JPS60155361A - Grinding machine - Google Patents

Abstract

PURPOSE:To promote high accurate grinding, by obtaining a distance between lattice points in the radial direction by the prescribed method, in the case of a circular surface plate in which a diamond pellet is glued to the lattice point being the intersection between concentric circles and radial lines equally dividing the periphery of the circle of the upper and the bottom surface plates. CONSTITUTION:A lattice pattern is formed by drawing concentric circles A-D to be ruled on a surface plate and arranging a pellet on points O, C, I crossing with radial lines (a)-(n) equally dividing the surface plate, but a distance between the concentric circles drawn to be ruled on the upper or bottom surface plate, that is, a lattice distance Pi is obtained as a function of radius ri on the surface plate by using any one of the logical expressions I , II, III, IV because uniform wearing can not be expected by geometrically arranging the pellet. Here the distance is shown by the function of the radius ri by showing in the expression hri for wearing height of the pellet in a position of the radius ri on the surface plate while Lri for a contact distance between the pellet in a position of the radius ri and a work. Further the expression shows Wri for a grinding load, received by the pellet in the radius ri, as the function of the radius ri, and Lri is determined by a shape of the work, assignment to a carrier and the radius ri.

Description

[Detailed description of the invention] Double-sided flat surface lapping is a process in which a carrier that can rotate automatically or revolves around an internal gear is positioned between surface plates that rotate in opposite directions, and a work piece is placed on this. The workpiece is ground to a predetermined precision by holding and rotating the workpiece, and uniformly injecting so-called free abrasive grains made of sized alumina etc. through multiple abrasive supply holes drilled in the upper plate to grind the workpiece to a specified precision. In order to finish to a predetermined surface roughness and parallelism, multiple steps of coarse grain, medium grain, and fine grain are usually required. In addition, if loose abrasive grains from each stage are mixed into the next process or later, it can cause scratches on the workpiece surface, so it requires a large amount of money to clean the workpiece after each process, and to control dust for the factory and operators. It had

Recently, abrasive grains such as diamond, which can compensate for the drawbacks of free abrasive grains, have been used for grinding small items such as lenses, etc.
So-called pellets, which are made of fixed abrasive grains that are uniformly fractionated into a powder and molded, are widely used. There have been no attempts to apply this to a double-sided wrapping machine that can handle large workpieces, but as of next month, no attempt has been made.

The present invention eliminates the drawbacks of grinding using loose abrasive grains,
The present invention provides a method for producing black ink that accurately grinds a workpiece that requires required characteristics in one step.

Conventional grinding using fixed abrasive grains has not been successful for the following reasons.

(1) In the case of free abrasive type, surface plate accuracy can be easily corrected,
By regularly performing this correction, it was possible to maintain the finishing accuracy of the workpiece relatively easily, whereas with the fixed abrasive method, specific pellets come into contact with specific locations on the workpiece, and individual pellets Because the frequency of contact between the pellet and the workpiece varies, it is inevitable that the pellet wears unevenly over time, and the repair work is difficult, and moreover, the local abrasive grains are consumed during the repair. It becomes a cost cylinder.

(2) Since there is a gap between the pellets, the workpiece gets caught in the gap, resulting in chipped or cracked edges.

To avoid this, there is a method of filling the space between the pellets with a sealing material such as resin so that they are on the same plane, but this increases the contact surface with the workpiece, which increases the machining resistance and requires a large amount of power. Not only is the workpiece stable, but when the workpiece is attracted to the surface plate and the upper plate is raised to take it out, the workpiece attracted to the upper plate may fall down and be damaged, or the workpiece may not be attached or detached. Problems such as difficulty arise.

(3) With free abrasive grains, if the sharpness deteriorates, the cutting gong can be easily restored by replenishing new grains, whereas with pellets, the cutting tool relies on the self-generating action9. If it fell off, you had to use a certain method to dress it, and there was no good way to do it.

(4) The accuracy of the machine and surface plate is
In the case of fixed abrasive grains, which may be lower than 4 degrees, mechanical precision is required in accordance with the n' degree of the workpiece, but no measures have been taken to make this possible.

(5) As for fixation, there was no grinding oil that was lost to the grains, and stable grinding was not performed.

(Mo) In the case of the fixed abrasive type, there are many factors that affect the saw 248 degrees and the shadow 2J is much smaller than in the free abrasive type, but there is no 'JAi lft that can suppress each of these factors, and there is no JAi lft that can suppress each of these effects. It has not yet been quantitatively understood.

The inventors took into consideration the problems listed above, and as a result of researching the popular method of double-sided grinding using fixed abrasive grains, they found that the method does not compensate for the shortcomings of the free abrasive method, and is far more effective. We have developed a method for grinding and handling workpieces to a fixed degree using a simple process.

Generally, the grinding machine that processes the pellets using a surface plate has often been converted into a double-sided lapping device using free abrasive grains. Since the surface plate of the lapping device processes the work while the abrasive grains rotate or move linearly between the workpiece and the surface plate, uneven wear and deformation of the surface plate processing surface occurs. Above each time.

Corrections have been made so that the machined surfaces of the upper and lower boards are in close contact, such as by aligning the lower boards.

