film, and there is a problem in that the impurities adversely affect the transmission loss of the optical fiber. .
従来、この製造方法における石英ガラス管内の洗浄は、
石英ガラス管内にフッ化水素酸等のエツチング液を充満
させ、その石英ガラス管の内壁をエツチングし、次に水
洗、乾燥を行うものであった。しかし、このような洗浄
工程はエツチング。Conventionally, cleaning inside the quartz glass tube in this manufacturing method was
The quartz glass tube was filled with an etching solution such as hydrofluoric acid, and the inner wall of the quartz glass tube was etched, followed by washing and drying. However, such a cleaning process is equivalent to etching.
水洗、乾燥がそれぞれ独立した工程であるため、これら
各工程切9換え時に外気の不純物が混入しやすく、十分
に石英ガラス管内壁を洗浄することが困難であった。ま
た、この洗浄した石英ガラス管内壁を外気の不純物に触
れさせずにガラス旋盤にセットすることも非常に困難で
あった。また、この切多換え時やセット時に外気の不純
物が混入しないようにするためには、洗浄装置やガラス
旋損失の光ファイバを容易に製造できる光ファイバイバ
のコアとり2ツドとなるガラス膜を堆積する第1の工程
と、前記ガラス膜を堆積した石英ガラス管の横断面が密
になるように中実化する第2の工程と、前記中実化した
光フアイバ母材を線引きして光ファイバとする第3の工
程とを含む光ファイバの製造方法において、前記第1の
工程前に、前記回転保持された石英ガラス管の中に7フ
化物ガスを導入し、その石英ガラス管を加熱することに
よシ、その石英ガラス管の内壁をエツチングする工程を
付加したことを特徴とする。Since rinsing and drying are independent steps, impurities from the outside air tend to get mixed in when switching between these steps, making it difficult to thoroughly clean the inner wall of the quartz glass tube. Furthermore, it was extremely difficult to set the cleaned quartz glass tube inner wall in a glass lathe without exposing it to impurities in the outside air. In addition, in order to prevent impurities from the outside air from entering during switching and setting, a cleaning device and a glass film that will be used as the core of the optical fiber, which can easily manufacture optical fibers with glass torsion loss, are deposited. a second step of solidifying the quartz glass tube on which the glass film is deposited so that its cross section becomes dense; and drawing the solidified optical fiber base material to form an optical fiber. In the method for manufacturing an optical fiber, the method includes a third step in which, before the first step, heptafide gas is introduced into the rotatably held quartz glass tube and the quartz glass tube is heated. Particularly, it is characterized by the addition of a step of etching the inner wall of the quartz glass tube.
(実施例) 次に本発明について図面を用いて詳細に説明する。(Example) Next, the present invention will be explained in detail using the drawings.
図は本発明の詳細な説明する光フアイバ製造装置の構成
図である。図において、まず石英ガラス管1をガラス旋
盤2に回転保持されるようにセットする。次に、石英ガ
ラス管lの管内に、 CF。The figure is a configuration diagram of an optical fiber manufacturing apparatus for explaining the present invention in detail. In the figure, first, a quartz glass tube 1 is set on a glass lathe 2 so as to be rotated and held. Next, add CF into the quartz glass tube l.
十02ガスを供給ガス系3から導入し、その石英ガラス
管lを酸水素バーナ4によシ加熱する。このようにする
ことによj7、CF、は石英ガラス管内壁の8i0.と
反応してSiF4を生成し、この8iF。102 gas is introduced from the supply gas system 3, and the quartz glass tube l is heated by the oxyhydrogen burner 4. By doing this, j7, CF, is 8i0. of the inner wall of the quartz glass tube. This 8iF reacts with to produce SiF4.
が高温で加熱されることによって揮散する(エツチング
作用)。ここで揮散したSiF4は排気ダクト5によシ
外部へ排気される。vaporizes when heated at high temperatures (etching effect). The SiF4 volatilized here is exhausted to the outside through the exhaust duct 5.
