JPS60151685U - Insulated substrate positioning device - Google Patents

Insulated substrate positioning device

Info

Publication number
JPS60151685U
JPS60151685U JP1984038569U JP3856984U JPS60151685U JP S60151685 U JPS60151685 U JP S60151685U JP 1984038569 U JP1984038569 U JP 1984038569U JP 3856984 U JP3856984 U JP 3856984U JP S60151685 U JPS60151685 U JP S60151685U
Authority
JP
Japan
Prior art keywords
insulating substrate
positioning device
air port
substrate positioning
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984038569U
Other languages
Japanese (ja)
Inventor
町田 励治
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP1984038569U priority Critical patent/JPS60151685U/en
Publication of JPS60151685U publication Critical patent/JPS60151685U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案の一実施例を示した概略図である。 11・・・圧縮空気源、12・・・真空源、13・・・
開閉バルブ、i4・・・切換バルブ、15…コントロー
ラ、16・・・吸着ヘッド、17・・・スプリング、1
8・・・基準コーナ、19・・・絶縁基板、20・・・
吸着口、21・・・押えピン、22・・・載物台。
The drawing is a schematic diagram showing an embodiment of the present invention. 11... Compressed air source, 12... Vacuum source, 13...
Opening/closing valve, i4... Switching valve, 15... Controller, 16... Suction head, 17... Spring, 1
8... Reference corner, 19... Insulating substrate, 20...
Suction port, 21...presser pin, 22... stage.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)絶縁基板上に形成された混成集積回路の回路部品
をレーザ光線により切削し所定の回路特性や回路定数を
得るようにしたレーザトリミング装置において、載物台
上の絶縁基板に圧縮空気を吹きつける空気口装置と、前
記空気口装置への圧縮空気供給を制御する装置とを有し
、前記載物台に前記絶縁基板を位置決めするとき前記空
気口装置からの圧縮空気により前記絶縁基板の浮き上り
を防止するようにしたことを特徴とする絶縁基板位置決
め装置。
(1) In a laser trimming device that cuts the circuit components of a hybrid integrated circuit formed on an insulating substrate using a laser beam to obtain predetermined circuit characteristics and circuit constants, compressed air is applied to the insulating substrate on the stage. It has an air port device for blowing, and a device for controlling supply of compressed air to the air port device, and when the insulating substrate is positioned on the document table, the compressed air from the air port device blows the insulating substrate. An insulated substrate positioning device characterized by being designed to prevent lifting.
(2)前記空気口装置は前記絶縁基板の供給搬出用吸着
口で構成されることを特徴とする実用新案登録請求の範
囲第1項の絶縁基板位置決め装置。
(2) The insulating substrate positioning device according to claim 1, wherein the air port device is constituted by a suction port for supplying and unloading the insulating substrate.
JP1984038569U 1984-03-16 1984-03-16 Insulated substrate positioning device Pending JPS60151685U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984038569U JPS60151685U (en) 1984-03-16 1984-03-16 Insulated substrate positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984038569U JPS60151685U (en) 1984-03-16 1984-03-16 Insulated substrate positioning device

Publications (1)

Publication Number Publication Date
JPS60151685U true JPS60151685U (en) 1985-10-08

Family

ID=30545698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984038569U Pending JPS60151685U (en) 1984-03-16 1984-03-16 Insulated substrate positioning device

Country Status (1)

Country Link
JP (1) JPS60151685U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732794B2 (en) * 1976-10-30 1982-07-13
JPS57139491A (en) * 1981-02-24 1982-08-28 Amada Eng & Service Laser working device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732794B2 (en) * 1976-10-30 1982-07-13
JPS57139491A (en) * 1981-02-24 1982-08-28 Amada Eng & Service Laser working device

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