However, in the case of a surface plate with pellets stuck to it, resonance cannot occur if uneven wear occurs on the pellets, similar to the above-mentioned loose abrasive method. Where the bullets are attached to the surface plate in a pattern arranged to wear them evenly, H
It is preferable to have a structure with 19 laminated patterns. Various methods have been considered for this purpose, and among them, a substitute method is one that takes into consideration the probability that the workpiece and the pellet will meet each other to be equal. However, even with this pasting pattern, the problem is still far from being solved. Therefore, the inventors investigated the factors that promote uneven wear of the pellet, and found that the contact distance between the workpiece and the pellet,
The relative speed when the workpiece and the pellet come into contact, the grinding speed which acts on the pellet) have a very strong influence and are dominant), Equation (1), (n), (g), QV)
0 h(rl)=a+bL(r 1)V(rt)''(ri
) ”' (■)h(ri)=c+dL(rl)-V(
ri)+eL(ri)-W(ri)-anh(ri)=
f +gL(ri)+kV(rl)+5'(1N)+
++ (B) h(ri)=m + rlL(rt)・W
(rt) - (V) Here, 2''i in 6 in the formula will be explained.

h(ri) is the height of the pellet at the position of Ushizumi ri on the surface plate 0 L(rl) is the contact between the pellet and the workpiece at the position of radius ri on the surface plate It represents the distance and is expressed as a function of the radius ri.

W(r l) represents the grinding 4'tr stop experienced by the pellet at radius rl and is expressed as a function of radius ri.

L(ri) is determined by the shape of the workpiece, how the workpiece is allocated to the carrier, and rl. Specific examples of L(rl) and ■(rl) are shown below.

Specific example of L(rl) When machining a 5-inch square workpiece with a surface plate diameter of 1120 n7 mφ, the relationship between the contact length with the workpiece at the radius rl is approximately measured as shown in FIG. 18.

Specific example of V(rl) When the surface plate diameter is 1120 mm and the workpiece is rotating and revolving, the relative speed of the workpiece and the pellet is 1,000'&
The relationship with r i varies depending on the number of rotations of the surface plate, but is approximately as shown in FIG.

a, b, e, d, e, f, g, j, l, m.

n represents a coefficient determined by the shape and shape of the pellet, and the material and shape of the workpiece. These coefficients are easily determined by the ωF cutting test. Also, expression (■), hit, (2), (i
V) represents the wear height of the pellet at the position of radius 11 per unit time, and W(r 1 ) is set so that each curve h(rt) is constant. Since W(r 1 ) is inversely proportional to the density of the fixed number of pellets arranged at radius ri, the lattice spacing (Pl) can be calculated.

In other words, the lattice holes and turns of the present invention are created by overwriting concentric circles on the surface plate, and creating radial lines (a, b, c) that divide the board into equal parts.
.

...) At which intersections should the pellets be placed? Simply geometrically speaking, 1) If they are arranged in a grid pattern at the intersection points, it is impossible to expect uniform wear; The interval between the concentric circles, that is, the lattice interval (Pt) overwritten on It is possible to do so. Naturally, depending on the dimensions of the pellet, there may be cases where the interstitial spacing 11t, 4 cannot be made short, especially at the constant-gain inner periphery, but in this case, the inner periphery is arranged concentrically and It is also possible to mix it with a 4/6 child pattern.

As an example of the present invention, metal punt diamond pellets with a diameter of 20 wn were added to a four-way type double-curved lapping machine with a board diameter of 1200 wn, and a lower board with a diameter of 1,460 yen each.
We pasted them one by one, ground the plate glass, and tested the surface plate precision for y. First, we pasted them based on the formula ω. In the middle turn, the precision of the machined surface of the pellets was not good as shown in Table 1. However, formulas (1) and (II).

In the pattern pasted based on the side, the variation in the wear height of the toe is within approximately 3 μm, and the wear is extremely uniform.
The accuracy of the surface plate is maintained at a high level even after a machining time of 1000 minutes. In particular, with the pasting pattern based on formula (1), as shown in Table 2, even after 3,000 minutes of machining time, the precision of the machined surface is maintained at an extremely high level of 2 μm, and even after 5,000 minutes of machining time, the accuracy remains very high. It would be possible to enshrine it.

The method of designing a pasting pattern in the present invention is easy and extremely reliable. According to the present invention, the non-uniform wear that has been a problem in the past can be solved, and multi-stable double-sided machining can be realized over a long period of time in which highly accurate machine maintenance is possible.

Next, regarding the surface plate warping, the conventional tL abrasive wrapping device allows the upper plate to be flexible, making it possible to achieve machining accuracy of 8H degrees or higher. Unique look 4 but 1"i
On the other hand, in a double-sided grinding machine that uses pellets as identified abrasive grains, the flexibility of top packing acts as a negative security.

In other words, since the abrasive grains are fixed on the surface plate, even if there is a slight storm level on the upper plate, the pellet machined surface and the workpiece may come into contact with each other, or the above-mentioned workpieces may not come into contact with each other at the same time. When machining, the thickness of the workpiece becomes unbalanced, and the parallelism deteriorates, causing damage to the workpiece. As mentioned above, the use of the UU flapping device plate for double-sided lapping loading is not only due to the structural problem of the flexibility of the upper plate, but also to the flexibility of the surface plate. Because the accuracy was insufficient, it was impossible to process with satisfactory accuracy.