このように石英ガラス管lをガラス旋盤2にセットした
後に、石英ガラス管1の内壁をエツチングするため、従
来のようにセット時に外気の不純物の混入があったとし
ても、その後石英ガラス管の内壁をエツチングするため
、混入した不純物は十分に排気される。またフッ化物ガ
スを利用して石英ガラス管内壁をエツチングするため、
従来のような水洗、乾燥の工程が必要なく、そのため外
気の不純物が混入しやすい切シ換え工程も必要としなく
なる。このように、石英ガラス管をガラス旋盤にセット
した後にエツチングすることができまた洗浄の切シ換え
工程が必要ないため、石英ガラス管内壁は十分に洗浄す
ることができるようになる。また、ガラス旋盤も従来通
9で良く、また洗浄装置も通常の光7アイノく製造装置
に7フ化物ガス供給系を備えるだけで良く簡単に構成で
きる。Since the inner wall of the quartz glass tube 1 is etched after the quartz glass tube 1 is set in the glass lathe 2 in this way, even if impurities from the outside air are mixed in during setting as in the conventional method, the inner wall of the quartz glass tube 1 can be etched. Since the etching process is performed, the mixed impurities are sufficiently exhausted. In addition, since the inner wall of the quartz glass tube is etched using fluoride gas,
There is no need for the conventional washing and drying processes, and therefore there is no need for a switching process that can easily introduce impurities from outside air. In this way, the quartz glass tube can be etched after being set on the glass lathe, and a cleaning switching step is not required, so that the inner wall of the quartz glass tube can be thoroughly cleaned. Further, the glass lathe can be a conventional glass lathe, and the cleaning device can be simply constructed by simply equipping a conventional optical manufacturing device with a fluoride gas supply system.
例えば、CF410x = 1 / 20のCF番+O
tガスを101005e、石英ガラス管内に流してエツ
チングしたところ、石英ガラス管内壁が10μm程度エ
ツチングされた。この程度の厚さがエツチングされれば
、石英ガラス管内壁の不純物は、十分に取シ去ることが
できる。For example, CF410x = 1/20 CF number + O
When etching was carried out by flowing t-gas 101005e into the quartz glass tube, the inner wall of the quartz glass tube was etched by about 10 μm. If the thickness is etched to this extent, impurities on the inner wall of the quartz glass tube can be sufficiently removed.
次に、この洗浄された石英ガラス管1の中にsio、+
o2の反応原料ガスを供給ガス系3から導入し、酸水素
バーナ4によって加熱することにより、石英ガラス管l
の内壁に光ファイバのクラッドとなるSiO!を堆積さ
せ、ついで5i(J4+GeCl4 + 02の反応原
料ガスを供給ガス系3から導入し、光ファイバのコアと
なる8 io、 + Gem、を同様に堆積させる。Next, in this cleaned quartz glass tube 1, sio, +
By introducing the reaction raw material gas of o2 from the supply gas system 3 and heating it with the oxyhydrogen burner 4, the quartz glass tube
The inner wall of the optical fiber is SiO! Then, a reaction raw material gas of 5i (J4+GeCl4 + 02) is introduced from the supply gas system 3, and 8 io, + Gem, which will become the core of the optical fiber, is deposited in the same manner.
次に、供給ガス系3からの反応原料ガスを中断して、酸
水素バーナ4によシ、石英ガラス管lをさらに高温にし
てその石英ガラス管1をムク状に中実化して光フアイバ
母材を得る。そして、その光フアイバ母材の一端を溶融
して線引し、光ファイバとする。Next, the reaction raw material gas from the supply gas system 3 is interrupted, the oxyhydrogen burner 4 is used, and the quartz glass tube 1 is further heated to a high temperature to solidify the quartz glass tube 1 into a solid shape to form an optical fiber. Get wood. Then, one end of the optical fiber base material is melted and drawn to form an optical fiber.
(発明の効果)
以上、説明したように、本発明の光7アイノ(製遣方法
によれば、石英ガラス管内壁を十分に洗浄することがで
きるので、不純物のない低損失な光ファイバを得ること
ができ、また光フアイバ製造装置も簡単に構成できる。(Effects of the Invention) As explained above, according to the manufacturing method of the present invention, the inner wall of the quartz glass tube can be sufficiently cleaned, so that a low-loss optical fiber without impurities can be obtained. In addition, the optical fiber manufacturing apparatus can be easily constructed.
