JPS601485U - 洗浄装置 - Google Patents
洗浄装置Info
- Publication number
- JPS601485U JPS601485U JP9271283U JP9271283U JPS601485U JP S601485 U JPS601485 U JP S601485U JP 9271283 U JP9271283 U JP 9271283U JP 9271283 U JP9271283 U JP 9271283U JP S601485 U JPS601485 U JP S601485U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- porous elastic
- cleaned
- cleaning device
- elastic body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims description 17
- 229920002554 vinyl polymer Polymers 0.000 claims 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 claims 1
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 claims 1
- 239000013013 elastic material Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Brushes (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9271283U JPS601485U (ja) | 1983-06-16 | 1983-06-16 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9271283U JPS601485U (ja) | 1983-06-16 | 1983-06-16 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS601485U true JPS601485U (ja) | 1985-01-08 |
| JPS646953Y2 JPS646953Y2 (enrdf_load_stackoverflow) | 1989-02-23 |
Family
ID=30223059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9271283U Granted JPS601485U (ja) | 1983-06-16 | 1983-06-16 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS601485U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022534563A (ja) * | 2019-05-29 | 2022-08-02 | アプライド マテリアルズ インコーポレイテッド | 化学機械研磨システムのための水蒸気処理ステーション |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0937509A4 (en) * | 1996-11-08 | 2005-01-19 | Aion Co Ltd | SPONGE ROLLER TO CLEAN |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5113908U (enrdf_load_stackoverflow) * | 1974-07-18 | 1976-01-31 | ||
| JPS5184371U (enrdf_load_stackoverflow) * | 1974-12-26 | 1976-07-06 | ||
| JPS5246954U (enrdf_load_stackoverflow) * | 1975-09-29 | 1977-04-02 |
-
1983
- 1983-06-16 JP JP9271283U patent/JPS601485U/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5113908U (enrdf_load_stackoverflow) * | 1974-07-18 | 1976-01-31 | ||
| JPS5184371U (enrdf_load_stackoverflow) * | 1974-12-26 | 1976-07-06 | ||
| JPS5246954U (enrdf_load_stackoverflow) * | 1975-09-29 | 1977-04-02 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022534563A (ja) * | 2019-05-29 | 2022-08-02 | アプライド マテリアルズ インコーポレイテッド | 化学機械研磨システムのための水蒸気処理ステーション |
| JP2025011127A (ja) * | 2019-05-29 | 2025-01-23 | アプライド マテリアルズ インコーポレイテッド | 化学機械研磨システムのための水蒸気処理ステーション |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646953Y2 (enrdf_load_stackoverflow) | 1989-02-23 |
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