In particular, if the flatness of the surface plate is poor, when the pellets are pasted, ridges will form on the pellet machined surface, impeding the machining accuracy. Static balancing of the surface plate not only improves the rotation speed of 44K, but also has the effect of preventing unbalanced loads from being applied to the workpiece.

Inventor Ai believes that the cause of the above problem is the precision of the foot.
In particular, if the value exceeds the static balance that guarantees flatness and rotational accuracy, the parallelism of the workpiece will become unstable, causing chipping, etc.
It was found that damage such as cracks was multiplied. Li+
1. First of all, regarding the flatness of the surface plate [111], if the flatness of the surface plate for pellets exceeds 50 μm, it will take a lot of time to correct the pellet processing surface, and This is not preferable because a large loss is incurred due to the wear of the pellet, and it is preferable to adjust the flatness according to the diameter of the surface plate. For example, if the diameter of the surface plate is less than 1800mm and less than 1500mm, it is 50μm.
flatness of 30 μm from 1,500 m to 800 mm, flatness in the range of 30 μm to 10 μm, and further 8
It is preferable that the flatness is 10 μm or less in the range of 00W or less and 500W or less.

Figure J1 shows the reference position for surface plate accuracy measurement. Naturally, the more measurement points there are, the better.

In addition, static balance is achieved by attaching a rotary plate 3, which is extremely accurately balanced, to a surface plate 4 shown in Fig. 1, which is integrated with a shaft 2 that rotates via a bearing 1 as shown in Fig. 2.
FA'12, either by attaching a weight to the surface plate or by removing the thickness with a drill. For static balance, even if a torque of 50 gm is applied, it will remain stationary at any position, and the above method will be used until it stops rotating.
JM.

By applying the surface plate according to the present invention to a conventional lapping machine, damage such as deterioration of workpiece parallelism, chipping, and cracking of the workpiece, which are problems in the previous IC processing, can be reduced. The third example shows the results of applying the inventive formula to a 15B double-open shipping machine and performing double-sided grinding as a 4-year-old machine.It was clear that the accuracy of the surface plate per revolution was improved and a more stable workpiece could be ground. There is. This processing example has a surface plate diameter of 1200 t.
The above pellets were attached to a surface plate with a maximum flatness of m% flatness of 2 river meters, and 1000 pieces of back plate glass were processed.

No. 3 Even if the accuracy of the surface plate is within the allowable accuracy, contact with the workpiece can be achieved with a pellet, but there are problems with the dimensional accuracy of the pellet itself and the adhesive accuracy when pasting it on the surface plate. It goes without saying that, for example, in a foot section with a diameter of 1200 m, even if approximately 1600 pellets are pasted on a surface plate finished with madder precision, the precision of the machined surface of the valley pellets will be maintained on the order of microns. This is extremely difficult, and is also due to the fact that the above-mentioned lapping method employs a correction method based on the resonance of the lower plate, which is impossible, and there is no suitable correction method.

As described above, it is extremely difficult to maintain the accuracy of the milled surfaces of Mi pellets, but as a result of investigating the cause of the accuracy of the milled surfaces, the inventors fixed the four reeds and the surface plate. It was discovered that this was due to the expansion and contraction of the adhesive material. The third diagram shows the structure of the pellets glued to the surface plate.
As shown in Figure (a), adhesive 6, for example, epoxy resin adhesive, is applied to the surface plate 4 finished with surface accuracy, and the pellet 7 is identified as being ideally fitted. Indicates the condition.

However, in reality, there is a slight difference in the thickness of the 91 adhesive material (1) in which the adhesive material bulges around the pellets, and the length M (d) between the pellets is 1.3. figure(
Shown in b). The above minute dimensional differences are caused by temperature changes during processing.
Due to the influence of temperature changes when processing is stopped, as shown in Figure 3(e), the expansion and contraction of the contact layer becomes uneven, and the processed surface of several pellets fixed to the contact layer becomes uneven. Induces unevenness or inclination, which affects the precision of the pellet processing surface.

Even when machining is performed in a state where the accuracy is not high enough, the machining accuracy deteriorates, and a large number of pellets do not come into contact with the workpiece, causing a decrease in machining efficiency.

In addition, the inventors proposed a method to control the expansion and contraction of the adhesive by keeping the temperature of the adhesive and coolant at the same level.
It has been discovered that the accuracy of the pellet machined surface is most stable when the temperature is within ±1°C.

An embodiment of the present invention will be described below with reference to FIG.

In this example, a non-contact temperature sensor 13 is used as a detector for the temperature of the surface of the adhesive. Further, a thermocouple thermometer 14 is used as a detector for the temperature of the grinding fluid.

The difference between the temperatures detected by the respective detectors 3 and 4 is calculated by the compensating means 6. Depending on the temperature difference, the magnet balgos 19c and 19h, which are controllers, are activated. If the temperature of the adhesive is higher, 19C is activated and cooling pipe 1
7 communicates with the heat exchanger 15. In the opposite case, 19h is activated and the heating pipe 18 communicates with the heat exchanger 15.