なお、本実施例ではフッ化物ガスとしてCF4+0、ガ
スを用いたがこれに限定されずフッ化物のガスであれに
良い。また加熱源として酸水素バーナを用いたがこれに
限定されないのは明らかである。In this embodiment, CF4+0 gas was used as the fluoride gas, but the present invention is not limited to this, and any fluoride gas may be used. Further, although an oxyhydrogen burner was used as the heat source, it is clear that the heat source is not limited to this.
さらに、コア及びクラッドとなるガラス膜として810
@+GeO@及び5in2を用いた場合を説明したが、
これに限定されずP、 0. 、 B、0. 、 Fを
含んでも用い。Furthermore, 810 is used as the core and cladding glass film.
I explained the case using @+GeO@ and 5in2, but
P, 0. , B, 0. , can be used even if it includes F.
図は本発明の一実施例を説明する光フアイバ製造装置の
構成図である。図において
l・・・・・・石英ガラス管、2・・・・・・ガラス旋
盤、3・・・・・・供給ガス系、4・・・・・・酸水素
バーナ、5・・・・・・排気ダクト
である。The figure is a configuration diagram of an optical fiber manufacturing apparatus for explaining an embodiment of the present invention. In the figure, l: quartz glass tube, 2: glass lathe, 3: supply gas system, 4: oxyhydrogen burner, 5: ...This is an exhaust duct.
Claims (1)
るガラス膜を堆積する第1の工程と、前記ガラス膜を堆
積した石英ガラス管の横断面が窓になるように中実化す
る第2の工程と、前記中実化した光フアイバ母材を線引
きして光コアイノくとする第3の工程とを含む光コアイ
ノくの製造方法において、前記第1の工程の前に、前記
石英ガラス管の中にフッ化物ガスを導入し、その石英ガ
ラス管を加熱することにより、その石英ガラス管の内壁
をエツチングする工程を付加したことを特徴とする光フ
ァイバの製造方法。A first step is to deposit a glass film that will become the core and cladding of an optical fiber on the inner wall of the quartz glass tube, and a second step is to solidify the quartz glass tube on which the glass film is deposited so that its cross section forms a window. and a third step of drawing the solidified optical fiber base material to form an optical core. 1. A method for manufacturing an optical fiber, comprising the additional step of etching the inner wall of the quartz glass tube by introducing fluoride gas into the quartz glass tube and heating the quartz glass tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1118984A JPS60155537A (en) | 1984-01-24 | 1984-01-24 | Manufacture of optical fiber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1118984A JPS60155537A (en) | 1984-01-24 | 1984-01-24 | Manufacture of optical fiber |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60155537A true JPS60155537A (en) | 1985-08-15 |
Family
ID=11771115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1118984A Pending JPS60155537A (en) | 1984-01-24 | 1984-01-24 | Manufacture of optical fiber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60155537A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003505321A (en) * | 1999-07-16 | 2003-02-12 | ドゥラカ ファイバー テクノロジー ベー ヴェー | Method for producing a glass preform and optical fiber obtained from said preform |
CN104226654A (en) * | 2014-09-04 | 2014-12-24 | 江苏亨通光纤科技有限公司 | Device and method for cleaning quartz central tube in optical fiber ultraviolet curing furnace |
-
1984
- 1984-01-24 JP JP1118984A patent/JPS60155537A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003505321A (en) * | 1999-07-16 | 2003-02-12 | ドゥラカ ファイバー テクノロジー ベー ヴェー | Method for producing a glass preform and optical fiber obtained from said preform |
JP4885392B2 (en) * | 1999-07-16 | 2012-02-29 | ドゥラカ ファイバー テクノロジー ベー ヴェー | Method for producing glass preform and optical fiber obtained from said preform |
CN104226654A (en) * | 2014-09-04 | 2014-12-24 | 江苏亨通光纤科技有限公司 | Device and method for cleaning quartz central tube in optical fiber ultraviolet curing furnace |
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