In the present invention, as described above, the adhesive temperature and the grinding fluid temperature are adjusted to be equivalent.

Another problem with conventional free abrasive double-sided double-sided tubbing equipment is controlling the amount of machining on the upper and lower surfaces.

In general, when precision machining of glass, quartz, ceramic, etc. is performed using a fixed abrasive type double-sided grinder that fixes pellets on the upper and lower discs, it is important to adjust the grinding amount of the upper disc and the grinding amount of the lower disc wisely. , the difference in the amount of grinding between the upper and lower disks due to wear and deformation of the pellets, the difference in grinding of the lower disk due to slight differences in the R-turn of the pellet attachment, and the grinding resistance of the upper and lower disks. WF t:lJ amount difference occurs, so above,
Tabata's goal was to reduce the amount of grinding on the lower plate and equalize the amount of processing on the top and bottom surfaces of the workpiece. Especially for glass, quartz, etc.

If the amount of grinding on the bottom surface was different, it would be significantly deformed and cause flatness. To avoid this phenomenon, a method has been empirically adopted in which the machine is stopped during processing and the direction of the workpiece is reversed several times to ensure workpiece accuracy. As a result, there were problems such as a decrease in production efficiency due to a decrease in the operating rate, and an unstable yield because it was based on empirical results.

The present invention provides a grinding machine in which the grinding amount of the upper and lower discs of the double-sided grinder is equalized, in order to solve the above-mentioned problems, ensure work precision without stopping the machine, and improve production efficiency. .

The present invention will be explained in detail with reference to FIG. As mentioned above, the difference in grinding between the upper and lower discs can be interpreted as a change in grinding resistance, and the change in grinding resistance between the upper and lower discs is due to the current value of the original ig II machine installed separately on the upper and lower discs. It appears as.

Here, as a method of equalizing the grinding lids of the upper and lower discs, the present invention proposes that the load commutation (Al and A2) of the prime movers provided separately on the upper and lower discs is transferred to the needle side, and the electric current U1c value ( Ato and A20) so that the differences (ΔAl and ΔA2) are always equal.

It is characterized by controlling the rotation speed of the lower plate.

Further, one embodiment of the present invention will be explained in detail with reference to FIG.

FIG. 6 is a block diagram showing a double-sided grinding machine and a control device according to this example. The double-sided grinder has a prime mover 2 which is the first driving means.
Drive 1 & IJj7! , the upper plate 4& is rotated via the binding reducer 5, and the prime mover 22, which is the second driving means, is configured to similarly rotate the lower plate 4b via the reducer 26. An air cylinder ''27 is installed so that the amount of grinding 1 can be applied. An A/D converter 30 that converts A2 into a digital quantity, and a microcombination unit that is a calculation means that subtracts the input signals from each converter using a non-negative Idf-group and calculates the magnitude of the difference. Evening 3
1, a motor controller 32 and 33 which are control means for receiving control signals from a microcomputer 31, M, and a motor controller 32, 33 for controlling current to the motor and controlling the rotational speed. Figure 2 shows the motor controller (to,
E) are set up separately for each, but is this the unbearable upper and lower board?
The magnitude of the actual load currents ΔA1 and ΔA2 after subtracting the 8J current (Ato and Ago) is calculated by the microcomputer
When compared, for example, it is possible to control the rotation speed of the other surface plate based on the rotation speed of the surface plate with a larger current, and the other is configured to match either the upper or lower plate. This also has the advantage of simplifying the control system.

As described above, the present invention calculates the amount of grinding of the upper and lower plates by using a microconbeater to calculate the actual negative 18J current (-load current - no-load current) required for machining each prime mover, and controls the rotation speed of each prime mover. It is characterized by:

According to the present invention, the processing in the upper and lower directions can be controlled with high accuracy on the order of lid microns, and there is no need to change the reversal direction of the workpiece as described above, and it is possible to perform processing without deforming or stacking the workpiece. Fixed abrasive grains used in grinding systems include:
An example of this is the Takujo Diamond. Since diamond can be ground with hard abrasive grains, theoretically it should be possible to grind any material other than diamond by using these pellets. However, in reality, it is difficult to maintain a balance between the abrasive holding power and processing resistance, and phenomena such as abrasive grains falling off, embedding, and stickiness occur, making continuous processing unnecessary. It was possible. As a method to overcome this drawback, in addition to oil-based cutting oil such as light oil, in order to control machining resistance, promote the self-growth of abrasive grains by moderate abrasion of the matrix, and prevent heat generation at the N111J machining point, Emulsion type grinding oil, water-soluble grinding oil, etc. are used. However, since all of these commercially available grinding oils are unsatisfactory for grinding difficult-to-grind materials, these
There was no choice but to resort to large-scale, cost-effective methods such as using a large load plate to grind the material.

In order to solve these IgJ problems, Hikari's Nagegome divided the 9L elephant during grinding into Kozue cloth, and as a result, developed a sulfonate-type anionic field II]J activator and an ether-type nonionic surfactant. The addition of alkanolamine, etc. as an essential ingredient is effective in improving machinability, increases the sharpness of the pellet, and prevents contamination of the pellet surface during polishing and grinding operations, while improving the grinding condition. New knowledge was obtained that the grinding resistance is small and the machined surface has a small fibrous layer and a high-quality surface can be obtained. This new finding, which has not been recognized at all in the past, forms the basis of the present invention.

When a sulfonate type anionic surfactant alone or an ether type nonionic surfactant alone is used in combination with a component such as an alkanolamine, the result of grinding H' is unsatisfactory.

In the present invention, a sulfonate type anionic surfactant and an ether type nonionic surfactant are essential ingredients, and an alkanolamine etc. is added thereto, which is effective in improving grindability, increases the sharpness of the grindstone, and polishes and grinds it. A new finding was obtained that it completely prevents the dirt 1 from contaminating the area surrounding the grinding wheel during work, and on the other hand, since the grinding condition is good, the cutting resistance is small and the processed surface is less likely to deteriorate, resulting in an excellent surface. This new knowledge has not been reported at all in the past and is the basis of the present invention.

When a sulfonate type anionic surfactant alone or an ether type nonionic surfactant alone is used in combination with a component such as an alkanolamine, the result of grinding H' is unsatisfactory.

In the present invention, a sulfate type anionic surfactant and an ether type nonionic surfactant are essential components, but the following are suitable as other components. That is, as a lubricant, polyhydric alcohols such as ethylene glycol and glopylene glycol, alkali salts of carboxylic acids of 60 or more such as oleic acid removers, lubricants such as CMC, PVA, and PVP are used.
Blue water bathing molecules are preferred.

1,3.5-hexahydrotrianone is used as an anti-fouling agent. I'I! ] The foam contains an excessive amount of silicone molecules such as polymethylsiloxane or polyoxyalkylene glycol conductors. Moreover, EDTA NTA is preferable as the chelate compound.

The present invention generally applies to ether-type nonionic fields [III Tomari, Note AII O15~
15 Oleic Potassium 0.5-5% Triethanolamine 1-10% Propylene Glycol 5-15N Water Balance) υ combination. All wt%.

As a sulfate type ionic surfactant, 1 to 10
1 is preferred, and 4 to 6 are more preferred, and for example, the following are used.

sodium alkanesulfone) (SAS) linear alkylbenzene sulfone p7-ta (LAS)
) Alkyl Benzene Sulfone Soda (ABS)
The ether type nonionic surfactant preferably has a ratio of 1 to 10, more preferably a ratio of 2 to 5, and examples of the following are used.

Polyoxyalkylene ether nonylphenyl ethoxylate polyoxyethylene-poyoxypropylene ether Next, a specific method of carrying out the present invention and young fruits will be described in detail.

This mixture is accelerated, and unless used for repeated grinding, 1
Dilute it 0 to 100 times and use it as Tanzaru A-oil.

Grinding l-1lJ test grinding conditions Grinding machine Lens polishing machine Pressure 6.3y7cm2 Number of revolutions 1l100rp Grinding stone Metal? Diamond Whetstone Whetstone Shape
12φX3t 111 Error 40 times Material to be ground α-At20, 60φ The test results are shown in Figure 7.

As seen in the results, it can be seen that the grinding fluid according to the present invention exhibits a wear effect.

Also, as a shrine of 1 t'> IJ, Zaphia, St, N4
．． It has been found that this method is also effective against hard and brittle materials made of SiC.

Double-sided paper processing machine, Yu
Similar findings were obtained.

Table 4 Even after taking all of the above countermeasures, it is difficult to prevent the pellet surface plate from collapsing. In such a case, the joint correction will be carried out by attaching a small correction whetstone to a carrier made of iron or the like.

Conventionally, the above-mentioned pellet surface plate has been modified by attaching hollow circular resinoid thread bond grindstones to the carrier in a concentric circle as shown in Fig. 8, or by making them eccentric from the center of the carrier as shown in Fig. 8149. It was customary to use 4U as a regular grindstone, but in the correction grindstone shown in Figures 8 and 9, the pellets placed in the center of the pellet rack are placed on the inner and outer peripheries. Since the contact length of the pellet with the grinding wheel is small, the inner and outer peripheral pellets wear out quickly. I noticed a tendency for the central part to have a raised shape as shown in Figure 1. Therefore, it is extremely difficult to obtain the axiality of the pre-we diamond pellet by one ridge correction at a constant temperature.
M! The present invention has been made to solve the above four problems. This is a (Ii6 regular grindstone) for repairing a diamond pellet surface plate, which is characterized by being fixed to a carrier with different lengths in the vertical and horizontal directions.

That is, in the present invention, in order to equalize the abrasion of the inner and outer breast pellets of the surface plate and the medium-heat part pellets, the contact length between the inner and outer pellets of the surface plate is made smaller inside and on the outer periphery of the surface plate. In addition, the central part of the surface plate is elongated (b
) and the short axis (al).

Embodiments of the present invention are shown in FIGS. 11 to 17.

Figure 11 shows a comparison of the data with the original product (shown in Figure 9) using a grindstone for correcting holes.

The results are shown in Section 5@.

According to the present invention, the constant temperature can be corrected to the desired axis degree in the tj+ period in a short manner.

Each of the conditions constituting the invention has been described in detail9 above, but a grinding system that satisfies all of these conditions, or some of them depending on the requirements of the workpiece, is based on conventionally used equipment and has appropriate settings. It must be said that the significance of this is extremely significant, as it means that grinding with extremely high precision can be performed at low cost by performing grinding.

Further, although the description is mainly about double-sided grinding, the fact that it can be easily applied to single-sided grinding equipment is also an advantage that cannot be overlooked.

A simple direct cut of Figure 4 ifo Figure 1 is a diagram showing the level of the flat Ll 11 degree t of the surface plate. FIG. 3 is a cross-sectional view of the vessel which illustrates the wetted state of the pellets. Figure 4 is a conceptual diagram of how to do the heating and heating yourself. Figure 5 is Ken I!
FIG. 6 is a graph showing the relationship between llJ time and shell current, and is a conceptual diagram of the structure for controlling the amount of grinding Aij.

Figure 6147 is a graph showing the relationship between the polishing agent and the polishing agent. FIGS. 8 and 9 are flat diagrams showing conventional correction grindstones. FIG. 10 is a sectional view showing the state of correction using the grindstone. FIG. 11 to FIG. 17 show the correction grindstone according to the present invention from the plain to the cape. Figure 18 shows L(
Figure 19 is a graph showing a specific example of V(rI).
It is a graph showing a specific example of i).

1: Bearing bearing, 2: Shaft, 3: Rotation gain for foot plate default, 4: '1MX4 a: Soil foot m54b: Lower surface plate, 5: Frame, 6: Adhesive, 7: Pellet, 11: Flat curved iυF f (14 machines, 12: Grinding oil supplier, unit,
13: Detector (non-contact B/upper type temperature sensor), 14:
4 Tue uVQ (sk'a vs marl') s 15
: Netsuchihoki 116: Akihito 10th dan, 17: Municipal piping, 1
8: Heating arrangement 7m, 19c, 19h: Magi-it valve, 20: Warming/slight shoulder j straight, 21: Flul drive-i
= stage (motor), 22: second drive stage (motor), 25
゜26: Deceleration 1 jin, 29, 30: A/iJ 笈houki, 31
: Ensho Bow/Dan (Micro Combita), 32.33:
City 1” Hiroguchi Tsuki/Limbs (motor control), Ini outer line, Ro: Average middle IL? M, C: Inner circumferential line, 22 release-like division -
〇Figure 1 Figure 2 f! 13 Figure 4 (b) A Figure 4 10 - 田 5 箪 6 Figure 7 Test Islam @ 8 Figure f! 9 Figure 10 @ Old figure 11 (innermost layer) (outermost layer) rC=-□ Figure 19 Or+ rc rn Procedural amendment April 25, 1985 Manabu Shiga, Commissioner of the Japan Patent Office Incident display Patent Application No. 59-11097 2 Name of the invention Grinding machine 3 Relationship to the supplementary case Name of patent applicant (618) Mitsui Mining Mining Co., Ltd. Name Yachiyo Shokai Co., Ltd. 4 Agent address Toranomon 5, Minato-ku, Tokyo Chome 13-1 Toranomon 40 Mori Building Scope of claims, Detailed Description of the Invention, Brief Description of Drawings, and Drawing 6 Contents of Amendment (1) The scope of claims of the Specification is as attached. correct.

(2) "Automatic or" in the bottom 5th line of page 4 of the specification box is corrected to "rotation or."

(3) "Sized grains" in the bottom third line of page 8 of the specification is corrected to "selected fine grains."

(4) “Cleaning, factory” in page 5, lines 4-5 of Ming Ml.
"Cleaning and factories," he corrected.

(5) In the 5th line of page 1 of the specification, change ``to require, etc.'' to ``
"It's necessary," he corrected.

(6) "Method" on the bottom 5th line of page 8 and the bottom 2nd line of page 7 of the specification is corrected to "grinding machine."

(7) "Cutting view" in "Page 8 bottom line 1" of the specification is corrected to "Grinding amount."

(8) "Work accuracy" on page 1, line 5, line 6, lines 6 to 7, and line 8 under U, is corrected to "leak precision".

(9) Page 8 bottom line 5 of the specification, page 10 line 5 and 2
4 Correct "inventors" in the 7th line directly below to "Inventor etc."

(lO) "To process" on page 1, line 5 of the specification is corrected to "J for processing."

(11) Page 8 of the specification, bottom 7 lines, page 1 o, bottom 3 to 2 lines, page 10, lines 5 and 6, page 13, table 1, 2
``Abrasion'' on page 4, line 6, line 9 and line 8 just below page 30, and line 6 of page 31 is corrected to ``r wear''.

(12) "Plet" on page 8 of the specification [line 6, line 1] is changed to "pere-nt".

(13) Add the following sentence between page 8, line 4 l of the specification and the bottom third line.

rV(r;) is the relative speed when the pellet contacts and processes the workpiece at the position of radius ri;
It is expressed as a function of i. "(14) Specification page 10 line 5 IJ (7) rl120m/mφ" to rl120mm
Correct it to J.

(15) Change “with radius ri” on page 10, line 5 of the specification to [
The above-mentioned beret located at radius ri,'' is corrected.

(16) “Speed” in lines 2 to 1 directly below No. 14 of the specification is changed to “
"With speed," he corrected.

(17) rg, j in "l" on page 10, bottom 7 lines of the specification.

Correct "k" to "rg, k".

(18) Correct "constant" in the second line of the first line of the specification to "constant for all i".

(19) Specification Section, page 11, line 3]] to line F6 are corrected as follows.

[That is, the lattice spacing (P,) is expressed as Equation (I).

(II), (m), (IV) as a function of the radius ri of the surface plate], and based on this, mark concentric circles on the surface plate, and divide the surface plate into equal parts on each day. The pellet is placed at some or all of the intersection points with the rays. It is preferable to attach the pellets in a grid pattern at the intersection points.

An example of a surface plate having such a pellet pasting pattern is shown in the second example.
Shown at 0V. ” (20) Ming + 1 [Book 11, page 12, lines 1-3, “First of all...
(21) “Double-sided/e...
When used as a fixed abrasive double-sided grinder,
"The upper board has flexibility," he says.

(22) Specification Section, page 15, bottom line 1, and page 19, line 6
In lines 1 and 3, ``within 1'' is corrected to ``1 or more''.

(23) Page 16 of the specification, line 1 l,” and lines 2 and 3 are corrected to read “hereinafter, J is less than 1.”

(24) In the 18th negative 8th line of the specification, "It depends" is corrected to "It depends".

(25) "Tosito" in "Page 19, line 6, l" of the specification is amended to "to".

(26) “Each detector 3.4
--...Calculating means 6'' is corrected as [The temperature detected by each detector 13 and 14 is corrected as operator stage 16J.

(27) "Pargo" in the third line of the first letter of the specification is corrected to "valve."

(28) On page 22, line 4 of the specification section, “Drive source and deceleration IJ”
¥5" is corrected to "drive source and reducer 25."

(29) IJII Specifications, page 22, bottom 3rd line - bottom 2nd line “
In Figure f52, ``Rollers (He, E) are placed separately'' is corrected to ``In Figure 6, the motor controller of the surface plate is placed separately''.

(30) “Puta (to)” on page 16, line 1 of the specification
Correct it to ``by computer''.

(31) In the Specification Section, page 23, line 6, "benefits also" is corrected to "benefits".

(32) Specification power Page 29, bottom 3rd line, Y Nao Beret” was changed to “After the grinding between the long poems, it was Pele.

"To," he corrected.

(33) “To solve
``Surface grinding'' is corrected to ``IL surface grinding to solve the problem.''

(34) "Shutome Whetstone" on the 16th line of the specification is corrected to "Correction Whetstone."

(35) "Outer periphery" in lines 5 and 8 of page 31 of Specification fJ is corrected to "outer periphery."

(36) "Data" in the negative 8th line of the 18th line of the specification is corrected to "Data".

(37) In the 5th line of page 34 of the specification section, after ``It is a graph.'', the following is corrected: ``Figure 20 is a diagram showing the turn of attaching a pellet to a surface plate.''

(38) Revise Figures 5, 18, and 19 as attached.

(39) Add attached Figure 20.

Claim 1: A pellet is pasted on each opposing surface of a rotary soil foot plate and a lower surface plate, a workpiece is held between the pasted pellets by a carrier, and pressure is applied by the upper surface plate or the lower surface plate. Place it on the upper surface plate.

In a pellet-type double-sided grinding machine that rotates a lower surface plate and a workpiece in predetermined directions, the upper surface plate and lower surface plate divide the circumference equally into a concentric circle with radius rl (i is a positive integer: column number). Pellet-type double-sided grinding is a circular surface plate in which diamond pellets are attached to some or all of the lattice points that are the intersection points with the radiation, and the radial lattice point spacing Pi is determined by the following procedure. Machine.

1) From either equation (1) or equation ω below, calculate W(r
1).

h(ri) = a+bL(rl)'V(rl)W(rl
) =il)h(rl)=c+dL(rl)V(rl)
+eL(rl)W(rs)...(11)h(rI)=f
+gL(rl)+kV(rl)+H(rl) ・=@)
h(rl)=m+nL(rl)W(rl)-φθ(here h(rl), L(rl), VCrl) e
W(rl) is the wear height of the pellet stuck on the first concentric circle, the contact distance with the workpiece, and the relative distance when the pellet stuck on the first concentric circle from the center contacts the workpiece and is processed. Speed, grinding load, a, b
, c, d, e, f, g, l, m, n are constants specific to the hardlet and the workpiece. ) ii) W(rl)=α
Calculate Pi using the relational expression /(Bellet density). (
α is a coefficient specific to Beret. ) 2 The flatness of the upper surface plate and lower surface plate is determined when the diameter of the surface plate is 180 mm.
0gI11 or less 1500m+i or more ±50μm
Within, ±30μ if less than 1500mm and 800 or more
m or less, ±IOμm when less than 800w and 500 or more
A grinding machine according to claim 1, characterized in that the grinding machine has the following characteristics:

3 Static balance of upper surface plate and lower surface plate is 50g
-m or less, the grinding machine according to claim 1 or 2.

4 A heating/cooling device that heats and cools the grinding fluid; A detector for detecting the temperature of the surface of the adhesive; A detector for detecting the temperature of the grinding fluid; According to any one of claims 1 to 4, the method is provided with a calculation means for calculating the difference in temperature; and a controller for controlling the heating/cooling device so that the temperature difference becomes zero based on the calculation result. Grinding machine as described.

5 The upper plate is driven by the first drive means, the lower plate is driven by the second drive means, and the load current A□ of the first drive means is
A first current measuring device that measures the load current A of the second driving means, and a second current measuring device that measures the load current A1 of the first driving means and the difference ΔA1 between the no-load current A1 of the first driving means and the second driving means. The difference ΔA between the no-load current A2゜ and Ayo of the means, and ΔA1 and Δ
A! a calculation means for calculating the difference between; and according to the calculation result,
a first control means for controlling the load current of the first drive means; a second control means for controlling the load current of the second drive means according to the calculation result;
A grinding machine according to any one of claims 1 to 4, further comprising a control means.

6. A patent claim in which the grinding fluid is a water-soluble grinding fluid containing, as surfactants, 0.5 to 15 wt% of a sulfonate type anionic surfactant and 0.5 to 15 wt% of an ether type nonionic surfactant. The grinding machine according to any one of items 1 to 5.

7. A grindstone for modifying the processed surface of a diamond pellet surface plate for a surface grinding device is fixed to a carrier with different lengths in the vertical and horizontal directions, according to any one of claims 1 to 6. grinding machine.

Figure 5 Old figure Figure 19 1 Figure 20

Claims (1)

[Claims] 1. A pellet is pasted on each of the opposing surfaces of a rotary upper surface plate and a lower surface plate, and a workpiece is held between the pasted pellets by a carrier, Upper surface plate with pressure applied by surface plate or lower foot dragon. In a pellet-type double-sided grinding machine that rotates a lower surface plate and a workpiece in respective predetermined directions, the upper surface plate and the lower foot divide the circumference equally into a concentric circle with radius ri (i is a positive integer). A circular surface plate is formed by pasting diamond pellets at the lattice points that intersect with the radial direction, radial direction lattice point 1
Two-sided eyelet grinding machine whose nl interval Pi is the following +h4. 1) From any of the following formulas (1) to (IV), calculate W so that h(rt) is constant and equal to 7 for all 1s.
Find (r 1 ). h(r,)=a'+bL(r,)・v(r,)・w(r
, ) −(1)h(rt)=c+dL(rt)V(rt
)+eL(rl)w(rt) -ω)h(rl)=f0gL(rl)+■(r l)+zw(ri ・OLD
h(rz)=m+nL(rt)W(rt)=(N)
(Here h(ri) l L(rl) l V(rt)
l W (rl) is the wear height of the pellet stuck on the i-th concentric circle, the contact distance with the workpiece, and the wear height when the pellet stuck on the i-th concentric circle from the center contacts the workpiece and is processed. Relative speed, grinding load 1, a
, b, c, d, e, f, g, j, 1. m. n is a foothold specific to the pellet and workpiece. )ii)
Pi is calculated using the relational expression W(ri)=α/(pellet packing density). (α is a coefficient unique to the pellet.) 2. The flatness of the upper and lower surface plates is determined by the diameter of the surface plate being 180.
0wn or less or more than 1500 planes: within ±50μm, 1
i set forth in claim 1, characterized in that when it is less than 500 + ra and 800 am or more, it is within ±30 μm, and when 800 m is 50 O or more, it is within ±10 μm.
f cutting handling ◎ 3 Static balance of upper surface plate and lower surface plate is 50
The grinding machine according to claim 1 or 2, wherein the grinding machine is within j/-m. 4 A heating/cooling device that heats and cools the grinding fluid; A detector for detecting the temperature of the surface of the adhesive; A detector for detecting the temperature of the grinding fluid; The difference between
and a controller for controlling the heating/cooling device ft+l so that the temperature difference becomes zero based on the calculation result.Claim 1. ! The grinding machine according to any one of items A to Ryo 4. 5 The upper plate is reversely driven by the first drive stage, the lower plate is reversely driven by the second drive means, and the load current Al of the first drive means is
a first current measuring device that measures the current of the second driving means; a second current measuring device that measures the current state of the electric current A2 of the second driving means; calculation means for calculating the difference ΔAIX between the no-load currents A2G and A2 of the 21st drive means; and the difference between ΔA1 and ΔA2; a first control means for controlling; a second control means according to the calculation result;
A grinding machine according to any one of claims 1 to 4, further comprising a second control means for controlling the load current of the drive means. 6. The grinding fluid is a hydrophilic grinding fluid containing 0.5 to 15 wt% of a sulfonate type anionic surfactant and 0.5 to 15 wt% of an ether type nonionic surfactant as a surfactant. A grinding machine according to any one of claims 1 to 5. 7° According to any one of claims 1 to 6, a grinding wheel for modifying the processing surface of a diamond pellet surface plate for a surface grinding device is fixed to a carrier with different lengths in the vertical direction and the horizontal direction. Grinding machine as described.